Ink jet head and ink jet printing apparatus having the same
View Patent ↗An ink jet head includes a pressure chamber formed to hold ink, and a nozzle plate including a vibrating plate forming a bottom wall of the pressure chamber, a driving element that is provided on a surface of the vibrating plate and configured to cause a volume of the pressure chamber to be changed by deforming the vibrating plate upon application of voltage to the driving element, an opening through which the ink held in the pressure chamber is discharged in response to the change of the volume of the pressure chamber, and an insulating layer disposed between the driving element and the opening.
1. An ink jet head comprising:
a pressure chamber formed to hold ink; and
a nozzle plate including,
a vibrating plate that is made of an inorganic material and has a first surface serving as a bottom wall of the pressure chamber and a second surface opposite the first surface,
a first opening that penetrates the vibrating plate and has a first diameter to discharge the ink held in the pressure chamber,
a driving element that is provided on the second surface and has a second opening having a second diameter larger than the first diameter to surround the first opening by an inner edge surface thereof and configured to cause a volume of the pressure chamber to be changed by deforming the vibrating plate upon application of voltage to the driving element,
an insulating layer that is formed of an inorganic material and covers the driving element and the inner edge surface of the driving element, and
a protective layer that is formed of an organic material and covers the insulating layer including a third opening communicating with the first opening.
2. The inkjet head according to claim 1 , wherein the first and third openings are formed through the nozzle plate.
3. The inkjet head according to claim 1 , wherein the vibrating plate is exposed to the first opening.
4. The inkjet head according to claim 2 , wherein the vibrating plate is covered by the insulating layer to not be exposed to the opening.
5. The inkjet head according to claim 4 , wherein a hole corresponding to the opening that is formed through the vibrating plate is larger than the opening and portions of the vibrating plate exposed by the hole are covered by the insulating layer.
6. The inkjet head according to claim 1 , wherein the nozzle plate further includes an ink repellent layer formed on a surface of the protective layer and having a hole that forms a part of the opening.
7. The inkjet head according to claim 1 , wherein the driving element includes a first electrode, a second electrode, and a piezoelectric layer interposed between the first and second electrodes.
8. The inkjet head according to claim 7 , wherein the first electrode serves as common electrode and the second electrode serves as a wiring electrode.
9. The inkjet head according to claim 7 , wherein the insulating layer includes a hole to connect the second electrode with a wiring electrode while the first and second electrodes are electrically insulated.
10. The inkjet head according to claim 1 , wherein the insulating layer is made of SiO 2 .
11. The inkjet head according to claim 1 , wherein the protective layer is made of a positive photosensitive polyimide.