Granted Patent B2

US 9,500,669 · App. 14/155,994 · Granted Nov 22, 2016

Inventors: Margaret L. Kniffin (Chandler, AZ); Andrew C. McNeil (Chandler, AZ)

Assignee: Freescale Semiconductor, Inc.

G01P21/00G01H13/00G01V13/00

Abstract

Claims (46)

1. A method for calibrating an inertial sensor comprising:

applying a bias voltage to said inertial sensor using a power source;

measuring, at a frequency measurement subsystem, a sense resonant frequency of said inertial sensor produced in response to said bias voltage; and

determining, at a gain determination subsystem, a gain value for calibrating said inertial sensor using said bias voltage and said sense resonant frequency.

2. A method as claimed in claim 1 wherein said frequency measurement subsystem is a first frequency measurement subsystem and said method further comprises measuring, at a second frequency measurement subsystem, a drive resonant frequency of said inertial sensor prior to applying said bias voltage, wherein said determining operation additionally utilizes said drive resonant frequency along with said sense resonant frequency and said bias voltage to determine said gain value.

3. A method as claimed in claim 2 further comprising inducing movement of a movable mass of said inertial sensor, wherein measurement of said drive resonant frequency occurs in response to said inducing operation.

4. A method as claimed in claim 2 wherein:

said measuring said drive resonant frequency measures said drive resonant frequency along a first axis; and

said measuring said sense resonant frequency measures said sense resonant frequency along a second axis, said second axis being perpendicular to said first axis.

5. A method as claimed in claim 1 wherein said applying operation comprises applying said bias voltage between a movable mass and a fixed electrode of said inertial sensor.

6. A method as claimed in claim 1 wherein said bias voltage comprises a direct current (DC) bias voltage.

7. A method as claimed in claim 1 wherein:

said applying operation applies said bias voltage at a plurality of voltage levels;

said measuring operation measures said sense resonant frequency for each of said plurality of voltage levels to produce a plurality of resonant frequency values; and

said determining operation includes utilizing a relationship between said resonant frequency values versus said plurality of voltage levels to obtain said gain value.

8. A method as claimed in claim 7 wherein said determining operation comprises:

measuring a slope of a plot of said plurality of resonant frequency values versus said plurality of voltage levels of said bias voltage;

ascertaining a first sensitivity of said inertial sensor using said slope; and

computing said gain value as a function of a design sensitivity of said inertial sensor relative to said first sensitivity.

9. A method as claimed in claim 8 wherein said frequency measurement system is a first frequency measurement system and said method further comprises measuring, at a second frequency measurement system, a drive resonant frequency of said inertial sensor prior to applying said bias voltage, wherein said ascertaining operation additionally utilizes said drive resonant frequency and said sense resonant frequency along with said slope to determine said sensitivity of said inertial sensor.

10. A method as claimed in claim 1 further comprising said gain determination subsystem storing said gain value in said inertial sensor.

11. A method as claimed in claim 1 wherein said applying and measuring steps are performed without imposing an inertial stimulus on said inertial sensor.

12. A system for calibrating an inertial sensor comprising:

a power source configured to apply a bias voltage to said inertial sensor;

a frequency measurement subsystem configured to measure a sense resonance frequency of said inertial sensor; and

gain determination subsystem configured to determine a gain value for calibrating said inertial sensor using said bias voltage and said sense resonant frequency.

13. A system as claimed in claim 12 wherein:

said frequency measurement subsystem is a first frequency measurement subsystem; said system further comprises a second frequency measurement subsystem configured to measure a drive resonant frequency of said inertial sensor; and

said gain determination subsystem is configured to utilize said drive resonant frequency along with said sense resonant frequency and said bias voltage to determine said gain value.

14. A system as claimed in claim 12 wherein:

said power source is configured to apply said bias voltage at a plurality of direct current (DC) voltage levels;

said frequency measurement subsystem is configured to measure said sense resonant frequency for each of said plurality of DC voltage levels to produce a plurality of resonant frequency values; and

said gain determination subsystem is configured to utilize a relationship between said resonant frequency values versus said plurality of DC voltage levels to obtain said gain value.

15. A system as claimed in claim 14 wherein said gain determination subsystem is configured to measure a slope of a plot of said plurality of resonant frequency values versus said plurality of DC voltage levels of said bias voltage, ascertain a first sensitivity of said inertial sensor using said slope, and compute said gain value as a function of a design sensitivity of said inertial sensor relative to said first sensitivity.

16. A system as claimed in claim 12 wherein said gain determination subsystem is configured to store said gain value in association with said inertial sensor.

17. A method for calibrating an inertial sensor comprising:

applying a bias voltage to said inertial sensor at a plurality of direct current (DC) voltage levels using a power source;

measuring, at a frequency measurement subsystem, a sense resonant frequency of said inertial sensor in response to said bias voltage by measuring said sense resonant frequency for each of said plurality of DC voltage levels to produce a plurality of resonant frequency values;

determining, at a gain determination subsystem, a gain value for calibrating said inertial sensor using said bias voltage and said sense resonant frequency, wherein said determining operation utilizes a relationship between said resonant frequency values versus said plurality of DC voltage levels to obtain said gain value; and

said gain determination subsystem storing said gain value in association with said inertial sensor.

18. A method as claimed in claim 17 wherein said frequency measurement subsystem is a first frequency measurement subsystem and said method further comprises measuring, at a second frequency measurement subsystem, a drive resonant frequency of said inertial sensor prior to applying said bias voltage, wherein said determining operation additionally utilizes said drive resonant frequency along with said relationship between said resonant frequency values versus said plurality of DC voltage levels to obtain said gain value.

19. A method as claimed in claim 17 wherein said determining operation comprises:

measuring a slope of a plot of said plurality of resonant frequency values versus said plurality of DC voltage levels of said bias voltage;

ascertaining an operational sensitivity of said inertial sensor using said slope; and

computing said gain value as a function of a design sensitivity of said inertial sensor relative to said operational sensitivity.

20. A method as claimed in claim 17 wherein said applying and measuring steps are performed without imposing an inertial stimulus on said inertial sensor.

Assignments (27)

Continuity (1)