Semiconductor device
View Patent ↗A semiconductor device includes a plurality of epitaxial layers stacked over a supportive substrate, a first buried impurity region formed to share the supportive substrate with a lowermost epitaxial layer among the multiple epitaxial layers, one or more second buried impurity regions formed to be coupled with the first buried impurity region and share an N th epitaxial layer and an (N+1) th epitaxial layer among the multiple epitaxial layers, where N is a natural number, a body region formed in an uppermost epitaxial layer among the multiple epitaxial layers and a deep well formed in the uppermost epitaxial layer to surround the body region and to be coupled with the second buried impurity regions that share the uppermost epitaxial layer.
1. A semiconductor device, comprising:
a plurality of epitaxial layers stacked over a substrate;
a first buried impurity region formed to share the substrate with a lowermost epitaxial layer among the plurality of the epitaxial layers;
one or more second buried impurity regions formed to be coupled with the first buried impurity region and formed between an N th epitaxial layer and an (N+1) th epitaxial layer among the plurality of the epitaxial layers;
a body region formed in an uppermost epitaxial layer among the plurality of the epitaxial layers;
a deep well formed in the uppermost epitaxial layer to surround the body region and to be coupled with the second buried impurity regions;
a gate formed over the uppermost epitaxial layer;
a buried insulation layer formed in the deep well; and
a drain region formed in a drift region to be spaced apart from the gate by a predetermined gap,
wherein the second buried impurity regions are disposed not to overlap the first portion of the buried insulation layer,
wherein the drain region is overlapped to the second buried impurity regions.
2. The semiconductor device of claim 1 , wherein each of the plurality of the epitaxial layers is doped to have the same conductive type to one another, and
wherein impurity doping concentration of the plurality of the epitaxial layers is gradually decreased in such a manner that the lowermost epitaxial layer has the highest impurity doping concentration and the uppermost epitaxial layer has the lowest impurity doping concentration among the plurality of the epitaxial layers.
3. The semiconductor device of claim 1 , wherein the first buried impurity region has a planar shape and the one or more second buried impurity regions are formed along a border of the first buried impurity region to have a circular shape.
4. The semiconductor device of claim 1 , wherein the one or more second buried impurity regions are stacked and coupled with each other.
5. The semiconductor device of claim 1 , wherein the deep well surrounds the body region to have a circular shape and is spaced apart from the body region by a predetermined gap.
6. The semiconductor device of claim 1 , further comprising:
a source region formed in the body region; and
wherein the buried insulation layer has a first portion partly overlapping the gate.
7. The semiconductor device of claim 1 , the first buried impurity region is formed between the substrate and the lowermost epitaxial layer that are contact to each other.
8. The semiconductor device of claim 1 , the second buried impurity regions are formed between the N th epitaxial layer and the (N+1) th epitaxial layer that are contact to each other.