Electrochemical sensor device
View Patent ↗There is disclosed an electrochemical sensor device comprising: an integrated electrochemical sensor element having: a substrate; first and second electrodes formed on the upper surface of the substrate; and an electrolyte layer formed on the first and second electrodes so as to electrically contact both the first and second electrodes; and a sensor integrated circuit electrically connected to the first and second electrodes of the integrated electrochemical sensor element. The integrated electrochemical sensor element and the sensor integrated circuit are provided in a single package.
1. An electrochemical sensor device comprising:
an integrated electrochemical sensor element having: a substrate; first and second electrodes formed on the upper surface of the substrate; and an electrolyte layer formed on the first and second electrodes so as to electrically contact both the first and second electrodes;
a sensor integrated circuit electrically connected to the first and second electrodes of the integrated electrochemical sensor element, wherein the integrated electrochemical sensor element and the sensor integrated circuit are provided in a single package; and
an overmold having a cavity situated above the integrated electrochemical sensor element, wherein the electrolyte layer is formed in the cavity.
2. The electrochemical sensor device of claim 1 , wherein the integrated electrochemical sensor element further comprises:
a filter layer formed above the electrolyte layer, the filter layer being adapted to block one or more components of a gaseous medium.
3. The electrochemical sensor device of claim 1 , wherein the integrated electrochemical sensor element further comprises:
a reference electrode formed on the upper surface of the substrate below the electrolyte layer, the electrolyte layer electrically contacting the reference electrode,
and wherein the reference electrode is electrically connected to the integrated circuit.
4. The electrochemical sensor device of claim 1 , wherein the thickness of the electrolyte layer is 10 μm or less,
and wherein the area of the first and second electrodes electrically contacting the electrolyte layer is 11 mm 2 or less.
5. The electrochemical sensor device of claim 1 , wherein the upper surface of the substrate comprises a cavity within which the first and second electrodes are formed, and wherein the electrolyte layer is formed in the cavity so as to fill the cavity and cover the first and second electrodes.
6. The electrochemical sensor device of claim 1 , wherein the integrated electrochemical sensor element and the sensor integrated circuit are formed on a single die.
7. The electrochemical sensor device of claim 6 , wherein the sensor integrated circuit is electrically connected the first and second electrodes of the integrated electrochemical sensor element via one or more vias.
8. The electrochemical sensor device of claim 1 , wherein the integrated electrochemical sensor element and the sensor integrated circuit are formed on separate dies, and wherein the sensor integrated circuit is electrically connected the first and second electrodes of the integrated electrochemical sensor element via one or more bond wires.
9. The electrochemical sensor device of claim 1 further comprising an additional sensing element adapted to determine temperature.
10. A method of manufacturing a packaged electrochemical sensor device comprising the steps of:
forming an integrated electrochemical sensor element having: first and second electrodes on the upper surface of a substrate; and an electrolyte layer electrically contacting both the first and second electrodes;
electrically connecting the first and second electrodes to a sensor integrated circuit; and
placing the sensor integrated circuit and the integrated electrochemical sensor element in a single package;
providing for an overmold having a cavity situated above the integrated electrochemical sensor element, wherein the electrolyte layer is formed in the cavity.
11. The method of claim 10 , further comprising the step of forming a filter layer above the electrolyte layer, the filter layer being adapted to block one or more components of a gaseous medium.
12. The method of claim 10 , further comprising:
forming a reference electrode on the upper surface of the substrate below the electrolyte layer, the electrolyte layer electrically contacting the reference, and
electrically connecting the reference electrode to the sensor integrated circuit.
13. The method of claim 10 , comprising forming the integrated electrochemical sensor element and the sensor integrated circuit on a single die.
14. The method of claim 10 , comprising forming the integrated electrochemical sensor element and the sensor integrated circuit on separate dies,
and wherein electrically connecting the sensor integrated circuit to the first and second electrodes of the integrated electrochemical sensor element comprises electrically connecting the sensor integrated circuit to the first and second electrodes of the integrated electrochemical sensor element via one or more bond wires.
15. An electrochemical sensor device comprising:
an integrated electrochemical sensor element having: a substrate; first and second electrodes formed on the upper surface of the substrate; and an electrolyte layer formed on the first and second electrodes so as to electrically contact both the first and second electrodes; and
a sensor integrated circuit electrically connected to the first and second electrodes of the integrated electrochemical sensor element,
wherein the integrated electrochemical sensor element and the sensor integrated circuit are provided in a single package,
wherein the upper surface of the substrate comprises a cavity within which the first and second electrodes are formed,
wherein the electrolyte layer is formed in the cavity so as to fill the cavity and cover the first and second electrodes,
wherein the integrated electrochemical sensor element and the sensor integrated circuit are formed on a single die, and
wherein the substrate is a silicon substrate.
16. A method of manufacturing a packaged electrochemical sensor device comprising the steps of:
forming an integrated electrochemical sensor element having: first and second electrodes on the upper surface of a substrate; and an electrolyte layer electrically contacting both the first and second electrodes;
electrically connecting the first and second electrodes to a sensor integrated circuit;
placing the sensor integrated circuit and the integrated electrochemical sensor element in a single package; and
forming the integrated electrochemical sensor element and the sensor integrated circuit on a single die,
wherein the upper surface of the substrate comprises a cavity within which the first and second electrodes are formed,
wherein the electrolyte layer is formed in the cavity so as to fill the cavity and cover the first and second electrodes, and
wherein the substrate is a silicon substrate.