PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD
A pattern forming apparatus comprises: a first holder which holds a blanket carrying a pattern forming material on one surface in a horizontal posture with a carrying surface for the pattern forming material faced up; a second holder which holds a plate for patterning the pattern forming material or a substrate, to which a pattern is transferred, as a processing object such that the processing object is proximate to and facing the carrying surface of the blanket held on the first holder; and a push-up unit which partially pushes up an effective area in a central part of the blanket from a lower surface side of the blanket to bring the effective area into contact with the processing object held on the second holder and moves along the lower surface of the blanket to change a push-up position of the blanket.
1 . A pattern forming apparatus, comprising:
a first holder which holds a blanket carrying a pattern forming material on one surface in a horizontal posture with a carrying surface for the pattern forming material faced up;
a second holder which holds a plate for patterning the pattern forming material or a substrate, to which a pattern is transferred, as a processing object such that the processing object is proximate to and facing the carrying surface of the blanket held on the first holder; and
a push-up unit which partially pushes up an effective area in a central part of the blanket from a lower surface side of the blanket to bring the effective area into contact with the processing object held on the second holder and moves along the lower surface of the blanket to change a push-up position of the blanket.
2 . The pattern forming apparatus of claim 1 , wherein the push-up unit pushes up an area of the lower surface of a blanket longer than an effective area along one axial direction at once and moves in one direction from one end to an other end of the effective area in a direction perpendicular to the axial direction.
3 . The pattern forming apparatus of claim 2 , wherein the push-up unit includes a push-up roller extending in the axial direction and a mover which supports the push-up roller rotatably and moves in a direction perpendicular to the axial direction.
4 . The pattern forming apparatus of claim 1 , wherein the first holder holds a peripheral end part of the blanket with the effective area open downward.
5 . The pattern forming apparatus of claim 4 , wherein the first holder includes a holding frame having an annular shape to which an aperture corresponding to the effective area is disposed and whose upper surface corresponding to a peripheral end part of the blanket is a flat surface and holds the blanket placed on the holding frame.
6 . The pattern forming apparatus of claim 1 , comprising an auxiliary holder which partially comes into contact with the lower surface of the blanket.
7 . The pattern forming apparatus of claim 1 , wherein the second holder includes a plate-like member whose lower surface is a flat surface having a plane size larger than a plane size of the processing object and holds the processing object by bringing an upper surface of the processing object into contact with the lower surface of the plate-like member.
8 . A pattern forming method, comprising:
a holding step of holding a plate for patterning a pattern forming material or a substrate, to which a pattern is transferred, as a processing object such that the processing object is held in a horizontal posture and holding a blanket which carries the pattern forming material on one surface in a horizontal posture with a carrying surface for the pattern forming material faced up so as to be proximate to and facing a lower surface of the processing object; and
a push-up step of partially pushing up an effective area in a central part of the blanket from a lower surface side of the blanket to bring the effective area into contact with the processing object and changing a push-up position of the blanket along the lower surface of the blanket.
9 . The pattern forming method of claim 8 , wherein in the holding step, a peripheral end part of the blanket is held with the effective area open downward.
10 . The pattern forming method of claim 8 , wherein in the push-up step, an area of the lower surface of the blanket longer than the effective area along one axial direction is pushed up at once and the push-up position is moved in one direction from one end to an other end of the effective area in a direction perpendicular to the axial direction.
11 . The pattern forming method of claim 10 , wherein in the holding step, a peripheral end parts of opposite ends of the blanket in a direction perpendicular to the axial direction.
12 . The pattern forming method of claim 8 , wherein in the push-up step, the effective area of the blanket held in contact with the processing object by being pushed up is maintained in a state in contact with the processing object at least until the entire effective area comes into contact with the processing object.
13 . The pattern forming method of claim 8 , wherein in the holding step, the blanket is loaded to a position below the processing object and caused to face the processing object after the processing object is positioned in a horizontal posture.
14 . The pattern forming method of claim 8 , wherein in the push-up step, the processing object is held by bringing an upper surface of the processing object into contact with a lower surface of a plate-like member whose lower surface is a flat surface having a plane size larger than a plane size of the processing object.