Integrated photodetector waveguide structure with alignment tolerance
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
1. A method comprising:
forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s); and
forming a photodetector fully landed on the waveguide structure,
wherein the waveguide structure is formed from silicon material or silicon on insulator material,
wherein the forming of the waveguide structure comprises:
patterning of the silicon on insulator material to form one or more trenches extending to an underlying insulator layer; and
forming insulator material in the one or more trenches to form the STI structure(s),
wherein the photodetector lies within lateral boundaries of the waveguide structure, as defined by divots or recesses formed in the STI structure(s), and
wherein the forming the photodetector comprises:
forming an encapsulating material with a window exposing a portion of the waveguide structure;
forming sensor material on the encapsulating material and the exposed portion of the waveguide structure;
forming an upper encapsulating material on the sensor material and landing on the encapsulating material to seal the sensor material; and
crystallizing the sensor material through an annealing process,
wherein the encapsulating material, the sensor material and the upper encapsulating material are formed within lateral boundaries of the waveguide structure.
2. The method of claim 1 , wherein the waveguide structure is formed with a tapered portion.
3. The method of claim 2 , wherein the photodetector is formed with a tapered input end, fully landed on the waveguide structure.
4. The method of claim 2 , wherein the photodetector is formed with a non-tapered input end.
5. The method of claim 2 , wherein the photodetector and the waveguide structure are formed as continuously tapered structures.
6. The method of claim 1 , wherein the waveguide structure is formed as a continuously tapered structure and the photodetector is formed as a multiple tapered structure, with a tapered input end.