Semiconductor device with pocket regions and method of manufacturing the same
A semiconductor device includes a first pocket region and a second pocket region. The source region includes a first extension region having a concentration peak located at a first depth from a surface of the semiconductor substrate, and the first pocket region has a concentration peak located deeper than the first depth, and the drain region includes a second extension region having a concentration peak located at a second depth from the surface of the semiconductor substrate, and the second pocket region has a concentration peak located shallower than the second depth.
1. A method of manufacturing a semiconductor device, comprising:
forming a gate insulating film on a semiconductor substrate of a first conductivity type;
forming a gate electrode on the gate insulating film;
forming a first resist film covering the semiconductor substrate position at a first side of the gate electrode and exposing the semiconductor substrate position at a second side of the gate electrode;
forming a first pocket region layer by implanting an impurity of the first conductivity type into the semiconductor substrate by using the first resist film and the gate electrode as a mask;
forming a first extension region by implanting an impurity of a second conductivity type into the semiconductor substrate using the first resist film and the gate electrode as masks;
forming a second resist film covering the semiconductor substrate position at the second side of the gate electrode and exposing the semiconductor substrate position at the first side of the gate electrode;
forming a second pocket region by implanting an impurity of the first conductivity type into the semiconductor substrate using the second resist film and the gate electrode as masks; and
forming a second extension region by implanting an impurity of the second conductivity type into the semiconductor substrate using the second resist film and the gate electrode as masks,
wherein a concentration peak position of the first pocket region is located deeper than a concentration peak position of the first extension region; and
a concentration peak position of the second pocket region is located shallower than a concentration peak position of the second extension region.
2. The method according to claim 1 , further comprising:
forming a third pocket region by implanting an impurity of the first conductivity type into the semiconductor substrate using the first resist film and the gate electrode as masks,
wherein a concentration peak position of the third pocket region is located shallower than the concentration peak position of the first extension region.
3. The method according to claim 2 ,
wherein an impurity concentration of the third pocket region is less than an impurity concentration of the second pocket region.
4. The method according to claim 2 ,
wherein an impurity concentration of the third pocket region is less than an impurity concentration of the first pocket region.
5. The method according to claim 1 , further comprising
forming a channel region in the semiconductor substrate before forming the gate electrode,
wherein a concentration peak position of the channel region is lower than the concentration peak position of the first pocket region and the concentration peak position of the second pocket region.
6. The method according to claim 1 ,
wherein the concentration peak position of the second extension region is located deeper than the concentration peak position of the first extension region.