System and method for improved epitaxial lift off
View Patent ↗An apparatus, system and method for performing ELO are disclosed. Device assemblies are contemporaneously etched in a stacked arrangement. Each device assembly may be placed in a respective tray, where the trays are overlapped and spaced apart from one another. In this manner, more device assemblies can be etched per unit area compared to conventional systems. Further, by stacking device assemblies during etching, the yield can be improved and/or the cost of the etch tank and associated hardware can be reduced.
1. An apparatus comprising:
a plurality of trays operable to accept a plurality of device assemblies, wherein each device assembly of said plurality of device assemblies comprises a respective device and a respective substrate, wherein said plurality of trays are physically spaced apart from one another in a stacked arrangement;
a first plurality of members operable to clamp said plurality of device assemblies to said plurality of trays, and wherein said first plurality of members is coupled with a first component operable to contemporaneously move said first plurality of members; and
a second plurality of members operable to apply a bending load to said plurality of device assemblies, wherein said second plurality of members is further operable to enable separation of said respective device and said respective substrate responsive to an etching of a respective release layer disposed between said respective device and said respective substrate, and wherein said second plurality of members is coupled with a second component operable to contemporaneously move said second plurality of members.
2. The apparatus of claim 1 , wherein said plurality of device assemblies each comprise a respective device selected from a group consisting of a solar cell and a light emitting diode.
3. The apparatus of claim 1 , wherein said plurality of device assemblies further comprises a plurality of plastic films, wherein said first plurality of members is operable to interface with a respective first side of each of said plurality of plastic films, and wherein said second plurality of members is operable to interface with a respective second side of each of said plurality of plastic films.
4. The apparatus of claim 1 , wherein each of said second plurality of members is hoop shaped.
5. The apparatus of claim 1 further comprising:
a third plurality of members operable to apply a bending load to said plurality of device assemblies, wherein said third plurality of members is further operable to enable separation of said respective device and said respective substrate responsive to an etching of a respective release layer disposed between said respective device and said respective substrate, wherein said third plurality of members is coupled with a third component operable to contemporaneously move said third plurality of members, and wherein said second and third plurality of members are operable to move independently of one another.
6. The apparatus of claim 1 , wherein said plurality of trays comprises a plurality of components operable to be placed in first position and a second position, wherein said plurality of components in said first position is operable to enable a fluid to be applied to said plurality of device assemblies for performing said etching, and wherein said plurality of components in said second position is operable to enable said fluid to flow away from said plurality of device assemblies.
7. A system comprising:
a tank;
an apparatus disposed at least partially within said tank, wherein said apparatus comprises:
a plurality of trays operable to accept a plurality of device assemblies, wherein each device assembly of said plurality of device assemblies comprises a respective device and a respective substrate, wherein said plurality of trays are physically spaced apart from one another in a stacked arrangement;
a first plurality of members operable to clamp said plurality of device assemblies to said plurality of trays, and wherein said first plurality of members is coupled with a first component; and
a second plurality of members operable to apply a bending load to said plurality of device assemblies, wherein said second plurality of members is further operable to enable separation of said respective device and said respective substrate responsive to an etching of a respective release layer disposed between said respective device and said respective substrate, and wherein said second plurality of members is coupled with a second component; and
a first actuator operable to interface with said first component and contemporaneously move said first plurality of members; and
a second actuator operable to interface with said second component and contemporaneously move said second plurality of members.
8. The system of claim 7 , wherein said plurality of device assemblies each comprise a respective device selected from a group consisting of a solar cell and a light emitting diode.
9. The system of claim 7 , wherein said plurality of device assemblies further comprises a plurality of plastic films, wherein said first plurality of members is operable to interface with a respective first side of each of said plurality of plastic films, and wherein said second plurality of members is operable to interface with a respective second side of each of said plurality of plastic films.
10. The system of claim 7 , wherein each of said second plurality of members is hoop shaped.
11. The system of claim 7 further comprising:
a third plurality of members operable to apply a bending load to said plurality of device assemblies, wherein said third plurality of members is further operable to enable separation of said respective device and said respective substrate responsive to an etching of a respective release layer disposed between said respective device and said respective substrate, wherein said third plurality of members is coupled with a third component operable to contemporaneously move said third plurality of members, and wherein said second and third plurality of members are operable to move independently of one another.
12. The system of claim 11 further comprising:
a third actuator operable to interface with said third component and contemporaneously move said third plurality of members.
13. The system of claim 7 , wherein said plurality of trays comprises a plurality of components operable to be placed in first position and a second position, wherein said plurality of components in said first position is operable to enable a fluid to be applied to said plurality of device assemblies for performing said etching, and wherein said plurality of components in said second position is operable to enable said fluid to flow away from said plurality of device assemblies.
14. The system of claim 13 further comprising:
a fourth actuator operable to contemporaneously move said plurality of components.