Method for inspecting electronic device and electronic device inspection apparatus
View Patent ↗A method for inspecting an electronic device, in which inspection of electrical characteristics is carried out, uses conduction to pass a current to an electronic device while the electronic device is being continuously conveyed.
1. A method for inspecting an electronic device, comprising:
continuously conveying the electronic device which is provided on a substrate;
performing position control so that an electrode of the electronic device contacts with a conduction unit by detecting a movement of a position of the substrate and moving the position of the substrate according to a detection result; and
performing electric conduction to the electronic device by using the conduction unit to carry out an inspection of an electrical characteristic while the electronic device is being continuously conveyed.
2. The method for inspecting the electronic device of claim 1 , wherein the inspection of the electrical characteristic is carried out by the conduction unit and the electrode of the electronic device continuously contacting each other to perform the electric conduction in a state where the conduction unit is fixed.
3. The method for inspecting the electronic device of claim 1 , wherein the inspection of the electrical characteristic is carried out by synchronizing the conduction unit with conveyance of the electronic device so that the conduction unit and the electrode of the electronic device continuously contact each other to perform the electric conduction.
4. The method for inspecting the electronic device of claim 1 , wherein a plurality of the electronic devices are provided on the substrate and conveyed.
5. The method for inspecting the electronic device of claim 1 , wherein the substrate is a resin film, a metal foil or a glass.
6. The method for inspecting the electronic device of claim 1 , wherein the electronic device is an organic electronic device.
7. The method for inspecting the electronic device of claim 1 , wherein the inspection of the electrical characteristic is carried out by detecting luminescence from the electronic device due to the electric conduction.
8. An electronic device inspection apparatus, comprising:
a conveying unit which continuously conveys an electronic device which is provided on a substrate;
a conduction unit which performs electric conduction to the electronic device which is continuously conveyed by the conveying unit;
a positioning unit which performs position control so that an electrode of the electronic device contacts with the conduction unit by detecting a movement of a position of the substrate and moving the position of the substrate according to a detection result; and
an electrical characteristic inspection unit which carries out an inspection of an electrical characteristic of the electronic device to which the electric conduction is performed by the conduction unit and whose position is controlled by the positioning unit.