IP Library Granted Patent US 9,678,003
Granted Patent B2
US 9,678,003 · App. 14/156,842 · Granted Jun 13, 2017

Cavity enhanced laser based isotopic gas analyzer

Inventors: Serguei Koulikov (Mountain View, CA); Alexander Kachanov (San Jose, CA)
Assignee: Li-Cor, Inc.
G01N21/39G01J3/4338G01N21/1702G01N21/59G01N21/61G01N29/2425G01N2021/1704G01N2201/023G01N2201/06113G01N2291/021
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Quick Facts
Patent No.
US 9,678,003
App. No.
14/156,842
Granted
Jun 13, 2017
Kind
B2
Abstract

Systems and methods for measuring the isotope ratio of one or more trace gases and/or components of gas mixtures such as different gas species present in a gas mixture. The system includes a resonant optical cavity having two or more mirrors and containing a gas, the cavity having a free spectral range that equals the difference between frequencies of two measured absorption lines of different gas species in the gas, or of two different isotopes, divided onto an integer number. The system also includes a continuous-wave tunable laser optically coupled with the resonant optical cavity, and a detector system for measuring an absorption of laser light by the gas in the cavity. The detector system includes one of a photo-detector configured to measure an intensity of the intra-cavity light or both a photo-acoustic sensor configured to measure photo-acoustic waves generated in the cavity and a photo-detector configured to measure an intensity of the intra-cavity light.

Claims (39)

1. A gas analyzer system for measuring a concentration of two or more gas species in a gas mixture, the system comprising:

a resonant optical cavity having two or more mirrors having a set cavity length with a free spectral range that equals the difference between frequencies of two predetermined or known absorption lines of two different gas species to be measured divided onto an integer number;

a continuous-wave tunable laser optically coupled with the resonant optical cavity;

a detector system for measuring an absorption of laser light by the gas in the cavity at said two predetermined or known absorption lines;

and

an intelligence module comprising a processor adapted to determine the concentration of the two different gas species,

wherein the laser is tuned to a first wavelength corresponding to a predetermined or known absorption line of a first one of the two gas species and the detector system measures a first signal corresponding to an absorption at the first wavelength, wherein the laser is tuned to a second wavelength corresponding to a predetermined or known absorption line of a second one of the two gas species and the detector system measures a second signal corresponding to an absorption at the second wavelength, and wherein the processor processes the first and second signals and generates an output signal representing concentrations of the first and second gas species.

2. The system of claim 1 , further including;

a temperature sensor for measuring a temperature of the gas in the cavity; and

a pressure sensor for measuring a pressure of the gas in the cavity.

3. The system of claim 1 , wherein the detector system includes a photo-detector configured to measure an intensity of the intra-cavity light.

4. The system of claim 1 , wherein the detector system includes a photo-detector configured to measure an intensity of the intra-cavity light and a photo-acoustic sensor configured to measure photo-acoustic waves generated in the cavity.

5. The system of claim 1 , wherein the laser is tuned to a third wavelength that does not correspond with an absorption line of any of the gas species being measured or analyzed, and wherein the detector system measures a third signal at the third wavelength and wherein the intelligence module is further adapted to determine a baseline based on the third signal.

6. A gas analyzer system for measuring an isotopic ratio of a gas species, the system comprising:

a resonant optical cavity having two or more mirrors having a set cavity length with a free spectral range that equals the difference between frequencies of two predetermined or known absorption lines of two different isotopes of a gas species to be measured divided onto an integer number;

a continuous-wave tunable laser optically coupled to the resonant optical cavity;

a detector system for measuring an absorption of laser light by the gas in the cavity cavity at said two predetermined or known absorption lines;

and

an intelligence module comprising a processor adapted to determine an isotope ratio of the two different isotopes,

wherein the laser is tuned to a first wavelength corresponding to a predetermined or known absorption line of a first one of the two isotopes and the detector system measures a first signal corresponding to an absorption at the first wavelength, wherein the laser is tuned to a second wavelength corresponding to a predetermined or known absorption line of a second one of the two isotopes and the detector system measures a second signal corresponding to an absorption at the second wavelength, and wherein the processor processes the first and second signals and generates an output signal representing an isotope ratio of the two different isotopes.

7. The system of claim 6 , further including:

a temperature sensor for measuring a temperature of the gas in the cavity; and

a pressure sensor for measuring a pressure of the gas in the cavity.

8. The system of claim 6 , wherein the detector system includes a photo-detector configured to measure an intensity of the intra-cavity light.

9. The system of claim 6 , wherein the detector system includes a photo-detector configured to measure an intensity of the intra-cavity light and a photo-acoustic sensor configured to measure photo-acoustic waves generated in the cavity.

10. The system of claim 6 , wherein the laser is tuned to a third wavelength that does not correspond with an absorption line of any of the isotopes being measured or analyzed, and wherein the detector system measures a third signal at the third wavelength and wherein the intelligence module is further adapted to determine a baseline based on the third signal.

11. A gas analyzer system for measuring concentrations of isotopes in a gas species, the system comprising:

a resonant optical cavity having two or more mirrors and having a set cavity length with a free spectral range that equals the difference between frequencies of two predetermined or known absorption lines of two different isotopes of the gas species to be measured divided onto an integer number;

a continuous-wave tunable laser optically coupled to the resonant optical cavity;

a detector system for measuring an absorption of laser light by the gas in the cavity cavity at said two predetermined or known absorption lines;

and

an intelligence module comprising a processor adapted to determine concentrations of the two different isotopes,

wherein the laser is tuned to a first wavelength corresponding to a predetermined or known absorption line of a first one of the two isotopes and the detector system measures a first signal corresponding to an absorption at the first wavelength, wherein the laser is tuned to a second wavelength corresponding to a predetermined or known absorption line of a second one of the two isotopes and the detector system measures a second signal corresponding to an absorption at the second wavelength, and wherein the processor processes the first and second signals and generates an output signal representing concentrations of the first and second isotopes.

12. The system of claim 11 , further including:

a temperature sensor for measuring a temperature of the gas in the cavity; and

a pressure sensor for measuring a pressure of the gas in the cavity.

13. The system of claim 11 , wherein the detector system includes a photo-detector configured to measure an intensity of the intra-cavity light.

14. The system of claim 11 , wherein the detector system includes a photo-detector configured to measure an intensity of the intra-cavity light and a photo-acoustic sensor configured to measure photo-acoustic waves generated in the cavity.

15. The system of claim 11 , wherein the laser is tuned to a third wavelength that does not correspond with an absorption line of any of the isotopes being measured or analyzed, and wherein the detector system measures a third signal at the third wavelength and wherein the intelligence module is further adapted to determine a baseline based on the third signal.

Assignments (1)
SECURITY INTEREST Recorded Dec 1, 2021
From: LI-COR, INC.
To: MIDCAP FINANCIAL TRUST
Reel/Frame 058293/0889 →
Continuity (3)
Continuation 13538620 · Jun 29, 2012
Provisional Application 61524911 · Aug 18, 2011
Related Publication 20140192347A1 · Jul 10, 2014