Process for the preparation of trisilylamine from monochlorosilane and ammonia

1. A process for production of trisilylamine, comprising:

charging monochlorosilane as a liquid to a reactor;

passing ammonia into the liquid monochlorosilane in the reactor;

reacting the ammonia and the monochlorosilane in a liquid phase in the reactor to obtain a reaction mixture comprising liquid monochlorosilane, liquid trisilylamine and solid ammonium chloride;

transferring the reaction mixture from the reactor into and through a filter unit;

collecting the solid ammonium chloride on the filter unit to obtain a filtrate of the liquid reaction mixture comprising monochlorosilane and trisilylamine;

passing the filtrate from the filter unit into a first distillation column;

distilling the monochlorosilane in the distillation column overhead, condensing the monochlorosilane and feeding the condensed monochlorosilane to the reactor; and

removing gaseous substances from the first distillation column overhead to obtain a first distillation bottoms comprising trisilylamine;

conveying the first bottoms into a second distillation column;

distilling the trisilylamine from the first bottoms in the second distillation column overhead and condensing the distillate to obtain a condensate consisting of trisilylamine; and

removing higher boilers from the system via second bottoms remaining in the second column;

wherein the process is a continuous method.

2. The process according to claim 1 , wherein

the monochlorosilane is in a molar excess relative to the ammonia.

3. The process according to claim 1 , wherein

the reactor is filled with the reaction mixture of the monochlorosilane and the ammonia up to 99% of a reactor volume to perform the reaction.

4. The process according to claim 1 , wherein

the reaction in the reactor is carried out at temperature of from −60 to +40 ° C.

5. The process for production of trisilyla mine of claim 1 , further comprising purging the reactor, filter unit and distillation columns with a protective gas and carrying out the process under a protective gas.

6. The process of claim 5 , wherein the protective gas is nitrogen or a noble gas.

7. The process for production of trisilylamine of claim 1 wherein the reaction of the monochlorosilane and ammonia is conducted in the absence of oxygen and moisture.