IP Library Granted Patent US 8,878,324
Granted Patent B2
US 8,878,324 · App. 14/168,627 · Granted Nov 4, 2014

Magnetoresistive element and magnetic memory

Inventors: Yushi Kato (Tokyo, JP); Tadaomi Daibou (Tokyo, JP); Eiji Kitagawa (Tokyo, JP); Takao Ochiai (Tokyo, JP); Takahide Kubota (Sendai, JP); Shigemi Mizukami (Sendai, JP); Terunobu Miyazaki (Sendai, JP)
Assignees: Kabushiki Kaisha Toshiba; Tohoku University
H01L43/10
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Quick Facts
Patent No.
US 8,878,324
App. No.
14/168,627
Granted
Nov 4, 2014
Kind
B2
Abstract

The present invention relates to a magnetoresistive element including a first magnetic layer, a second magnetic layer, a first nonmagnetic layer, a third magnetic layer. The first magnetic layer includes a magnetic film of Mn x Ge y (77 atm %≦x≦82 atm %, 18 atm %≦y≦23 atm %, x+y=100 atm %). The first nonmagnetic layer is provided between the first magnetic layer and the second magnetic layer. The third magnetic layer is provided between the first magnetic layer and the first nonmagnetic layer or between the second magnetic layer and the first nonmagnetic layer, or is provided between the first magnetic layer and the first nonmagnetic layer and between the second magnetic layer and the first nonmagnetic layer. The third magnetic layer includes a Heusler alloy. The present invention also relates to a magnetic memory containing the magnetoresistive element.

Claims (44)

1. A magnetoresistive element comprising:

a first magnetic layer;

a second magnetic layer;

a first nonmagnetic layer provided between the first magnetic layer and the second magnetic layer; and

a third magnetic layer provided between the first magnetic layer and the first nonmagnetic layer or between the second magnetic layer and the first nonmagnetic layer, or provided between the first magnetic layer and the first nonmagnetic layer and between the second magnetic layer and the first nonmagnetic layer, the third magnetic layer including a Heusler alloy,

the first magnetic layer including a magnetic film of Mn x Ge y (77 atm %≦x≦82 atm %, 18 atm %≦y≦23 atm %, x+y=100 atm %).

2. The element according to claim 1 , wherein the third magnetic layer includes one of Co 2 FeSi, Co 2 MnSi, and Co 2 MnGe.

3. The element according to claim 1 , wherein when at least one element selected from the group consisting of Al, Si, B, C, P, Ti, Zn, Mg, Ca, Cr, and Ga is expressed as X, the magnetic film of the first magnetic layer contains (Mn x Ge y ) 100-z X z (77 atm %≦x≦82 atm %, 18 atm %≦y≦23 atm %, x+y=100 atm %, z≦10 atm %).

4. The element according to claim 1 , wherein at least one of the first magnetic layer and the second magnetic layer has a single crystal structure.

5. The element according to claim 1 , wherein the third magnetic layer contains at least one element selected from the group consisting of Mn, Al, and Ge.

6. The element according to claim 1 , wherein the third magnetic layer contains at least one element selected from the group consisting of Co, Fe, and Ni.

7. The element according to claim 1 , wherein the first nonmagnetic layer contains either an oxide containing at least one element selected from the group consisting of Mg, Ca, Ba, Al, Be, Sr, Zn, Ti, V, and Nb or an oxide containing at least one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba and at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb.

8. The element according to claim 1 , wherein the first magnetic layer is formed on a base layer, the base layer being one layer selected from the group consisting of:

a layer of nitride having a NaCl structure containing at least one element selected from the group consisting of Ti, Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce;

a layer of oxide containing one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba, and at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb;

a layer of oxide having a NaCl structure containing at least one element selected from the group consisting of Mg, Al, and Ce; and

a layer containing at least one element selected from the group consisting of Al, Cr, Fe, Co, Rh, Pd, Ag, Ir, Pt, and Au, and having a (001) oriented tetragonal or cubic structure.

9. The element according to claim 1 , wherein:

each of the first and the second magnetic layers has an easy magnetization axis in a direction perpendicular to a film plane;

when a write current is caused to flow between the first magnetic layer and the second magnetic layer via the first nonmagnetic layer, a direction of magnetization of the first magnetic layer is changeable, and a direction of magnetization of the second magnetic layer is fixed;

the magnetoresistive element further includes a fourth magnetic layer located on a side of the second magnetic layer opposite from the first nonmagnetic layer, and having an easy magnetization axis in a direction perpendicular to the film plane, a direction of magnetization of the fourth magnetic layer being antiparallel with a direction of magnetization of the second magnetic layer;

the magnetoresistive element further includes a second nonmagnetic layer located between the second magnetic layer and the fourth magnetic layer; and

the magnetoresistive element meets a relationship represented by an expression Ms 2 ×t 2 <Ms 4 ×t 4 , where a saturation magnetization of the second magnetic layer is Ms 2 , a thickness of the second magnetic layer is t 2 , a saturation magnetization of the fourth magnetic layer is Ms 4 , and a thickness of the fourth magnetic layer is t 4 .

10. A magnetic memory comprising:

the magnetoresistive element according to claim 1 ;

a first wiring electrically connecting to the first magnetic layer of the magnetoresistive element; and

a second wiring electrically connecting to the second magnetic layer of the magnetoresistive element.

11. The memory according to claim 10 , wherein the third magnetic layer includes one of Co 2 FeSi, Co 2 MnSi, and Co 2 MnGe.

12. The memory according to claim 10 , wherein when at least one element selected from the group consisting of Al, Si, B, C, P, Ti, Zn, Mg, Ca, Cr, and Ga is expressed as X, the magnetic film of the first magnetic layer contains (Mn x Ge y ) 100-z X z (77 atm %≦x≦82 atm %, 18 atm %≦y≦23 atm %, x+y=100 atm %, z≦10 atm %).

13. The memory according to claim 10 , wherein at least one of the first magnetic layer and the second magnetic layer has a single crystal structure.

14. The memory according to claim 10 , wherein the third magnetic layer contains at least one element selected from the group consisting of Mn, Al, and Ge.

15. The memory according to claim 10 , wherein the third magnetic layer contains at least one element selected from the group consisting of Co, Fe, and Ni.

16. The memory according to claim 10 , wherein the first nonmagnetic layer contains either an oxide containing at least one element selected from the group consisting of Mg, Ca, Ba, Al, Be, Sr, Zn, Ti, V, and Nb or an oxide containing at least one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba and at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb.

17. The memory according to claim 10 , wherein the first magnetic layer is formed on a base layer, the base layer being one layer selected from the group consisting of:

a layer of nitride having a NaCl structure containing at least one element selected from the group consisting of Ti, Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce;

a layer of oxide containing one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba, and at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb;

a layer of oxide having a NaCl structure containing at least one element selected from the group consisting of Mg, Al, and Ce; and

a layer containing at least one element selected from the group consisting of Al, Cr, Fe, Co, Rh, Pd, Ag, Ir, Pt, and Au, and having a (001) oriented tetragonal or cubic structure.

18. The memory according to claim 10 , wherein:

each of the first and the second magnetic layers has an easy magnetization axis in a direction perpendicular to a film plane;

when a write current is caused to flow between the first magnetic layer and the second magnetic layer via the first nonmagnetic layer, a direction of magnetization of the first magnetic layer is changeable, and a direction of magnetization of the second magnetic layer is fixed;

the magnetoresistive element further includes a fourth magnetic layer located on a side of the second magnetic layer opposite from the first nonmagnetic layer, and having an easy magnetization axis in a direction perpendicular to the film plane, a direction of magnetization of the fourth magnetic layer being antiparallel with a direction of magnetization of the second magnetic layer;

the magnetoresistive element further includes a second nonmagnetic layer located between the second magnetic layer and the fourth magnetic layer; and

the magnetoresistive element meets a relationship represented by an expression Ms 2 ×t 2 <Ms 4 ×t 4 , where a saturation magnetization of the second magnetic layer is Ms 2 , a thickness of the second magnetic layer is t 2 , a saturation magnetization of the fourth magnetic layer is Ms 4 , and a thickness of the fourth magnetic layer is t 4 .

Assignments (4)
CHANGE OF NAME AND ADDRESS Recorded Jan 17, 2020
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 051628/0669 →
CHANGE OF NAME AND ADDRESS Recorded Jan 16, 2020
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 052001/0303 →
MERGER Recorded Jan 15, 2020
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 051524/0444 →
DEMERGER Recorded Jan 10, 2020
From: KABUSHIKI KAISHA TOSHBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051561/0839 →
Priority Claims (1)
JP 2012-208293 · Sep 21, 2012 · national
Continuity (2)
Continuation 13826408 · Mar 14, 2013
Related Publication 20140145279A1 · May 29, 2014