Method of manufacturing a flat panel display device
View Patent ↗A flat panel display device having increased capacitance and a method of manufacturing the flat panel display device are provided. A flat panel display device includes: a plurality of pixel areas, each located at a crossing region of a gate line, a data line, and a common voltage line; a thin film transistor (TFT) located at a region where the gate line and the data line cross each other, the TFT including a gate electrode, a source electrode, and a drain electrode; and a storage capacitor located at a region where the common voltage line and the drain electrode cross each other, the storage capacitor including first, second, and a third storage electrodes.
1. A method of manufacturing a flat panel display device, the method comprising:
preparing a substrate on which pixel areas are defined, the pixel areas comprising a thin film transistor (TFT) area and a storage capacitor area;
forming an active layer on the TFT area of the substrate;
forming a gate line extending in a first direction on the substrate, a gate electrode located in the TFT area, and a first storage electrode in the storage capacitor area;
forming a common voltage line in a direction parallel to the gate line along with a second storage electrode in the storage capacitor area extending from the common voltage line;
forming a data line and a source electrode in a second direction to cross with the gate line; and
forming a drain electrode in the TFT area along with a third storage electrode in the storage capacitor area extending from the drain electrode,
wherein the first and second storage electrodes are spaced from the active layer with an insulting layer therebetween.
2. The method of claim 1 , further comprising:
forming a first interlayer adjusting layer covering the first storage electrode;
forming a second interlayer adjusting layer covering the second storage electrode; and
forming a first contact hole to expose the first storage electrode through the first interlayer adjusting layer and the second interlayer adjusting layer at a region where the second storage electrode is not located.
3. The method of claim 2 , further comprising:
forming a protection layer to cover the third storage electrode; and
forming a second contact hole to expose the third storage electrode through the protection layer at a region where the first storage electrode or the third storage electrode is located.
4. The method of claim 3 , wherein the first contact hole and the second contact hole overlap each other.
5. The method of claim 2 , wherein the first interlayer adjusting layer and the second interlayer adjusting layer comprise at least one selected from the group consisting of silicon nitride and silicon oxide.
6. The method of claim 2 , wherein the second interlayer adjusting layer comprises a material having higher permittivity than that of the first interlayer adjusting layer.
7. The method of claim 2 , wherein the second interlayer adjusting layer comprises silicon nitride.
8. The method of claim 1 , wherein the second storage electrode comprises a metal or indium tin oxide (ITO).
9. The method of claim 1 , wherein the flat panel display device is a liquid crystal display device.
10. A method of manufacturing a flat panel display device, the method comprising:
preparing a substrate on which pixel areas are defined, the pixel areas comprising a thin film transistor (TFT) area and a storage capacitor area;
forming an active layer on the TFT area of the substrate;
forming a gate line extending in a first direction on the substrate, a gate electrode located in the TFT area, and a first storage electrode in the storage capacitor area;
forming a common voltage line in a direction parallel to the gate line along with a second storage electrode in the storage capacitor area extending from the common voltage line;
forming a data line and a source electrode in a second direction to cross with the gate line;
forming a drain electrode in the TFT area along with a third storage electrode in the storage capacitor area extending from the drain electrode;
forming a first interlayer adjusting layer covering the first storage electrode;
forming a second interlayer adjusting layer covering the second storage electrode;
forming a first contact hole to expose the first storage electrode through the first interlayer adjusting layer and the second interlayer adjusting layer at a region where the second storage electrode is not located;
forming a protection layer to cover the third storage electrode; and
forming a second contact hole to expose the third storage electrode through the protection layer at a region where the first storage electrode or the third storage electrode is located.
11. The method of claim 10 , wherein the first contact hole and the second contact hole overlap each other.