Substrate processing apparatus

1. A substrate processing apparatus for processing a substrate comprising:

a spin chuck comprising a plurality of chuck pins each having an accommodating groove for accommodating a portion of peripheral part of the substrate, holding the substrate at a hold position in a horizontal posture by pressing inner faces of the accommodating grooves toward portions of peripheral part of the substrate;

a nozzle for ejecting process liquid toward the substrate held by the plurality of chuck pins;

a plurality of guide members, being disposed on the spin chuck, on or above the respective plurality of chuck pins, guiding process liquid discharged from the substrate to a surrounding area of the substrate;

a spin motor for rotating the spin chuck along with the plurality of chuck pins and the plurality of guide members around a substrate rotation axis that vertically passes through the substrate; and

a tubular cup, encircling the plurality of chuck pins and the guide members around the substrate rotation axis, receiving process liquid discharged outwardly from the substrate held by the plurality of chuck pins;

wherein each of the plurality of guide member includes:

an inner-edge guide disposed at a position inward and above the accommodating groove; and

an outer-edge guide disposed at a position level with or below the inner-edge guide and outward the chuck pin.

2. The substrate processing apparatus according to claim 1 , wherein the outer-edge guide is disposed below the accommodating groove.

3. The substrate processing apparatus according to claim 1 , wherein the guide member further includes

a lower inclined face, at least a part of the lower inclined face being disposed between the chuck pin and the outer-edge guide in a radial direction perpendicular to the substrate rotation axis; and

the lower inclined face being inclined so that upper edge of the lower inclined face is more inwardly positioned than lower edge of the lower inclined face.

4. The substrate processing apparatus according to claim 1 , wherein each said guide member further includes an inward face that extends in a direction outward and obliquely downward from the inner-edge guide, and is disposed on or above the accommodating groove.

5. The substrate processing apparatus according to claim 1 , wherein each said guide member further includes an outward face that extends in a direction inward and obliquely upward.

6. The substrate processing apparatus according to claim 1 , wherein each said chuck pin includes a pin top face, and the corresponding guide member is distinct from the chuck pin and is disposed on the pin top face.

7. The substrate processing apparatus according to claim 6 , wherein the guide member overlaps the whole area of the pin top face in planar view.

8. The substrate processing apparatus according to claim 6 , wherein a height difference of the inner-edge guide from the pin top face is greater than a height difference of the pin top face from the upper face of the substrate at the hold position.

9. The substrate processing apparatus according to claim 6 , wherein a distance from the inner-edge guide to an inner edge of the pin top face in a radial direction that is perpendicular to the substrate rotation axis, is greater than a height difference of the pin top face from an upper face of the substrate at the hold position.

10. The substrate processing apparatus according to claim 1 , wherein the plurality of guide members are circularly disposed on the spin chuck along a circumferential direction around the substrate rotation axis, and a length of each guide member in the circumferential direction is greater than a distance between the guide members adjacent in the circumferential direction.