Solar cell and method of manufacturing the same
View Patent ↗Provided is a solar cell with improved photoelectric conversion efficiency. The solar cell includes a photoelectric conversion body and first and second electrodes. The photoelectric conversion body includes a substrate made of semiconductor material. The first and second electrodes are disposed at intervals on one main surface of the photoelectric conversion body. Terraces each formed of a crystal plane are provided on a main surface of the substrate on the one main surface side of the photoelectric conversion body. At least one of the terraces exists between the first electrode and the second electrode.
1. A solar cell comprising:
a photoelectric conversion body including a substrate made of semiconductor material; and
first and second electrodes disposed at an interval on one main surface of the photoelectric conversion body, wherein
a main surface of the substrate on the one main surface side of the photoelectric conversion body is provided with terraces each formed of a crystal plane, and
at least one of the terraces exists between the first electrode and the second electrode.
2. The solar cell according to claim 1 , wherein
the terraces are formed by isotropically etching and then anisotropically etching the main surface of the substrate.
3. The solar cell according to claim 1 , wherein
the first electrode includes first finger portions,
the second electrode includes second finger portions adjacent to the first finger portions, and
at least one of the terraces exists between the first finger portion and the second finger portion.
4. The solar cell according to claim 3 , wherein a gap between the first finger portion and the second finger portion is smaller than each of widths of the first finger portion and the second finger portion.
5. The solar cell according to claim 3 , wherein
uneven portions are provided on the main surface of the substrate by providing steps surrounding the terraces, the uneven portions including at least either of recessed portions and protruding portions which are formed of the terraces and the steps, and
at least one of the uneven portions exists between the first finger portion and the second finger portion.
6. A method of manufacturing a solar cell including: a photoelectric conversion body including a substrate made of semiconductor material; and first and second electrodes disposed at an interval on one main surface of the photoelectric conversion body, the method comprising:
forming terraces each formed of a crystal plane, on a main surface of the substrate on the one main surface side of the photoelectric conversion body by isotropically etching and then anisotropically etching the main surface of the substrate; and
forming the first and second electrodes on the one main surface of the photoelectric conversion body at such an interval that at least one of the terraces exists between the first and second electrodes.
7. The method of manufacturing the solar cell according to claim 6 , wherein an etching amount in the isotropic etching is larger than an etching amount in the anisotropic etching.
8. The method of manufacturing the solar cell according to claim 6 , wherein
the substrate is produced by slicing an ingot made of semiconductor material with a wire saw.
9. The method of manufacturing the solar cell according to claim 6 , wherein
the anisotropic etching is performed by using an alkaline etchant.
10. The method of manufacturing the solar cell according to claim 9 , further comprising
forming a semiconductor layer on the main surface of the substrate by a CVD method to thereby produce the photoelectric conversion body including the substrate and the semiconductor layer.