Method of manufacturing cylindrical piezoelectric element
View Patent ↗In manufacturing method of a cylindrical piezoelectric element, a cylindrical piezoelectric material is formed by molding a piezoelectric material into a cylindrical shape and subjecting the molded piezoelectric material to calcination. A reference electrode is provided on an inner circumferential surface of the cylindrical piezoelectric material. Drive electrodes are provided in a circumferential direction so that the drive electrodes are extending in an axial direction from one end to the other end on an outer circumferential surface. A polarization electrode is provided at a part of the circumferential surface in the vicinity of the one end. A predetermined voltage is applied between the polarization electrode and the reference electrode. The polarization electrode is removed from the cylindrical piezoelectric material.
1. A method of manufacturing a cylindrical piezoelectric element, the method comprising:
providing a cylindrical piezoelectric material comprising a piezoelectric material having a cylindrical shape, wherein the piezoelectric material having the cylindrical shape is subjected to calcination;
forming a reference electrode on an inner circumferential surface of the cylindrical piezoelectric material;
forming a plurality of drive electrodes on an outer circumferential surface of the cylindrical piezoelectric material such that the plurality of drive electrodes extend in an axial direction of the cylindrical piezoelectric material from a vicinity of a first end towards a second end of the cylindrical piezoelectric material;
forming a polarization electrode on a part of the outer circumferential surface of the cylindrical piezoelectric material in a vicinity of the second end of the cylindrical piezoelectric material in the axial direction such that the polarization electrode is electrically connected in series with all the plurality of drive electrodes in the axial direction;
applying a predetermined voltage between the polarization electrode and the reference electrode to polarize areas of the cylindrical piezoelectric material corresponding to the plurality of drive electrodes; and
removing the polarization electrode.
2. The method according to claim 1 , further comprising:
forming the reference electrode to further extend continuously from the inner circumferential surface of the cylindrical piezoelectric material to a part of the outer circumferential surface of the cylindrical piezoelectric material in the vicinity of the first end of the cylindrical piezoelectric material.
3. The method according to claim 2 ,
wherein the applying the predetermined voltage comprises:
arranging a first bar-shaped electrode and a second bar-shaped electrode substantially in parallel with each other;
placing the polarization electrode in electrical contact with the first bar-shaped electrode;
placing the reference electrode extending to the part on the outer circumferential surface of the cylindrical piezoelectric material in electrical contact with the second bar-shaped electrode; and
applying the predetermined voltage between the first bar-shaped electrode and the second bar-shaped electrode.
4. The method according to claim 1 ,
wherein forming the plurality of drive electrodes on the outer circumferential surface of the cylindrical piezoelectric material comprises forming the plurality of drive electrodes such that each drive electrode has a predetermined width in a circumferential direction of the cylindrical piezoelectric material.
5. The method according to claim 1 ,
wherein removing the polarization electrode comprises removing the polarization electrode and the part of the outer circumferential surface of the cylindrical piezoelectric material in the vicinity of the second end of the cylindrical piezoelectric material on which the polarization electrode is formed.