Manufacturing method of array substrate
A manufacturing method of an array substrate includes the following steps. A first conductive layer, a gate insulating layer, a semiconductor layer, an etching stop layer, and a first patterned photoresist are successively formed on a substrate. The etching stop layer and the semiconductor layer uncovered by the first patterned photoresist are then removed by a first etching process. A patterned gate insulating layer and a patterned etching stop layer are then formed through a second etching process. The first conductive layer uncovered by the patterned gate insulating layer is then removed to form a gate electrode. The semiconductor layer uncovered by the patterned etching stop layer is then removed to form a patterned semiconductor layer and partially expose the patterned gate insulating layer.
1. A manufacturing method of an array substrate, comprising:
providing a substrate;
performing a first photolithography process, wherein the first photolithography process comprises:
forming a first conductive layer, a gate insulating layer, a semiconductor layer and an etching stop layer on the substrate sequentially, and forming a first patterned photoresist on the etching stop layer;
performing a first etching process to remove the etching stop layer and the semiconductor layer uncovered by the first patterned photoresist, and to partially expose the gate insulating layer;
performing a second etching process to form a patterned gate insulating layer and a patterned etching stop layer by etching the first patterned photoresist, the etching stop layer and the gate insulating layer, and to partially expose the first conductive layer and the semiconductor layer;
removing the first conductive layer uncovered by the patterned gate insulating layer to form a gate electrode; and
removing the semiconductor layer uncovered by the patterned etching stop layer to form a patterned semiconductor layer, and to partially expose the patterned gate insulating layer; and
performing a second photolithography process, wherein the second photolithography process comprises:
forming a protective layer, wherein the protective layer at least partially covers the substrate and the patterned etching stop layer; and
removing the patterned etching stop layer uncovered by the protective layer to at least partially expose the patterned semiconductor layer.
2. The manufacturing method of the array substrate according to claim 1 , wherein the first photolithography process further comprises removing the first conductive layer uncovered by the patterned gate insulating layer to form a pad electrode.
3. The manufacturing method of the array substrate according to claim 2 , wherein the second photolithography process further comprises removing the patterned gate insulating layer uncovered by the patterned semiconductor layer to at least partially expose the pad electrode.
4. The manufacturing method of the array substrate according to claim 1 , further comprising performing a third photolithography process to form a source electrode and a drain electrode on the protective layer and the patterned semiconductor layer.
5. The manufacturing method of the array substrate according to claim 4 , further comprising:
forming a pixel electrode on the drain electrode through the third photolithography process; and
performing a fourth photolithography process to form an isolation layer on the pixel electrode, wherein the isolation layer has a pixel opening, and the pixel opening at least partially exposes the pixel electrode.
6. The manufacturing method of the array substrate according to claim 4 , further comprising:
forming a pixel electrode between the drain electrode and the protective layer through the third photolithography process; and
performing a fourth photolithography process to form an isolation layer on the pixel electrode, wherein the isolation layer has a pixel opening, and the pixel opening at least partially exposes the pixel electrode.
7. The manufacturing method of the array substrate according to claim 4 , wherein the third photolithography process comprises forming an isolation layer, so the source electrode and the drain electrode are defined by the isolation layer.
8. The manufacturing method of the array substrate according to claim 7 , wherein the third photolithography process further comprises using the isolation layer to define a pixel electrode.
9. The manufacturing method of the array substrate according to claim 7 , wherein the isolation layer has a first thickness region and a second thickness region, and a thickness of the isolation layer in the second thickness region is thinner than a thickness of the isolation layer in the first thickness region.
10. The manufacturing method of the array substrate according to claim 9 , further comprising removing the isolation layer in the second thickness region to form a pixel opening.
11. The manufacturing method of the array substrate according to claim 1 , wherein the first patterned photoresist has a first thickness region and a second thickness region, and a thickness of the first patterned photoresist in the second thickness region is thinner than a thickness of the first patterned photoresist in the first thickness region.
12. The manufacturing method of the array substrate according to claim 11 , wherein the first patterned photoresist in the second thickness region and the corresponding etching stop layer in the second thickness region are removed in the second etching process.
13. The manufacturing method of the array substrate according to claim 1 , wherein the first photolithography process further comprises:
forming a transparent conductive layer on the substrate before forming the first conductive layer; and
removing the transparent conductive layer uncovered by the patterned gate insulating layer to form a pixel electrode.
14. The manufacturing method of the array substrate according to claim 13 , further comprising performing a third photolithography process to form a source electrode and a drain electrode on the protective layer and the patterned semiconductor layer, wherein the third photolithography process comprises:
forming a second conductive layer to cover the protective layer and the patterned semiconductor layer;
forming an isolation layer on the second conductive layer;
removing the second conductive layer uncovered by the isolation layer to form the source electrode and drain electrode; and
removing at least a portion of the patterned gate insulating layer and the first conductive layer uncovered by the isolation layer to at least partially expose the pixel electrode.
15. The manufacturing method of the array substrate according to claim 1 , wherein the semiconductor layer comprises an oxide semiconductor material, an amorphous silicon semiconductor material or a poly silicon semiconductor material.