Granted Patent B2

US 9,205,651 · App. 14/160,358 · Granted Dec 8, 2015

Abstract

Claims (28)

1. A fluidic structure formed in a film, comprising:

a particle filter formed at a bottom surface of the film having a depth less than a thickness of the film;

a cavity fluidically connected to the particle filter extending from a top of the particle filter to a top surface of the film;

an inlet fluidically connected to and positioned adjacent to the cavity, the inlet having a depth less than or equal to a thickness of the film and extending to the top surface of the film; and

a body port extending from the top surface of the film into some depth of the film, the body port fluidically connected to the inlet.

2. The fluidic structure of claim 1 , wherein the film comprises a film selected from the group comprised of: polymer, polyimide, polytetrafluoroethylene, metal and composite.

3. The fluidic structure of claim 1 , wherein the depth of the inlet equals ⅔ of the thickness of the film.

4. The fluidic structure of claim 1 , wherein the film has a thickness of 0.076 millimeters.

5. The fluidic structure of claim 4 , wherein the depth equals 0.051 millimeters.

6. A method of manufacturing a fluidic structure in a film, comprising:

forming a cavity, an inlet and a body port by removing a portion of the film from the top surface to a first depth to form a cavity, an inlet and a body port at a first depth that is less than the film thickness; and

removing a portion of the film in the cavity from the first depth to a back surface of the film to form a particle filter in the cavity and removing a portion of the film in the inlet and the body port to second depth.

7. The method of claim 6 , further comprising eliminating any remnants of the film in the inlet and body port.

8. The method of claim 6 , further comprising:

positioning a first imaging mask over a region of the film;

illuminating the mask with an ablation laser to remove portions of the film to form the cavity, inlet and body port to a first depth;

illuminating a second mask with the ablation laser to form the particle filter and remove the portion of the film in the Melt and the body port to second depth;

moving the film to position a new region of the film adjacent an imaging field of the laser; and

continuing to move the film and illuminate the first and second image masks until all cavities, inlets, body ports and particle filters have been formed.

9. The method of claim 6 , comprising:

positioning an imaging mask over a first region of the film;

etch the film in the first region to the first depth to define the cavities, inlets and body ports;

moving the film to a position new region of the film adjacent an imaging field of a laser;

continuing to move the film and etch the film to the first depth until all of the cavities, inlets and body ports have been etched to the first depth;

moving the film to position the first region adjacent the imaging film and using a second mask to etch the particle filter and the inlet and body port to the second depth in the first region; and

continuing to move the film and etch until all of the particle filters, inlets and body ports have been etched to the second depth.

10. The method of claim 6 , wherein forming a cavity, an inlet and a body port comprises removing a portion of the film from the top surface down to a depth.

11. The method of claim 6 , further comprising bonding the film to a rigid plate prior to forming the cavity.

Assignments (10)