Patterning a conductive film in a manufacturing method of semiconductor device
To enhance the performance of a semiconductor device. In a method for manufacturing a semiconductor device, a metal film is formed over a semiconductor substrate having an insulating film formed on a surface thereof, and then the metal film is removed in a memory cell region, whereas, in a part of a peripheral circuit region, the metal film is left. Next, a silicon film is formed over the semiconductor substrate, then the silicon film is patterned in the memory cell region, and, in the peripheral circuit region, the silicon film is left so that an outer peripheral portion of the remaining metal film is covered with the silicon film. Subsequently, in the peripheral circuit region, the silicon film, the metal film, and the insulating film are patterned for forming an insulating film portion formed of the insulating film, a metal film portion formed of the metal film, and a conductive film portion formed of the silicon film.
1. A method for manufacturing a semiconductor device, comprising the steps of:
(a) preparing a semiconductor substrate;
(b) forming a first insulating film in a first region on a first principal surface side of the semiconductor substrate and in a second region on the first principal surface side of the semiconductor substrate, on the first principal surface of the semiconductor substrate;
(c) forming a first conductive film over the first insulating film in the first region and in the second region;
(d) removing the first conductive film in the first region and leaving the first conductive film in a part of the second region;
(e) forming a second conductive film on the first principal surface of the semiconductor substrate including over the first conductive film that is left in the step (d), in the first region and in the second region;
(f) patterning the second conductive film in the first region, and leaving, in the second region, the second conductive film over the first conductive film so that an outer peripheral portion of the first conductive film that is left in the step (d) is covered with the second conductive film;
(g) after the step (f), oxidizing a surface of the second conductive film; and
(h) after the step (g), in the second region, patterning the second conductive film, the first conductive film, and the first insulating film, to thereby form a first film portion formed of the first insulating film, a second film portion formed of the first conductive film over the first film portion, and a third film portion formed of the second conductive film over the second film portion.
2. The method for manufacturing a semiconductor device according to claim 1 , further comprising the steps of:
(i) forming a second insulating film so as to cover the first film portion, the second film portion, and the third film portion;
(j) polishing the second insulating film to thereby expose an upper surface of the third film portion;
(k) after the step (j), removing the third film portion to thereby form a concave portion and expose the second film portion in a bottom portion of the concave portion;
(l) after the step (k), forming a third conductive film over the second film portion exposed in the bottom portion of the concave portion, to thereby fill an inside of the concave portion by using the third conductive film; and
(m) after the step (l), removing the third conductive film outside the concave portion, to thereby form a first gate insulating film formed of the first film portion and a first gate electrode formed of the second film portion and the third conductive film.
3. The method for manufacturing a semiconductor device according to claim 2 ,
wherein in the step (f), in the first region, the second conductive film and the first insulating film are patterned for forming a second gate insulating film formed of the first insulating film and a second gate electrode formed of the second conductive film, and
wherein in the step (g), a surface of the second gate electrode is oxidized.
4. The method for manufacturing a semiconductor device according to claim 3 ,
wherein the step (g) includes the steps of:
(g1) forming a third insulating film having a charge storage section therein on the first principal surface of the semiconductor substrate, on a surface of the second gate electrode, and on a surface of the second conductive film that is left in the second region in the step (f);
(g2) forming a fourth conductive film over the third insulating film;
(g3) etching back the fourth conductive film, to thereby form a third gate electrode, with the fourth conductive film being left via the third insulating film over a sidewall of the second gate electrode; and
(g4) removing the third insulating film of a portion not covered with the third gate electrode and leaving the third insulating film between the third gate electrode and the semiconductor substrate and between the second gate electrode and the third gate electrode, and
wherein in the step (g1), a surface of the second gate electrode is oxidized in forming the third insulating film.
5. The method for manufacturing a semiconductor device according to claim 4 ,
wherein the third insulating film includes a first silicon oxide film, a first silicon nitride film over the first silicon oxide film, and a second silicon oxide film over the first silicon nitride film,
wherein the step (g1) includes the steps of:
(g5) forming the first silicon oxide film on the first principal surface of the semiconductor substrate, on a surface of the second gate electrode, and on a surface of the second conductive film that is left in the second region in the step (f);
(g6) forming the first silicon nitride film over the first silicon oxide film; and
(g7) forming the second silicon oxide film over the first silicon nitride film.
6. The method for manufacturing a semiconductor device according to claim 4 ,
wherein the semiconductor device includes a nonvolatile memory, and
wherein the second gate electrode and the third gate electrode are gate electrodes constituting the nonvolatile memory.
7. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the first conductive film includes a titanium nitride film, a tantalum nitride film, a tungsten nitride film, a titanium carbide film, a tantalum carbide film, a tungsten carbide film, a tantalum carbide nitride film, or a tungsten film, and
wherein the second conductive film includes a silicon film.
8. The method for manufacturing a semiconductor device according to claim 1 , further comprising the steps of:
(i) forming a second insulating film so as to cover the first film portion, the second film portion, and the third film portion;
(j) polishing the second insulating film to expose an upper surface of the third film portion;
(k) after the step (j), removing the third film portion, the second film portion, and the first film portion, to thereby form a concave portion and expose the semiconductor substrate in a bottom portion of the concave portion;
(l) after the step (k), forming a third insulating film over the semiconductor substrate exposed in the bottom portion of the concave portion;
(m) after the step (l), forming a third conductive film over the third insulating film, to thereby fill an inside of the concave portion by using the third conductive film; and
(n) after the step (m), removing the third conductive film outside the concave portion, to thereby form a first gate insulating film formed of the third insulating film and a first gate electrode formed of the third conductive film.
9. The method for manufacturing a semiconductor device according to claim 8 ,
wherein, in the step (f), in the first region, the second conductive film and the first insulating film are patterned for forming a second gate insulating film formed of the first insulating film and a second gate electrode formed of the second conductive film, and
wherein, in the step (g), a surface of the second gate electrode is oxidized.
10. The method for manufacturing a semiconductor device according to claim 9 ,
Wherein the step (g) includes the steps of:
(g1) forming a fourth insulating film having a charge storage section therein on the first principal surface of the semiconductor substrate, on a surface of the second gate electrode, and on a surface of the second conductive film that is left in the second region in the step (f);
(g2) forming a fourth conductive film over the fourth insulating film;
(g3) etching back the fourth conductive film to thereby form a third gate electrode, with the fourth conductive film being left via the fourth insulating film over a sidewall of the second gate electrode; and
(g4) removing the fourth insulating film of a portion not covered with the third gate electrode and leaving the fourth insulating film between the third gate electrode and the semiconductor substrate and between the second gate electrode and the third gate electrode, and
wherein in the step (g1), a surface of the second gate electrode is oxidized in forming the fourth insulating film.
11. The method for manufacturing a semiconductor device according to claim 10 ,
wherein the fourth insulating film includes a first silicon oxide film, a first silicon nitride film over the first silicon oxide film, and a second silicon oxide film over the first silicon nitride film, and
wherein the step (g1) includes the steps of:
(g5) forming the first silicon oxide film on the first principal surface of the semiconductor substrate, on a surface of the second gate electrode, and on a surface of the second conductive film that is left in the second region in the step (f);
(g6) forming the first silicon nitride film over the first silicon oxide film; and
(g7) forming the second silicon oxide film over the first silicon nitride film.
12. The method for manufacturing a semiconductor device according to claim 1 ,
wherein in the step (h), a first gate insulating film formed of the first film portion and a first gate electrode formed of the second film portion and the third film portion are formed.
13. The method for manufacturing a semiconductor device according to claim 12 ,
wherein in the step (f), in the first region, the second conductive film and the first insulating film are patterned for forming a second gate insulating film formed of the first insulating film and a second gate electrode formed of the second conductive film, and
wherein in the step (g), a surface of the second gate electrode is oxidized.
14. The method for manufacturing a semiconductor device according to claim 13 ,
wherein the step (g) includes the steps of:
(g1) forming a second insulating film having a charge storage section therein on the first principal surface of the semiconductor substrate, on a surface of the second gate electrode, and on a surface of the second conductive film left the second region in the step (f);
(g2) forming a third conductive film over the second insulating film;
(g3) etching back the third conductive film to thereby form a third gate electrode, with the third conductive film being left via the second insulating film over a sidewall of the second gate electrode; and
(g4) removing the second insulating film of a portion not covered with the third gate electrode and leaving the second insulating film between the third gate electrode and the semiconductor substrate and between the second gate electrode and the third gate electrode, and
wherein in the step (g1), a surface of the second gate electrode is oxidized in forming the second insulating film.
15. The method for manufacturing a semiconductor device according to claim 12 ,
wherein in the step (h), the second film portion and the third film portion are formed so that one end portion, in the second film portion, in a gate width direction of the first gate electrode is covered with the third film portion.
16. The method for manufacturing a semiconductor device according to claim 15 ,
wherein in the step (a), the semiconductor substrate is prepared, which includes: a first active region formed in the first region on the first principal surface side of the semiconductor substrate; and a first element isolating region which is formed in the first region on the first principal surface side of the semiconductor substrate and which defines the first active region, and
wherein in the step (h), the first film portion is formed over the first active region, and the second film portion is formed so that the one end portion, in the second film portion, in the gate width direction is arranged over the first element isolating region.