Alignment structure for registering patterns on a substrate
View Patent ↗A system for determining an alignment location associated with a pattern formed on a substrate is disclosed. Electrical measurements are made as the substrate is moved along an advancement direction. An alignment structure is formed on the substrate. The alignment structure has a first member extending along a first direction that is not parallel to the advancement direction and a second member extending along a second direction that is not parallel to either the advancement direction or to the first member. The first member and the second member are electrically conductive and substantially transparent. One or more probes are used to identify portions of the first and second members of the alignment structure and produce signals in response to relative motion between the substrate and the probes. A controller, responsive to signals produced by the probe, determines an alignment location associated with the pattern formed on the substrate.
1. A system for determining an alignment location associated with a pattern formed on a substrate by making electrical measurements as the substrate is moved along an advancement direction, comprising:
an alignment structure formed on the substrate, the alignment structure having a first member extending along a first direction that is not parallel to the advancement direction and a second member extending along a second direction that is not parallel to either the advancement direction or to the first member, wherein the first member and the second member are electrically conductive and substantially transparent;
one or more probes responsive to relative motion between the substrate and the one or more probes to identify particular portions of the first and second members of the alignment structure and to produce signals identifying such portions; and
a controller responsive to signals produced by the one or more probes to determine an alignment location associated with the pattern formed on the substrate.
2. The system of claim 1 , wherein the alignment structure further includes a reference member extending along a direction parallel to the advancement direction and intersecting both the first and second members.
3. The system of claim 1 , wherein each of the first member and second members of the alignment structure has a light transmittance between 80% and 100%.
4. The system of claim 1 , wherein each of the first and second members of the alignment structure has a resistivity between 10 −8 ohm-meter and 1 ohm-meter.
5. The system of claim 1 , wherein each of the first and second members of the alignment structure has an electrical resistance that is less than one percent of an electrical resistance of the substrate as measured by two contacts that are positioned a predetermined distance apart.
6. The system of claim 1 , wherein each of the first and second members of the alignment structure include an inorganic oxide film.
7. The system of claim 1 , wherein each of the first and second members of the alignment structure include an organic film.
8. The system of claim 1 , wherein each of the first and second members of the alignment structure include poly(3,4-ethylenedioxythiophene).
9. The system of claim 1 , wherein each of the first and second members of the alignment structure include graphene.
10. The system of claim 1 , wherein each of the first and second members of the alignment structure include carbon nanotubes.
11. The system of claim 2 , wherein the first member of the alignment structure is perpendicular to the reference member.
12. The system of claim 2 , wherein the reference member of the alignment structure is substantially transparent.
13. The system of claim 2 , wherein a length of the reference member of the alignment structure along the advancement direction is greater than a length of the first member of the alignment structure along the first direction.
14. The system of claim 2 , wherein a width of the reference member of the alignment structure along a direction perpendicular to the advancement direction is less than a length of the first member of the alignment structure along the direction perpendicular to the advancement direction.
15. The system of claim 1 , wherein the alignment structure further includes a third member that is parallel to the first member.
16. A system for determining an alignment location associated with a pattern formed on a substrate by making electrical measurements as the substrate is moved along an advancement direction X, comprising:
an alignment structure formed on the substrate within an XY plane, the alignment structure having a first member extending along a first direction that is not parallel to alignment direction X and a second member extending along a second direction that is not parallel to either alignment direction X or to the first member, wherein a spacing S between the first member and the second member varies along the Y direction, and wherein the first member and the second member are electrically conductive and substantially transparent;
one or more probes responsive to relative motion between the substrate and the one or more probes to identify particular portions of the first and second members of the alignment structure and to produce signals identifying such portions; and
a controller responsive to signals produced by the one or more probes to determine an alignment location associated with the pattern formed on the substrate.
17. The system of claim 16 , wherein the spacing S varies linearly as a rate of change of spacing times a distance along the Y direction.