Actuator device and manufacturing method for actuator device
An actuator device and a manufacturing method for the actuator device with which an outer electrode electrically connected to an inner electrode can be reliably formed even when using a film made of an electrostrictive material. An actuator device includes a plurality of stacked electrostrictive films each of which is made of an electrostrictive material and includes inner electrodes formed on one surface or both surfaces of the film. Lead electrodes are formed to be led out respectively from the inner electrodes toward the outside of the electrostrictive film 31 . At least one cut portion is formed in each of the lead electrodes, and conductive ink is applied to the cut portion. The conductive ink reaches, from the cut portions, the lead electrodes formed on the electrostrictive film.
1. An actuator device comprising:
a plurality of stacked films, each of the films being made of an electrostrictive material and having an inner electrode formed on at least one of top and bottom surfaces of the respective film,
a lead electrode provided on the at least one of the top and bottom surfaces of the films where the inner electrodes are respectively formed and leading out respectively from the inner electrodes toward an outside of the films,
at least one cut portion formed in the lead electrodes,
and
conductive ink applied to the at least one cut portion.
2. The actuator device according to claim 1 , wherein the lead electrodes are formed as electrodes having different polarities, the electrodes of different polarities are not overlapped with each other in a stacking direction of the films, and
the at least one cut portion is formed in each of the lead electrodes having different polarities.
3. The actuator device according to claim 1 , wherein the lead electrodes are formed as electrodes having different polarities, and
a holding member serving to hold the conductive ink is arranged in overlying relation to each of the lead electrodes having different polarities between adjacent ones of the plural stacked films.
4. The actuator device according to claim 3 , wherein the holding member is arranged in contact with an outer periphery of the film at a side where the lead electrodes are formed.
5. A manufacturing method for an actuator device, the method comprising the steps of:
stacking a plurality of films each of which is made of an electrostrictive material and has an inner electrode formed on at least one of top and bottom surfaces of the respective film,
forming a lead electrode to be provided on the at least one of the top and bottom surfaces of the films where the inner electrodes are respectively formed and to be led out respectively from the inner electrodes toward an outside of the film,
forming at least one cut portion in the lead electrode, and
applying conductive ink to the at least one cut portion.
6. The manufacturing method for the actuator device according to claim 5 , wherein the lead electrodes are formed as electrodes having different polarities, the electrodes of different polarities are not overlapped with each other in a stacking direction of the films, and the cut portion is formed in each of the lead electrodes having different polarities.
7. The manufacturing method for the actuator device according to claim 5 , wherein a holding member serving to hold the conductive ink is arranged in overlying relation to each of the lead electrodes between adjacent ones of the plural stacked films.
8. The manufacturing method for the actuator device according to claim 7 , wherein the holding member is arranged in contact with an outer periphery of the film at a side where the lead electrodes are formed.