Dummy end-gate based anti-fuse device for finFET technologies
View Patent ↗An anti-fuse device for fin field-effect transistor (finFET) technology includes a dummy gate, an electrically conductive contact, and a diffusion contact. The dummy gate is formed over an end-corner of a fin. The electrically conductive contact is disposed on a portion of the dummy gate and can be used as a first electrode of the device. The diffusion contact is disposed over the fin and can be used as a second electrode of the device.
1. An anti-fuse device for fin field-effect transistor (finFET) technology, the device comprising:
a dummy gate formed over an end-corner of a fin;
an electrically conductive contact disposed on a portion of the dummy gate and configured to be used as a first electrode of the device; and
a diffusion contact disposed over the fin and configured to be used as a second electrode of the device.
2. The device of claim 1 , wherein the dummy gate partially extends out of the end-corner of the fin, and wherein the fin comprises a fin of an already existing finFET.
3. The device of claim 1 , wherein the dummy gate is isolated from the fin by a thin oxide layer, wherein the thin oxide layer comprises silicon dioxide.
4. The device of claim 3 , wherein the thin oxide layer is configured to breakdown in at least one point near the end-corner when a suitable voltage is applied between the first and the second electrodes of the device to program the device.
5. The device of claim 1 , wherein the diffusion contact is formed on an epitaxial layer formed on the fin.
6. The device of claim 1 , wherein the dummy gate is isolated from the fin by a thick oxide layer, wherein the thick oxide layer comprises silicon dioxide.
7. The device of claim 1 , wherein two dummy gates are formed over end-corners of the fin, and wherein a first one of the two dummy gates is isolated from the fin by a thin oxide layer and the second one of the two dummy gates is isolated from the fin by a thick oxide layer.
8. The device of claim 7 , wherein at least one of the two dummy gates is isolated from the fin by a split-oxide layer, and wherein the split-oxide layer comprises a thin and a thick oxide layer portions.
9. A method for providing an anti-fuse device for fin field-effect transistor (finFET) technology, the method comprising:
forming a dummy gate over an end-corner of a fin;
disposing an electrically conductive contact on a portion of the dummy gate and configuring the electrically conductive contact to be used as a first electrode of the anti-fuse device; and
disposing a diffusion contact over the fin and configuring the diffusion contact to be used as a second electrode of the anti-fuse device.
10. The method of claim 9 , further comprising forming the dummy gate such that the dummy gate partially extends out of the end-corner of the fin, and wherein the fin comprises a fin of an already existing finFET.
11. The method of claim 9 , further comprising forming a thin oxide layer to isolate the dummy gate from the fin, wherein the thin oxide layer comprises silicon dioxide.
12. The method of claim 11 , further comprising configuring the thin oxide layer to breakdown in at least one point near the end-corner when a suitable voltage is applied between the first and the second electrodes of the anti-fuse device to program the anti-fuse device.
13. The method of claim 9 , further comprising forming the diffusion contact on an epitaxial layer formed on the fin.
14. The method of claim 9 , further comprising forming a thick oxide layer to isolate the dummy gate from the fin, wherein the thick oxide layer comprises silicon dioxide.
15. The method of claim 9 , further comprising forming two dummy gates over end-corners of the fin, and isolating a first one of the two dummy gates from the fin by a thin oxide layer and isolating the second one of the two dummy gates from the fin by a thick oxide layer.
16. The method of claim 15 , further comprising isolating at least one of the two dummy gates from the fin by a split-oxide layer, and wherein the split-oxide layer comprises a thin and a thick oxide layer portions.
17. A communication device, comprising:
a memory device comprising:
one-time programmable (OTP) memory including an anti-fuse device compatible with fin field-effect transistor (finFET) technology comprising:
a dummy gate formed over an end-corner of a fin;
an electrically conductive contact disposed on a portion of the dummy gate and configured to be used as a first electrode of the device; and
a diffusion contact disposed over the fin and configured to be used as a second electrode of the device.
18. The communication device of claim 17 , wherein the dummy gate is isolated from the fin by a thin oxide layer, wherein the thin oxide layer comprises silicon dioxide, and wherein the thin oxide layer is configured to breakdown in at least one point near the end-corner when a suitable voltage is applied between the first and the second electrodes of the device to program the device.
19. The communication device of claim 17 , wherein the diffusion contact is formed on an epitaxial layer formed on the fin, wherein the dummy gate is isolated from the fin by a thick oxide layer, and wherein the thick oxide layer comprises silicon dioxide.
20. The communication device of claim 17 , wherein two dummy gates are formed over end-corners of the fin, wherein a first one of the two dummy gates is isolated from the fin by a thin oxide layer and the second one of the two dummy gates is isolated from the fin by a thick oxide layer, and wherein at least one of the two dummy gates is isolated from the fin of by a split-oxide layer, and wherein the split-oxide layer comprises a thin and a thick oxide layer portions.