IP Library Patent Application 14137856
Patent Application
App. No. 14/137,856

NANOWIRE DEVICE

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Quick Facts
Patent No.
US None
App. No.
14/137,856
Abstract

A nanowire device and a method of forming a nanowire device that is poised for pick up and transfer to a receiving substrate are described. In an embodiment, the nanowire device includes a base layer and a nanowire on and protruding away from a first surface of the base layer. The nanowire may include a core, a shell, and an active layer between the core and the shell. A top electrode layer may be on a second surface of the base layer opposite the first surface and in electrical contact with the core, and a bottom electrode layer may be on and electrical contact with the shell. In an embodiment, the base layer is characterized by a maximum width of the micro scale, and the nanowire is characterized by a maximum width or length of the nano scale.

Claims (63)

1 . A nanowire device comprising:

a base layer;

a nanowire on and protruding away from a first surface of the base layer; wherein the nanowire comprises a core, a shell, and an active layer between the core and the shell;

a top electrode layer on a second surface of the base layer opposite the first surface and in electrical contact with the core; and

a bottom electrode layer on and in electrical contact with the shell.

2 . The nanowire device of claim 1 , wherein the top electrode layer is formed of a transparent or semi-transparent material.

3 . The nanowire device of claim 2 , wherein the top electrode layer covers substantially all the second surface of the base layer.

4 . The nanowire device of claim 3 , wherein the bottom electrode includes a layer stack.

5 . The nanowire device of claim 4 , wherein the bottom electrode includes a mirror layer.

6 . The nanowire device of claim 4 , wherein the bottom electrode includes a bonding layer formed of a noble metal.

7 . The nanowire device of claim 3 , comprising:

a plurality of nanowires on and protruding away from the first surface of the base layer;

wherein each nanowire comprises a core, a shell, and an active layer between the core and the shell;

wherein the top electrode layer is on the second surface of the base layer opposite the first surface and in electrical contact with the core of each nanowire; and

one or more bottom electrode layers on and in electrical contact with the shells of the plurality of nanowires.

8 . The nanowire device of claim 7 , comprising a corresponding plurality of bottom electrode layers on and in electrical contact with the shells of the plurality of nanowires.

9 . The nanowire device of claim 7 , further comprising a patterned mask layer on the base layer, wherein the cores of the plurality of nanowires extend through corresponding openings in the patterned mask layer.

10 . The nanowire device of claim 9 , further comprising a through-hole through an entire thickness of the base layer and the mask layer located laterally between two nanowires.

11 . A structure comprising:

a carrier substrate,

a stabilization layer on the carrier substrate, the stabilization layer including an array of staging cavities;

an array of nanowire devices within the array of staging cavities:

wherein each nanowire device comprises:

a base layer characterized by a maximum width of the micro scale; and

a nanowire on and protruding away from the base layer, the nanowire characterized by a maximum width of the nano scale.

12 . The structure of claim 11 , further comprising a sacrificial release layer spanning between the stabilization layer and the array of nanowire devices.

13 . The structure of claim 12 , wherein the array of nanowire devices are embedded in the sacrificial release layer.

14 . The nanowire device of claim 11 , wherein the stabilization layer comprises a thermoset material.

15 . The nanowire device of claim 11 , wherein each nanowire comprises a core, a shell, and an active layer between the core and the shell.

16 . The nanowire device of claim 15 , further comprising a bottom electrode layer on and in electrical contact with the shell for each nanowire.

17 . The nanowire device of claim 16 , wherein the sacrificial release layer spans along a bottom-most location of the bottom electrode layer for each nanowire.

18 . The nanowire device of claim 17 , wherein the sacrificial release layer includes an array of openings such that the sacrificial release layer does not span along a bottom-most location of the bottom electrode layer for each nanowire.

19 . The nanowire device of claim 18 , wherein the bottom electrode layer for each nanowire is in direct contact with the stabilization layer.

20 . A method of forming a nanostructure comprising:

depositing a bottom electrode layer on a nanowire, wherein the nanowire protrudes from a base layer formed on a handle substrate, and the nanowire comprises a core, a shell, and an active layer between the core and the shell;

etching a mesa trench through the base layer, wherein the mesa trench laterally surrounds the nanowire;

depositing a sacrificial release layer over the base layer and nanowire, and within the mesa trench;

bonding the handle substrate to a carrier substrate with a stabilization layer, wherein the nanowire is retained within the stabilization layer; and

removing the handle substrate.

21 . The method of claim 20 , wherein bonding the handle substrate to the carrier substrate with the stabilization layer comprises:

coating a thermosetting material over the sacrificial release layer; and

curing the thermosetting material.

22 . The method of claim 20 , wherein bonding the handle substrate to the carrier substrate with the stabilization layer comprises:

coating a foundation layer over the sacrificial release layer;

reducing a thickness of the foundation layer;

removing a portion of the sacrificial release layer to expose a portion of the bottom electrode layer over the nanowire; and

coating a cap layer over the foundation layer.

23 . A method comprising:

picking up an array of nanowire devices from a carrier substrate with an electrostatic transfer head assembly supporting an array of electrostatic transfer heads;

contacting a receiving substrate with the array of nanowire devices;

bonding the array of nanowire devices to the receiving substrate; and

releasing the array nanowire devices onto the receiving substrate.

24 . The method of claim 23 , wherein each nanowire device comprises:

a base layer;

a nanowire on and protruding away from a first surface of the base layer; wherein the nanowire comprises a core, a shell, and an active layer between the core and the shell;

a top electrode layer on a second surface of the base layer opposite the first surface and in electrical contact with the core; and

a bottom electrode layer on and in electrical contact with the shell.

25 . The method of claim 23 , wherein each nanowire device comprises:

a base layer characterized by a maximum width of the micro scale; and

a nanowire on and protruding away from the base layer, the nanowire characterized maximum width of the nano scale.

26 . The method of claim 23 , wherein picking up the array of nanowire devices from the carrier substrate with the electrostatic transfer head assembly supporting the array of electrostatic transfer heads comprises:

contacting the top electrode layer of each nanowire device with a corresponding electrostatic transfer head.

27 . The method of claim 23 , further comprising removing a sacrificial release layer between the array of nanowire devices and the carrier substrate prior to picking up the array of nanowire devices.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 25, 2016
From: LUXVUE TECHNOLOGY CORPORATION
To: APPLE INC.
Reel/Frame 038521/0255 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 3, 2014
From: HU, HSIN-HUA; MCGRODDY, KELLY; BIBL, ANDREAS
To: LUXVUE TECHNOLOGY CORPORATION
Reel/Frame 032125/0425 →