Interfacial cap for electrode contacts in memory cell arrays
Exemplary embodiments of the present invention are directed towards a method for fabricated a memory cell comprising depositing a material to form an interface cap above a bulk conductive plug and below active cell materials in the memory cell.
1. A method for fabricating a memory cell, the method comprising:
etching a contact via into a dielectric layer;
depositing a conductive material into the contact via, thereby forming a bulk plug in the contact via;
removing a portion of the conductive material from the contact via to form a recess, wherein the recess has a width greater than or equal to a height of the recess;
depositing an interface cap material in the recess to form an interface cap above the bulk plug, wherein the interface cap material rows planar from a bottom portion of the recess to a top portion of the recess and prevents formation of a keyhole in a center of the contact via, and the interface cap material includes a material having a resistivity that is less than a resistivity of the conductive material forming the bulk plug; and
depositing active cell material on the interface cap, wherein the interface cap separates the active cell material and the conductive material in the contact via.
2. The method of claim 1 , further comprising:
modifying a resistance of the interface cap independently of the resistance of the bulk plug.
3. The method of claim 2 , further comprising:
performing chemical-mechanical planarization (CMP) on the bulk plug before etching out the recess and forming the interface cap in the recess; and
performing CMP on the interface cap material after deposition.
4. The method of claim 1 , wherein the interface cap material is formed using tungsten (W), and the bulk plug is formed using TDMAT TiN.
5. The method of claim 1 , wherein the recess is approximately from 3 to 6 nm in height for a given diameter.
6. The method of claim 1 , further comprising:
forming the interface cap in the recess using physical vapor deposition or chemical vapor deposition (CVD).
7. The method of claim 6 , further comprising:
forming the bulk plug using (CVD).
8. The method of claim 1 , wherein the bulk plug is approximately 40-70 nm in height.
9. The method of claim 1 , further comprising:
forming the interface cap material partially of carbon.
10. The method of claim 1 , further comprising:
forming the interface cap material with a higher energy of formation than the conductive material of the bulk plug.
11. The method of claim 1 , further comprising:
forming the interface cap material so that the interface cap material acts as an electromagnetic/diffusion barrier to elements included in at least one of a material in the bulk plug and the active cell materials.
12. The method of claim 1 , further comprising:
forming the interface cap material using one of TDMAT TiN, TaN, WCN, or TiAIN.
13. A device comprising:
a bulk plug formed in a contact via etched into a dielectric layer;
active cell material deposited atop the bulk plug; and
an interfacial cap separating the active cell material and conductive material in the contact via,
wherein,
the interfacial cap is deposited in a recess which has a width greater than or equal to a height of the recess, causing the interfacial cap to grow planar from a bottom portion of the recess to a top portion of the recess preventing formation of a keyhole in a center of the contact via, and
the interfacial cap includes a material having a resistivity that is less than a resistivity of a material forming the bulk plug.
14. The device of claim 13 forming a memory cell, wherein the memory cell comprises one of phase-change memory, resistive ram (ReRAM), conductive-bridge RAM (CBRAM), or a logic gate.
15. The device of claim 14 , wherein the interfacial cap material is Tungsten (W) and the bulk plug material is TDMAT TiN.
16. The device of claim 14 , wherein the interfacial cap material is Tungsten (W) and the bulk plug material is CVD TiN.
17. The device of claim 16 , wherein the interfacial cap extends cycling endurance of the device because of the CVD TiN.
18. The device of claim 13 , wherein the interfacial cap comprises a grain structure different from a grain structure of the bulk plug.
19. The device of claim 13 , wherein the interfacial cap partially contains carbon.
20. The device of claim 13 , wherein the interfacial cap has a higher energy of formation than the bulk plug.
21. The device of claim 13 , wherein the interfacial cap includes one of TDMAT TiN (TiCN), Tantalum Nitrogen (TaN), WCN or TiAIN.
22. The device of claim 13 , wherein a resistance of the bulk plug is engineered independently from a chemical and electronic interface of the active cell materials.
23. The device of claim 13 , wherein resistive heating is localized at the interfacial cap without increasing resistance in the bulk plug, reducing RC delay and improving latency of the device.
24. The device of claim 13 , wherein the interfacial cap is tailored to have a predetermined work function to optimize device reliability.
25. An electronic device comprising a plurality of memory tiles including an array of memory cells, each cell including:
a bulk plug formed in a contact via etched into a dielectric layer;
active cell material deposited atop the bulk plug; and
an interfacial cap separating the active cell material and conductive material in the contact via,
wherein,
the interfacial cap is deposited in a recess which has a width greater than or equal to a height of the recess, causing the interfacial cap to grow planar from a bottom portion of the recess to a top portion of the recess preventing formation of a keyhole in a center of the contact via, and
the interfacial cap includes a material having a resistivity that is less than a resistivity of a material forming the bulk plug.
26. The electronic device of claim 25 , wherein the interfacial cap material is Tungsten (W) and the bulk plug material is TDMAT TiN.
27. The electronic device of claim 25 , wherein the interfacial cap material is Tungsten (W) and the bulk plug material is CVD TiN.
28. The electronic device of claim 25 , wherein the interfacial cap comprises a grain structure different from a grain structure of the bulk plug.
29. The electronic device of claim 25 , wherein the interfacial cap partially contains carbon.
30. The electronic device of claim 25 , wherein the interfacial cap has a higher energy of formation than the bulk plug.
31. The electronic device of claim 25 , wherein the interfacial cap includes one of TDMAT TiN (TiCN), Tantalum Nitrogen (TaN), WCN, or TiAIN.