IP Library Granted Patent US 9,331,205
Granted Patent B2
US 9,331,205 · App. 14/198,633 · Granted May 3, 2016

VTFT with post, cap, and aligned gate

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Quick Facts
Patent No.
US 9,331,205
App. No.
14/198,633
Granted
May 3, 2016
Kind
B2
Abstract

A thin film transistor includes a post on a substrate. The post has a height dimension extending away from the substrate to a top, and an edge along the height dimension. A cap covers the top of the post and extends to a distance beyond the edge of the post to define a reentrant profile. A conformal conductive gate layer is located on the edge of the post in the reentrant profile and not over the cap, and includes a portion that extends along the substrate. A conformal insulating layer is on the gate layer in the reentrant profile. A conformal semiconductor layer is on the insulating layer in the reentrant profile. First and second electrodes are located in contact with a first portion of the semiconductor layer over the cap and a second portion of the semiconductor layer not over the post, respectively.

Claims (28)

1. A thin film transistor comprising:

a substrate;

a post on the substrate, the post having a height dimension extending away from the substrate to a top, the post having an edge along the height dimension;

a cap on the top of the post, the cap covering the top of the post, the cap extending to a distance beyond the edge of the post to define a reentrant profile;

a conformal conductive gate layer on the edge of the post in the reentrant profile and not over the cap, the conformal conductive gate layer including a portion that extends along the substrate;

a conformal insulating layer on the gate layer in the reentrant profile;

a conformal semiconductor layer on the insulating layer in the reentrant profile;

a first electrode located in contact with a first portion of the semiconductor layer over the cap; and

a second electrode located in contact with a second portion of the semiconductor layer not over the post.

2. The transistor of claim 1 , wherein the post is a structural polymer post.

3. The transistor of claim 2 , wherein the post comprises an epoxy resin or polyimide.

4. The transistor of claim 1 , wherein the cap is an inorganic material cap.

5. The transistor of claim 1 , wherein the post is a conductive material post.

6. The transistor of claim 5 , wherein the conductive material post is a metal post.

7. The transistor of claim 1 , wherein the cap is a conductive material cap.

8. The transistor of claim 1 further comprising:

a conformal dielectric layer on the cap, the edges of the post, and at least a portion of the substrate, the conformal dielectric layer being located at least between the conformal conductive gate layer and the post.

9. The transistor of claim 1 , the post having another edge along the height dimension, the cap extending beyond the other edge of the post to define a second reentrant profile, and further comprising:

a third electrode located in contact with a third portion of the semiconductor layer over the substrate and not over the post, and adjacent to the other edge in the second reentrant profile.

10. The transistor of claim 1 , wherein the first electrode and the second electrode are transparent conductive oxides.

11. The transistor of claim 1 , wherein the conformal conductive gate layer includes a portion that extends along the substrate beyond the distance that the cap extends beyond the edge of the post.

12. The transistor of claim 1 , wherein the conformal conductive gate layer includes a portion that extends along the substrate but does not extend beyond the distance that the cap extends beyond the edge of the post.

13. The transistor of claim 1 , wherein the conformal conductive gate layer includes a portion that extends along the substrate to the distance that the cap extends beyond the edge of the post.

14. The transistor of claim 1 , wherein the second electrode located in contact with a second portion of the semiconductor layer not over the post is over a portion of conformal conductive gate layer that extends along the substrate.

15. The transistor of claim 1 , further comprising another conductive material layer positioned at least under a portion of the post and in electrical contact with the conformal conductive gate layer.

16. The transistor of claim 15 , wherein the conductive material layer and the cap are vertically aligned and have the same pattern within the area of the transistor.

17. The transistor of claim 1 , wherein the cap includes a material that blocks more than 80% of light at wavelengths less than 400 nanometers.

18. The transistor of claim 1 , wherein the conformal conductive gate layer includes a material that blocks more than 80% of light at wavelengths less than 400 nanometers.

Assignments (13)
RELEASE OF SECURITY INTEREST IN INTELLECTUAL PROPERTY Recorded Jul 24, 2023
From: EASTMAN KODAK COMPANY
To: BANK OF AMERICA, N.A.
Reel/Frame 064364/0847 →
NOTICE OF SECURITY INTERESTS Recorded Mar 4, 2021
From: EASTMAN KODAK COMPANY
To: BANK OF AMERICA, N.A., AS AGENT
Reel/Frame 056984/0001 →
INTELLECTUAL PROPERTY SECURITY AGREEMENT Recorded Mar 4, 2021
From: EASTMAN KODAK COMPANY
To: ALTER DOMUS (US) LLC
Reel/Frame 056733/0681 →
INTELLECTUAL PROPERTY SECURITY AGREEMENT Recorded Mar 4, 2021
From: EASTMAN KODAK COMPANY
To: ALTER DOMUS (US) LLC
Reel/Frame 056734/0001 →
INTELLECTUAL PROPERTY SECURITY AGREEMENT Recorded Mar 4, 2021
From: EASTMAN KODAK COMPANY
To: ALTER DOMUS (US) LLC
Reel/Frame 056734/0233 →
RELEASE OF SECURITY INTEREST Recorded Jan 24, 2020
From: BARCLAYS BANK PLC
To: EASTMAN KODAK COMPANY; FAR EAST DEVELOPMENT LTD.; FPC INC.; KODAK (NEAR EAST) INC.; KODAK AMERICAS LTD.; KODAK REALTY INC.; LASER PACIFIC MEDIA CORPORATION; QUALEX INC.; KODAK PHILIPPINES LTD.; NPEC INC.
Reel/Frame 052773/0001 →
RELEASE OF SECURITY INTEREST Recorded Jul 30, 2019
From: JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
To: EASTMAN KODAK COMPANY; FAR EAST DEVELOPMENT LTD.; PFC, INC.; KODAK (NEAR EAST), INC.; KODAK AMERICAS, LTD.; KODAK IMAGING NETWORK, INC.; KODAK PORTUGUESA LIMITED; KODAK REALTY, INC.; LASER PACIFIC MEDIA CORPORATION; PAKON, INC.; QUALEX, INC.; KODAK PHILIPPINES, LTD.; NPEC, INC.; CREO MANUFACTURING AMERICA LLC; KODAK AVIATION LEASING LLC
Reel/Frame 049901/0001 →
RELEASE OF SECURITY INTEREST Recorded Jul 22, 2019
From: JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
To: EASTMAN KODAK COMPANY; FAR EAST DEVELOPMENT LTD.; FPC, INC.; KODAK (NEAR EAST), INC.; KODAK AMERICAS, LTD.; KODAK IMAGING NETWORK, INC.; KODAK PORTUGUESA LIMITED; KODAK REALTY, INC.; LASER PACIFIC MEDIA CORPORATION; PAKON, INC.; QUALEX, INC.; KODAK PHILIPPINES, LTD.; NPEC, INC.; CREO MANUFACTURING AMERICA LLC; KODAK AVIATION LEASING LLC
Reel/Frame 050239/0001 →
SECURITY INTEREST Recorded Jan 13, 2017
From: EASTMAN KODAK COMPANY
To: BANK OF AMERICA, N.A., AS AGENT
Reel/Frame 041042/0877 →
SECURITY INTEREST Recorded Mar 28, 2014
From: EASTMAN KODAK COMPANY; FAR EAST DEVELOPMENT LTD.; FPC INC.; KODAK (NEAR EAST), INC.; KODAK AMERICAS, LTD.; KODAK IMAGING NETWORK, INC.; KODAK PORTUGUESA LIMITED; KODAK REALTY, INC.; LASER-PACIFIC MEDIA CORPORATION; QUALEX INC.; KODAK PHILIPPINES, LTD.; NPEC INC.; KODAK AVIATION LEASING LLC
To: BANK OF AMERICA N.A., AS AGENT
Reel/Frame 032553/0152 →
SECURITY INTEREST Recorded Mar 28, 2014
From: EASTMAN KODAK COMPANY; FAR EAST DEVELOPMENT LTD.; FPC INC.; KODAK (NEAR EAST), INC.; KODAK AMERICAS, LTD.; KODAK IMAGING NETWORK, INC.; KODAK PORTUGUESA LIMITED; KODAK REALTY, INC.; LASER-PACIFIC MEDIA CORPORATION; QUALEX INC.; KODAK PHILIPPINES, LTD.; NPEC INC.; KODAK AVIATION LEASING LLC
To: BARCLAYS BANK PLC, AS ADMINISTRATIVE AGENT
Reel/Frame 032553/0398 →
SECURITY INTEREST Recorded Mar 28, 2014
From: EASTMAN KODAK COMPANY; FAR EAST DEVELOPMENT LTD.; FPC INC.; KODAK (NEAR EAST). INC.; KODAK AMERICAS, LTD.; KODAK IMAGING NETWORK, INC.; KODAK PORTUGUESA LIMITED; KODAK REALTY, INC.; LASER-PACIFIC MEDIA CORPORATION; QUALEX INC.; KODAK PHILIPPINES, LTD.; NPEC INC.; KODAK AVIATION LEASING LLC
To: JPMORGAN CHASE BANK, N.A. AS ADMINISTRATIVE AGENT
Reel/Frame 032552/0741 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 6, 2014
From: NELSON, SHELBY FORRESTER; ELLINGER, CAROLYN RAE
To: EASTMAN KODAK COMPANY
Reel/Frame 032362/0627 →