VTFT with extended electrode
A thin film transistor includes a polymeric material post on a substrate. An inorganic material cap, covering the top of the post, extends beyond first and second edges of the post to define first and second reentrant profiles, respectively. A conformal conductive gate layer is over the edge of the post, a conformal insulating layer is on the gate layer, and a conformal semiconductor layer is on the insulating layer in the first reentrant profile. A first electrode is in contact with a first portion of the semiconductor layer over the cap and extends to a location adjacent to the second edge. A second electrode is in contact with a second portion of the semiconductor layer not over the post, and adjacent to the first edge such that a distance between the first electrode and second electrode is greater than zero when measured orthogonally to the substrate surface.
1. A thin film transistor structure comprising:
a substrate;
a polymeric material post on the substrate, the post having a height dimension extending away from the substrate to a top, the post having a first edge and a second edge along the height dimension;
an inorganic material cap on the top of the post, the cap covering the top of the post, the cap extending beyond the first edge and the second edge of the post to define a first reentrant profile and a second reentrant profile, respectively;
a conformal conductive gate layer over the edge of the post in the first reentrant profile;
a conformal insulating layer on the gate layer in the first reentrant profile;
a conformal semiconductor layer on the insulating layer in the first reentrant profile;
a first electrode located in contact with a first portion of the semiconductor layer over the cap, the first electrode extending to a location adjacent to the second edge;
a second electrode located in contact with a second portion of the semiconductor layer over the substrate and not over the post, and adjacent to the first edge such that a distance between the first electrode and second electrode is greater than zero when measured orthogonally to the substrate surface, the first electrode and the second electrode defining a transistor having a channel in the semiconductor layer between the first electrode and the second electrode.
2. The structure of claim 1 , wherein the first electrode located in contact with a first portion of the semiconductor layer over the cap conformally covers the second reentrant profile.
3. The structure of claim 1 , further comprising a filler material in the second reentrant profile.
4. The structure of claim 3 , wherein the filler material comprises a structural polymer.
5. The structure of claim 3 , wherein the filler material comprises multiple materials including polymers and inorganic materials.
6. The structure of claim 5 , wherein the multiple materials include distinct layers of polymer material and inorganic material.
7. The structure of claim 3 further comprising:
a conformal dielectric layer on the cap, the edges of the post, and the filler material, the conformal dielectric layer being located at least between the gate layer and the post and between the filler material and the first electrode.
8. The structure of claim 1 further comprising:
a conformal dielectric material layer on the cap, the edges of the post, and at least a portion of the substrate, the conformal dielectric layer being located at least between the gate layer and the post.
9. The structure of claim 1 , wherein the first electrode and the second electrode are transparent conductive oxides.
10. The structure of claim 1 , wherein the inorganic material cap, the conformal conductive gate layer, the conformal insulating layer, the conformal semiconductor layer, the first electrode, and the second electrode include a metal oxide.
11. The structure of claim 1 , wherein the post comprises an epoxy resin or polyimide.
12. The structure of claim 1 , wherein the inorganic material cap includes one of a Al 2 O 3 , SiO 2 , HfO, ZrO, TiO 2 , Ta 2 O 5 , Si x N y , ZnO, and a doped-ZnO material.
13. The structure of claim 1 , wherein the polymeric material post has a height dimension extending away from the substrate that is less than or equal to 10 microns.
14. The structure of claim 1 , wherein the cap extends beyond the edge of the post by a distance that is less than the height of the post.
15. The structure of claim 1 , wherein the first electrode and the second electrode have the same material composition and layer thickness.
16. The structure of claim 1 , the first electrode having an end and the second electrode having an end, wherein the end of the first electrode and the end of the second electrode are vertically aligned.
17. The structure of claim 1 , wherein the channel defined by the first electrode and the second electrode has a length dimension that is less than 10 times the height of the post.
18. The structure of claim 1 , the channel defined by the first electrode and the second electrode including a width dimension and a length dimension, wherein the length dimension varies along the width dimension of the transistor.
19. The structure of claim 1 , further comprising another conductive layer positioned at least under a portion of the polymeric material post in the region of the first reentrant profile and in electrical contact with the conformal conductive gate layer.
20. The structure of claim 1 , wherein the conformal conductive gate layer is only located in the first reentrant profile in the region of the channel.