Method of manufacturing a magnetic read head
View Patent ↗A tunnel magnetoresistance (TMR) read sensor having a tabbed AFM layer and an extended pinned layer and methods for making the same are provided. The TMR read sensor has an AFM layer recessed from the air bearing surface, providing a reduced shield-to-shield distance.
1. A method of manufacturing a magnetic read head, comprising:
forming a first shield layer;
depositing a seed layer on the first shield layer;
forming a tabbed antiferromagnetic (AFM) stack layer over the seed layer such that the tabbed AFM stack layer results in being recessed along both sides of a read track of the magnetic read head;
forming first and second pinned layers over the AFM stack layer;
forming a free layer over the first pinned layer; and
forming a second shield layer over the first pinned layer.
2. The method of claim 1 , wherein a gap between the first pinned layer and the second pinned layer comprises Ruthenium (Ru).
3. The method of claim 2 , wherein the AFM stack layer comprises:
an AFM layer; and
a soft magnetic stitching layer.
4. The method of claim 3 , wherein the AFM stack layer comprises one of Iridium Manganese (IrMn), Platinum Manganese (PtMn), or an antiferromagnetic material.
5. The method of claim 3 , wherein the soft magnetic stitching layer comprises one of Copper Iron (CoFe), CoFe/Nickel Iron (NiFe), a soft magnetic material, or a combination of soft magnetic materials.
6. The method of claim 2 , wherein spacing between the first shield layer and the second shield layer is between 10 and 18 nm.
7. The method of claim 6 , wherein the spacing between the first shield layer and the second shield layer is between 10 and 15 nm.
8. The method of claim 1 , wherein the read head is a tunneling magnetoresistance (TMR) read head.
9. The method of claim 1 , wherein the seed layer comprises one of Tantalum (Ta), Ta/Ru, a non-magnetic single layer material, or a non-magnetic multi-layer material configured to promote tabbed AFM stack layer material growth.
10. The method of claim 1 , wherein forming the tabbed AFM stack layer comprises:
defining a photoresist mask over the seed layer;
ion milling the seed layer and first shield layer not covered by the photoresist mask to form a recess for the AFM stack layer; and
depositing the AFM stack layer.
11. A method of manufacturing a magnetic read head, comprising:
forming a first shield layer;
depositing a seed layer on the first shield layer;
forming a tabbed antiferromagnetic (AFM) stack layer over the seed layer such that the tabbed AFM stack layer results in being recessed along both sides of a read track of the magnetic read head;
wherein forming the tabbed AFM stack layer comprises:
defining a photoresist mask over the seed layer;
ion milling the seed layer and first shield layer not covered by the photoresist mask to form a recess for the AFM stack layer; and
depositing the AFM stack layer; and
depositing a TMR stack on top of a remaining portion of the seed layer along a center read track and over both sides of the tabbed AFM stack layer.
12. The method of claim 11 , further comprising annealing the TMR stack and the tabbed AFM stack layer, wherein the annealing sets the magnetic pinning direction of the TMR stack.