Organic light-emitting element with hole injection layer having concave portion
View Patent ↗An organic EL element including anode, hole injection layer, buffer layer, light-emitting layer, and cathode, layered on substrate in the stated order, and banks defining a light-emission region, and having excellent light-emission characteristics, due to the hole injection layer having excellent hole injection efficiency, being a tungsten oxide layer including an oxygen vacancy structure, formed under predetermined conditions to have an occupied energy level within a binding energy range from 1.8 eV to 3.6 eV lower than a lowest binding energy of a valence band, and after formation, subjected to atmospheric firing at a temperature within 200 ° C. -230 ° C. inclusive for a processing time of 15-45 minutes inclusive to have increased film density and improved dissolution resistance against an etching solution, a cleaning liquid, etc., used in a bank forming process.
1. An organic light-emitting element, comprising:
an electrode pair composed of an anode and a cathode;
an organic layer between the anode and the cathode, the organic layer containing organic material;
a tungsten oxide layer between the anode and the organic layer, the tungsten oxide layer containing tungsten oxide and having a film density of at least 5.8 g/cm 3 and at most 6.0 g/cm 3 ; and
barrier walls defining an area of the organic layer,
wherein a surface of the tungsten oxide layer has a concave portion between the barrier walls, the surface facing the organic layer, and
a depth of the concave portion is smaller than a film thickness of the tungsten oxide layer measured at a bottom of the concave portion.
2. The organic light-emitting element of claim 1 , wherein
the barrier walls are formed on non-concave portions of the tungsten oxide layer after the tungsten oxide layer is formed.
3. The organic light-emitting element of claim 1 , wherein
the tungsten oxide layer has an occupied energy level within a binding energy range from approximately 1.8 electron volts to approximately 3.6 electron volts lower than a lowest binding energy of a valence band.
4. The organic light-emitting element of claim 1 , wherein
at least one of an ultraviolet photoelectron spectroscopy spectrum and an X-ray photoelectron spectroscopy spectrum of the tungsten oxide layer exhibits an upward protrusion within a binding energy range from approximately 1.8 electron volts to approximately 3.6 electron volts lower than a lowest binding energy of a valence band.
5. The organic light-emitting element of claim 1 , wherein
a differential spectrum obtained by differentiating an ultraviolet photoelectron spectroscopy spectrum of the tungsten oxide layer has a shape that is expressed by a non-exponential function throughout a binding energy range from approximately 1.8 electron volts to approximately 3.6 electron volts lower than a lowest binding energy of a valence band.
6. The organic light-emitting element of claim 1 , wherein
the tungsten oxide layer includes tungsten atoms with a valence of six and tungsten atoms with a valence of five, a ratio W 5+ / W 6+ of the number of the tungsten atoms with a valence of five to the number of the tungsten atoms with a valence of six being at least 3.2% and at most 7.4%.
7. The organic light-emitting element of claim 1 , wherein
the tungsten oxide layer has an oxygen vacancy structure therein and has dissolution resistance to an etching solution for forming the barrier walls.
8. The organic light-emitting element of claim 1 , wherein
the tungsten oxide layer has a film thickness of at least 2 nm and at most 30 nm.
9. The organic light-emitting element of claim 1 , wherein
a periphery of each of the barrier walls is aligned with an inner side wall of the concave portion.
10. The organic light-emitting element of claim 1 , wherein
inner side walls of the concave portion are perpendicular to a top surface of the anode.
11. The organic light-emitting element of claim 1 , wherein
a bottom surface of the concave portion is parallel with a top surface of the anode.
12. The organic light-emitting element of claim 1 , wherein
the tungsten oxide layer is dissolvable by an etching solution usable for forming the barrier layers.
13. The organic light-emitting element of claim 1 , wherein
the tungsten oxide layer is dissolvable by a cleaning solution usable for forming the barrier layers.
14. A method for manufacturing an organic light-emitting element, the organic light-emitting element comprising:
an electrode pair composed of an anode and a cathode;
an organic layer between the anode and the cathode, the organic layer containing organic material;
a tungsten oxide layer between the anode and the organic layer, the tungsten oxide layer containing tungsten oxide and having a film density of at least 5.8 g/cm 3 and at most 6.0 g/cm 3 , a surface of the tungsten oxide layer having a concave portion, the surface facing the organic layer, a depth of the concave s ortion bein smaller than a film thickness of the tungsten oxide layer measured at a bottom of the concave portion, and
barrier walls defining an area of the organic layer and having been formed after forming of the tungsten oxide layer, the concave portion being between the barrier walls, the method comprising:
firing the tungsten oxide layer at a firing temperature of at least 200° C. and at most 230° C., and for a time period of at least 15 minutes.
15. The method of claim 14 , wherein
the tungsten oxide layer has a film thickness of at least 2 nm and at most 30 nm.
16. The method of claim 14 , further comprising:
dissolving a portion of the tungsten oxide layer with an etching solution used when forming the barrier layers to form the concave portion in the tungsten oxide layer.
17. The method of claim 14 , further comprising:
dissolving a portion of the tungsten oxide layer with a cleaning solution used when forming the barrier layers to form the concave portion in the tungsten oxide layer.