IP Library Granted Patent US 9,678,036
Granted Patent B2
US 9,678,036 · App. 14/209,620 · Granted Jun 13, 2017

Graphene-based gas and bio sensor with high sensitivity and selectivity

Inventor: Alexander A. Balandin (Riverside, CA)
Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
G01N27/414B82Y15/00
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Quick Facts
Patent No.
US 9,678,036
App. No.
14/209,620
Granted
Jun 13, 2017
Kind
B2
Abstract

A graphene sensor and method for selective sensing of vapors, gases and biological agents are disclosed. The graphene sensor can include a substrate; a dielectric substrate on an upper layer of the substrate; a layer of graphene on an upper layer of the dielectric substrate; and a source and drain contact on an upper surface of the layer of graphene. The method for detection of vapors, gases and biological objects with low frequency input as a sensing parameter can include exposing a graphene device to at least one vapor, gas, and/or biological object, the graphene device comprising: a substrate; a dielectric substrate on an upper layer of the substrate, a layer of graphene on an upper layer of the dielectric substrate, and a source and drain contact on an upper surface of the layer of graphene; and measuring a change in a noise spectra of the graphene device.

Claims (42)

1. A graphene sensor for selective sensing of vapors, gases and biological agents, the graphene sensor comprising:

a substrate;

a dielectric substrate on an upper layer of the substrate;

a layer of graphene on an upper layer of the dielectric substrate;

a source and drain contact on an upper surface of the layer of graphene;

a pre-amplifier configured to amplify current fluctuations; and

a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation.

2. The graphene sensor of claim 1 , wherein the layer of graphene is single layer graphene (SLG).

3. The graphene sensor of claim 1 , wherein the layer of graphene is a bilayer graphene (BLG).

4. The graphene sensor of claim 1 , wherein the substrate is a p-typed highly-doped Si wafer.

5. The graphene sensor of claim 1 , wherein the dielectric substrate is 300-nm thermally grown SiO 2 .

6. The graphene sensor of claim 1 , wherein the source and drain contact are Cr/Au.

7. The graphene sensor of claim 1 , wherein the source and drain contact are Ti/Au.

8. The graphene sensor of claim 1 , comprising:

a pair of Cr/Au contact pads.

9. The graphene sensor of claim 1 , comprising:

a signal analyzer to measure a noise power spectrum.

10. The graphene sensor of claim 1 , comprising:

an electrical circuit for a low frequency noise spectrum input.

11. The graphene sensor of claim 1 , wherein the low-pass and/or the high-pass filter are configured to pass frequencies from 0.03 Hz to 100 KHz.

12. A graphene sensor for selective sensing of vapors, gases and biological agents, the graphene sensor comprising:

a substrate;

a dielectric substrate on an upper layer of the substrate;

one or more ribbons of graphene on an upper layer of the dielectric substrate;

a metal electrode acting as a source and drain contact;

a pre-amplifier configured to amplify current fluctuations; and

a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation.

13. The graphene sensor of claim 12 , wherein the one or more graphene ribbons comprise a plurality of graphene ribbons.

14. The graphene sensor of claim 13 , wherein each of the plurality of graphene ribbons has multiple electrodes.

15. The graphene sensor of claim 14 , wherein the multiple electrodes have different distances between a pair of electrodes.

16. The graphene sensor of claim 12 , comprising:

a signal analyzer to measure a noise power spectrum.

17. A method for selective detection of vapors, gases and biological objects with low frequency input as a sensing parameter using a graphene device, the method comprising:

exposing the graphene device to at least one vapor, gas, and/or biological object, the graphene device comprising a substrate, a dielectric substrate on an upper layer of the substrate, a layer of graphene on an upper layer of the dielectric substrate, and a source and drain contact on an upper surface of the layer of graphene, a pre-amplifier configured to amplify current fluctuations, and a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation; and

measuring a change in a noise spectra of the amplified current fluctuations of the graphene device.

18. The method of claim 17 , comprising:

measuring the change in the noise spectra of the graphene device with a signal analyzer.

19. A method for selective detection of vapors, gases and biological objects with low frequency input as a sensing parameter using a graphene device, the method comprising:

exposing the graphene device to at least one vapor, gas, and/or biological object, the graphene device comprising a substrate, a dielectric substrate on an upper layer of the substrate, one or more ribbons of graphene on an upper layer of the dielectric substrate, a metal electrode acting as a source and drain contact, a pre-amplifier configured to amplify current fluctuations, and a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation; and

measuring a change in a noise spectra of the amplified current fluctuations of the graphene device.

20. The method of claim 19 , comprising:

measuring the change in the noise spectra of the graphene device with a signal analyzer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 6, 2014
From: BALANDIN, ALEXANDER A.
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 032830/0289 →
Continuity (2)
Provisional Application 61798684 · Mar 15, 2013
Related Publication 20140260547A1 · Sep 18, 2014