Semiconductor device and method for manufacturing semiconductor device
View Patent ↗A semiconductor device includes a substrate, a first well of a first conductivity type formed within the substrate, a second well of a second conductivity type formed underneath the first well within the substrate and a third well of the second conductivity type formed horizontally to the first well within the substrate, and including a first region formed to a first depth from a surface of the substrate, and a second region formed to a second depth greater than the first depth from the surface of the substrate and connected to the second well.
1. A semiconductor device comprising:
a substrate;
a first well of a first conductivity type formed within the substrate;
a second well of a second conductivity type formed underneath the first well within the substrate;
a third well of the second conductivity type formed horizontally to the first well within the substrate, and that includes a first region and a second region;
an insulating film formed on the first region; and
a silicide block layer formed above the first well and the third well,
wherein the first region is located horizontally to the second region;
a bottom of the second region is located deeper than a bottom of the first region;
the second region is connected to the first well; and
the insulating film covers over an upper portion of the first region and is not formed on the second region.
2. The semiconductor device according to claim 1 , wherein an upper surface of the substrate continuous to an upper surface of the insulating film is positioned on the second region.
3. The semiconductor device according to claim 1 , comprising a fourth well of the first conductivity type formed adjacently to the first region within the substrate.
4. The semiconductor device according to claim 1 , comprising an impurity layer formed on an upper portion of a connecting part between the first well and the third well,
wherein the silicide block layer is located on the impurity layer.
5. A method for manufacturing a semiconductor device comprising:
forming an insulating film on a substrate;
forming a first well of a first conductivity type within the substrate;
forming a second well of a second conductivity type underneath the first well within the substrate;
forming a third well of the second conductivity type and that includes a first region and a second region, and that is located horizontally to the first well within the substrate; and
forming a silicide block lay er above the first well and the third well,
wherein the first region is located horizontally to the second region;
a bottom of the second region is located deeper than a bottom of the first region;
the second region is connected to the first well; and
the insulating film covers over an upper portion of the first region and is not formed on the second region.
6. The method for manufacturing a semiconductor device according to claim 5 , wherein an upper surface of the substrate continuous to an upper surface of the insulating film is positioned on the second region.
7. The method for manufacturing a semiconductor device according to claim 5 , comprising forming a fourth well of the first conductivity type within the substrate,
wherein the fourth well is formed adjacently to the first region within the substrate.
8. The method for manufacturing a semiconductor device according to claim 5 , wherein the forming the third well is carried out by implanting impurities at a tilt angle at which channeling takes place.
9. The method for manufacturing a semiconductor device according to claim 5 , comprising forming an impurity layer on an upper portion of a connecting part between the first well and the third well,
wherein the silicide block layer is located on the impurity layer.
10. The semiconductor device according to claim 1 , wherein a horizontal width of the bottom of the second region is smaller than a horizontal width of the third well.
11. The method for manufacturing a semiconductor device according to claim 5 , wherein a horizontal width of the bottom of the second region is smaller than a horizontal width of the third well.
12. The semiconductor device according to claim 1 , wherein the silicide block layer includes an insulating layer.
13. The semiconductor device according to claim 12 , wherein the insulating layer includes a silicon oxide film.
14. The semiconductor device according to claim 1 , wherein the silicide block layer covers up the impurity layer in plan view.
15. The semiconductor device according to claim 1 , comprising gate electrodes formed on the first well and the third well; and
sidewall insulating films formed on side surfaces of the gate electrodes,
wherein the sidewall insulating films are formed of the same material as the silicide block layer.
16. The method for manufacturing a semiconductor device according to claim 5 , wherein the silicide block layer includes an insulating layer.
17. The method for manufacturing a semiconductor device according to claim 16 , wherein the insulating layer includes a silicon oxide film.
18. The method for manufacturing a semiconductor device according to claim 5 , wherein the silicide block layer covers up the impurity layer in plan view.
19. The method for manufacturing a semiconductor device according to claim 5 , comprising forming gate electrodes on the first well and the third well; and
forming sidewall insulating films on side surfaces of the gate electrodes,
wherein the sidewall insulating films are formed of the same material as the silicide block layer.