Light-emitting device and method for manufacturing the same
View Patent ↗A method for manufacturing a light-emitting device comprising the steps of: providing a substrate; forming a semiconductor epitaxial stack on the substrate; and forming multiple isolation trenches in the semiconductor epitaxial stack by using a laser beam irradiating the semiconductor epitaxial stack to define multiple light-emitting diode units wherein partial of the substrate is exposed by the isolation trenches.
1. A method for manufacturing a light-emitting device, comprising the steps of:
providing a substrate;
forming a semiconductor epitaxial stack on the substrate, comprising:
forming a first conductive-type semiconductor layer on the substrate;
forming an active layer on the first conductive-type semiconductor layer; and
forming a second conductive-type semiconductor layer on the active layer;
forming multiple mesas in the semiconductor epitaxial stack and exposing part of the first conductive-type semiconductor layer; and
forming multiple isolation trenches in the semiconductor epitaxial stack by using a laser beam irradiating the semiconductor epitaxial stack to define multiple light-emitting diode units,
wherein part of the substrate is exposed by the isolation trenches, and
wherein a sidewall of the isolation trenches is roughened and/or the slope of the sidewall of the isolation trenches is larger than the slope of a sidewall of the mesas.
2. The method for manufacturing a light-emitting device according to claim 1 , wherein the isolation trenches are formed between the regions of the multiple mesas.
3. The method for manufacturing a light-emitting device according to claim 1 , further comprising forming a protective layer on the semiconductor epitaxial stack before forming the isolation trenches.
4. The method for manufacturing a light-emitting device according to claim 1 , wherein one of the isolation trenches has a width less than 10 microns.
5. The method for manufacturing a light-emitting device according to claim 1 , wherein the width of the isolation trench is gradually changed in a direction normal to the substrate.
6. The method for manufacturing a light-emitting device according to claim 1 , wherein the width of the isolation trench is gradually increased in a direction away from the substrate, and/or the difference of a top width and a bottom width of the isolation trench is of between 5 and 10 microns.
7. The method for manufacturing a light-emitting device according to claim 1 , further comprising forming a wire on the isolation trenches for electrically connecting the multiple light-emitting diode units in series or parallel.
8. The method for manufacturing a light-emitting device according to claim 1 , wherein the isolation trenches are extended into the substrate.
9. The method for manufacturing a light-emitting device according to claim 1 , wherein the sidewall of the first conductive-type semiconductor layer in the isolation trenches is roughened.
10. The method for manufacturing a light-emitting device according to claim 1 , further comprising a step of removing a by-product generated during irradiation of the laser beam by a chemical solution containing an acid under a predetermined cleaning temperature.
11. The method for manufacturing a light-emitting device according to claim 10 , wherein the chemical solution comprises an aqueous solution of phosphoric acid, sulfuric acid or their mixture and/or the predetermined cleaning temperature is not lower than 200° C.
12. The method for manufacturing a light-emitting device according to claim 1 , further comprising a step of forming multiple singulation trenches through the substrate to form multiple individual dies, wherein each individual die comprises a predetermined number of light-emitting diode units.
13. The method for manufacturing a light-emitting device according to claim 12 , wherein one of the singulation trenches has a width equal to or larger than that of one of the isolation trenches.
14. The method for manufacturing a light-emitting device according to claim 12 , wherein the singulation trenches are formed by a laser beam irradiating from either side of the substrate.
15. The method for manufacturing a light-emitting device according to claim 12 , wherein the singulation trenches are formed before the multiple isolation trenches is formed.
16. The method for manufacturing a light-emitting device according to claim 12 , wherein forming the singulation trenches comprises a step of forming first sub-trenches through the semiconductor epitaxial stack to a depth of the substrate and a step of forming second sub-trenches through the substrate from either side of the substrate.
17. The method for manufacturing a light-emitting device according to claim 12 , further comprising a step of exposing part of the first conductive-type semiconductor layer or the substrate in the singulation trenches.
18. The method for manufacturing a light-emitting device according to claim 17 , wherein the first conductive-type semiconductor layer or the substrate is exposed by a dry etching process.
19. A method for manufacturing a light-emitting device, comprising the steps of:
providing a substrate;
forming a semiconductor epitaxial stack on the substrate, comprising:
forming a first conductive-type semiconductor layer on the substrate;
forming an active layer on the first conductive-type semiconductor layer; and
forming a second conductive-type semiconductor layer on the active layer;
forming multiple mesas in the semiconductor epitaxial stack and exposing partial of the first conductive-type semiconductor layer;
forming a protective layer on the semiconductor epitaxial stack; and
forming multiple isolation trenches in the semiconductor epitaxial stack by using a laser beam irradiating the semiconductor epitaxial stack between each of two adjacent mesas to define multiple light-emitting diode units,
wherein part of the substrate is exposed by the isolation trenches.