IP Library Granted Patent US 9,054,101
Granted Patent B2
US 9,054,101 · App. 14/169,799 · Granted Jun 9, 2015

Multi-dimensional integrated circuit structures and methods of forming the same

Inventors: Mark Semmelmeyer (Sunnyvale, CA); Sandeep Kumar Goel (San Jose, CA)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L25/50H01L23/3128H01L21/561H01L2224/14181H01L2224/16225H01L2225/06517H01L2924/15311H01L2225/06572H01L25/0652H01L2224/48145H01L2224/73257H01L2225/06506H01L22/22H01L24/14H01L24/16H01L24/32H01L24/48H01L24/73H01L24/81H01L24/92H01L24/97H01L2224/0401H01L2224/04042H01L2224/05009H01L2224/13025H01L2224/1403H01L2224/32225H01L2224/48227H01L2224/4824H01L2224/73204H01L2224/73207H01L2224/81005H01L2224/81815H01L2224/92125H01L2224/97H01L2225/0651H01L2924/157H01L2225/06541H01L2225/06548H01L2924/00014H01L23/5384H01L23/5385H01L2924/1461
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Quick Facts
Patent No.
US 9,054,101
App. No.
14/169,799
Granted
Jun 9, 2015
Kind
B2
Abstract

An embodiment is method comprising attaching a first die and a second die to a first surface of a first interposer using respective ones of first conductive connectors coupled to respective first surfaces of the first die and the second die; attaching a third die and a fourth die to a second surface of the first interposer using respective ones of second conductive connectors, the second surface of the first interposer being opposite the first surface of the interposer; and attaching the first die and the second die to a substrate using respective ones of third conductive connectors coupled to respective second surfaces of the first die and the second die.

Claims (35)

1. A method comprising:

attaching a first die and a second die to a first surface of a first interposer using respective ones of first conductive connectors coupled to respective first surfaces of the first die and the second die;

attaching a third die and a fourth die to a second surface of the first interposer using respective ones of second conductive connectors coupled to respective first surfaces of the third die and the fourth die, the second surface of the first interposer being opposite the first surface of the first interposer; and

attaching the first die and the second die to a substrate using respective ones of third conductive connectors coupled to respective second surfaces of the first die and the second die, the respective second surfaces of the first die and the second die being opposite from the respective first surfaces of the first die and the second die.

2. The method of claim 1 , wherein the first die is communicatively coupled to the second die through the first interposer, and/or the third die is communicatively coupled to the fourth die through the first interposer.

3. The method of claim 1 , wherein the fourth die is not aligned with the first die in a direction orthogonal to the first surface of the first interposer, the first die being communicatively coupled to the fourth die by an electrical path, the electrical path not extending through the second die and the third die.

4. The method of claim 1 , wherein a conductive feature is on a second surface of the third die, the second surface of the third die being opposite from the first surface of the third die.

5. The method of claim 1 further comprising attaching a wire to a conductive feature on a second surface of the third die, the second surface of the third die being opposite from the first surface of the third die, the wire being attached to the substrate.

6. The method of claim 1 further comprising attaching a wire to a conductive feature on a second surface of the third die, the second surface of the third die being opposite from the first surface of the third die, the wire being attached to the second surface of the first interposer.

7. The method of claim 1 further comprising attaching a wire to a first conductive feature on a second surface of the third die, the second surface of the third die being opposite from the first surface of the third die, the wire being attached to a second conductive feature coupled to the first surface of the first die.

8. The method of claim 1 further comprising attaching a wire to a first conductive feature on the first surface of the first die, the wire being attached to the second surface of the first interposer.

9. The method of claim 1 further comprising:

attaching a wire to a conductive feature on a second surface of the third die, the second surface of the third die being opposite from the first surface of the third die, the wire electrically coupling the third die with the first interposer, the first die, or the substrate; and

after attaching the wire, cutting the wire.

10. The method of claim 1 , wherein the first interposer comprises a multiplexor.

11. The method of claim 10 , wherein the multiplexor is capable of receiving respective signals from at least two of the first die, the second die, the third die, or the fourth die and selectively sending a selected signal.

12. The method of claim 1 , wherein at least one of the first die, the second die, the third die, or the fourth die comprises a multiplexor capable of receiving respective signals from at least two others of the first die, the second die, the third die, or the fourth die.

13. The method of claim 1 , wherein at least one of the first die, the second die, the third die, or the fourth die is a redundant die.

14. The method of claim 1 further comprising

attaching the third die and the fourth die to a first surface of a second interposer; and

attaching a fifth die and a sixth die to a second surface of the second interposer, the second surface of the second interposer being opposite from the first surface of the second interposer.

15. The method of claim 1 further comprising:

attaching a fifth die and a sixth die to the first surface of the first interposer; and

attaching a seventh die and an eighth die to the second surface of the first interposer.

16. A method comprising:

attaching a first die and a second die to a first surface of an interposer using respective ones of first conductive connectors coupled to respective first surfaces of the first die and the second die;

attaching a third die and a fourth die to a second surface of the interposer using respective ones of second conductive connectors coupled to respective first surfaces of the third die and the fourth die, the second surface of the interposer being opposite the first surface of the interposer, at least one of the first die, the second die, the third die, or the fourth die being a redundant die of another one of the first die, the second die, the third die, or the fourth die; and

attaching the first die and the second die to a substrate using respective ones of third conductive connectors coupled to respective second surfaces of the first die and the second die, the respective second surfaces of the first die and the second die being opposite from the respective first surfaces of the first die and the second die.

17. The method of claim 16 , wherein at least one of the interposer, the first die, the second die, the third die, or the fourth die comprises a multiplexor capable of receiving respective signals from at least two others of the first die, the second die, the third die, or the fourth die.

18. A method comprising:

attaching a first die and a second die to a first surface of an interposer using respective ones of first conductive connectors coupled to respective first surfaces of the first die and the second die;

attaching a third die and a fourth die to a second surface of the interposer using respective ones of second conductive connectors coupled to respective first surfaces of the third die and the fourth die, the second surface of the interposer being opposite the first surface of the interposer;

attaching the first die and the second die to a substrate using respective ones of third conductive connectors coupled to respective second surfaces of the first die and the second die, the respective second surfaces of the first die and the second die being opposite from the respective first surfaces of the first die and the second die; and

attaching a wire to a first conductive feature coupled to a second surface of the third die, the second surface of the third die being opposite from the first surface of the third die, the wire being attached to a second conductive feature on (i) the substrate, (ii) the second surface of the interposer, and/or (iii) the first surface of the first die.

19. The method of claim 18 further comprising cutting the wire after attaching the wire, wherein the first conductive feature and the second conductive features are not electrically coupled after the cutting the wire.

Continuity (2)
Division 13354967 · Jan 20, 2012
Related Publication 20140147972A1 · May 29, 2014