Method for manufacturing semiconductor device
View Patent ↗A method for manufacturing a semiconductor device includes: forming, in element regions of a semiconductor wafer, electrodes and a insulator on peripheral part of the electrodes so that a height of the insulator is higher than that of the electrodes; forming, on the front face of the semiconductor wafer, a groove for surrounding a periphery of the electrodes with the insulator being sandwiched between the electrodes and the groove, the groove being formed so that a height of the groove is lower than that of the insulator and the groove extends to an outer circumferential edge of the semiconductor wafer; bonding adhesives onto the electrodes in the element regions so that a height of the adhesives is higher than that of the insulator, and bonding, onto the adhesives, a base material for covering the front face of the semiconductor wafer; and processing a rear face of the semiconductor wafer.
1. A method for manufacturing a semiconductor device, the method comprising:
forming, in each of a plurality of element regions of a semiconductor wafer, surface electrodes and a insulating layer on peripheral parts of the surface electrodes so that a height of the insulating layer from a front face of the semiconductor wafer is higher than that of the surface electrodes;
forming, on the front face of the semiconductor wafer, a dicing line groove for surrounding a periphery of the surface electrodes with the insulating layer being sandwiched between the surface electrodes and the dicing line groove in a plane view, the dicing line groove being formed so that a height of the dicing line groove from the front face of the semiconductor wafer is lower than that of the insulating layer and the dicing line groove extends to an outer circumferential edge of the semiconductor wafer;
after forming the dicing line groove, bonding adhesive layers onto the surface electrodes in the each of the plurality of element regions so that a height of the adhesive layers from the front face of the semiconductor wafer is higher than that of the insulating layer, and bonding, onto a front side of the adhesive layers, a base material for covering the front face of the semiconductor wafer; and
processing a rear face of the semiconductor wafer of which the front face is covered with the base material,
wherein the adhesive layers are formed without having a part disposed on the insulating layer whereby no part of the adhesive layers is formed between the insulating layer and the base material.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein:
in the bonding of the base material for covering the front face of the semiconductor wafer onto the front side of the adhesive layers, a space is formed between the base material and a front face of the insulating layer.
3. The method for manufacturing a semiconductor device, according to claim 2 , wherein:
the surface electrodes and the insulating layer are formed such that surface electrodes adjacent to each other are separated from each other by the insulating layer and the space.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein:
the bonding of the adhesive layers onto the surface electrodes in the each of the plurality of element regions and the bonding of the base material onto the front side of the adhesive layers include attaching, to the front face of the semiconductor wafer, a protective tape of which one surface includes the adhesive layers so as to correspond to the surface electrodes in the each of the plurality of element regions.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein:
the bonding of the adhesive layers onto the surface electrodes in the each of the plurality of element regions and the bonding of the base material onto the front side of the adhesive layers include bonding the adhesive layers onto the surface electrodes in the each of the plurality of element regions of the semiconductor wafer in which the dicing line groove is formed, and then bonding the base material onto the front side of the adhesive layers.