Method to fabricate collimator structures on a direct conversion semiconductor X-ray detector
View Patent ↗A method of fabrication of a collimator structure on a detector that includes applying a first layer of resist to a semiconductor sensor, applying a second layer of resist over the first layer of resist and the semiconductor sensor to cover both the first layer of resist and the semiconductor sensor, exposing the second layer of resist to ultraviolet (UV) light with a photomask to transfer a pattern from the photomask to the second layer of resist, removing portions of the second layer of resist corresponding to the pattern from the photomask to produce openings in the second layer of resist, which expose upper portions of the semiconductor sensor, and depositing a layer of metal in the openings and on the second layer of resist to cover the openings, the first layer of resist, the second layer of resist, and the semiconductor sensor.
1. A method of fabrication of a collimator structure on a detector of a Computed Tomography (CT) apparatus, the method comprising:
applying a first layer of resist to a semiconductor sensor;
applying a second layer of resist over the first layer of resist and the semiconductor sensor to cover both the first layer of resist and the semiconductor sensor;
exposing the second layer of resist to ultraviolet (UV) light with a photomask to transfer a pattern from the photomask to the second layer of resist;
removing portions of the second layer of resist corresponding to the pattern from the photomask to produce openings in the second layer of resist, which expose upper portions of the semiconductor sensor;
depositing a layer of metal in the openings and on the second layer of resist to cover the openings, the first layer of resist, the second layer of resist, and the semiconductor sensor;
polishing an upper portion of the layer of metal such that the layer of metal in the openings is flush with the second layer of resist; and
dicing the first layer of resist and the second layer of resist.
2. The method of claim 1 , wherein
the depositing step includes depositing a second layer of metal to cover the layer of metal.
3. The method of claim 2 , wherein
the layer of metal is of a lower attenuation than the second layer of metal.
4. The method of claim 1 , wherein
the layer of metal is of one of lead (Pb), tungsten (W), and molybdenum (Mo).
5. The method of claim 1 , wherein
the first layer of resist is an SU-8 resist.
6. The method of claim 1 , wherein
the second layer of resist is an SU-8 resist.
7. The method of claim 1 , further comprising:
performing flood exposure of the first layer of resist, before the applying of the second layer of resist.
8. The method of claim 7 , further comprising:
curing the first layer of resist, after the performing of the flood exposure and before the applying of the second layer of resist.
9. The method of claim 1 , further comprising:
curing the first layer of resist and the second layer of resist, after the removing of the portions of the second layer of resist.
10. The method of claim 1 , wherein the semiconductor sensor is one of a cadmium zinc telluride (CZT) sensor, a cadmium telluride (CdTe) sensor, and a mercury iodide (HgI) sensor.