Three-dimensional semiconductor template for making high efficiency solar cells

1. A method for fabrication of a three-dimensional silicon template, the method comprising:

forming a patterned mask on a silicon template surface defining a pattern of base openings, said pattern of base openings comprising a pattern of at least two differently sized base openings;

selectively removing silicon material from said silicon template in said base openings to form a top surface aligned along a (100) crystallographic plane of the silicon template and a plurality of walls each aligned along a (111) crystallographic plane of the silicon template wherein said walls define inverted pyramidal cavities, said inverted pyramidal cavities comprising at least two differently sized inverted pyramidal cavities, said removal of silicon material comprising the steps of:

anisotropically etching the silicon template to form a plurality of walls each aligned along a (111) crystallographic plane of the silicon template wherein said walls form an inverted pyramidal cavity.

2. The method of claim 1 , wherein said step of anisotropically etching the silicon template utilizes KOH or NaOH as an etchant.

3. The method of claim 1 , wherein said step of anisotropically etching the silicon template utilizes TetraMethyl-Ammonium-Hydroxide (TMAH) as an etchant.

4. The method of claim 1 , wherein said patterned base openings of said patterned mask is a staggered pattern of at least two differently sized base openings.

5. The method of claim 1 , wherein said patterned mask is SiO 2 .

6. The method of claim 1 , wherein said patterned mask is SiN.