Memristor structure with a dopant source
View Patent ↗A memristor including a dopant source is disclosed. The structure includes an electrode, a conductive alloy including a conducting material, a dopant source material, and a dopant, and a switching layer positioned between the electrode and the conductive alloy, wherein the switching layer includes an electronically semiconducting or nominally insulating and weak ionic switching material. A method for fabricating the memristor including a dopant source is also disclosed.
1. A memristor including:
an electrode;
a conductive alloy including a conducting material, a dopant source material, and a dopant; and
a switching layer positioned between the electrode and the conductive alloy, wherein the switching layer includes an electronically semiconducting or nominally insulating and weak ionic switching material, wherein:
the dopant source material is soluble in the conducting material;
the dopant is soluble in the dopant source material; and
and the free energy of formation of a compound including the dopant and the material comprising the dopant source material is more negative than the free energy of formation of a compound including the dopant and the material comprising the conducting material and less negative that the free energy of formation of a compound including the dopant and the material comprising the electrode.
2. The memristor of claim 1 , wherein the switching layer is a single layer structure, a bi-layer structure or a multi-layer structure.
3. The memristor of claim 1 , wherein the switching layer or a part thereof is to form a switching channel.
4. The memristor of claim 1 , wherein the electrode and the conducting material include a material selected from the group consisting of aluminum, copper, gold, molybdenum, niobium, palladium, platinum, ruthenium, ruthenium oxide, silver, tantalum, tantalum nitride, titanium nitride, tungsten, and tungsten nitride.
5. The memristor of claim 1 , wherein:
the switching layer includes an oxide and the dopant is oxygen;
the switching layer includes a nitride and the dopant is nitrogen; or
the switching layer includes a sulfide and the dopant is sulfur.
6. The memristor of claim 1 , wherein:
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes platinum, and the dopant source material includes cobalt;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes silver, and the dopant source material includes palladium;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes gold, and the dopant source material includes copper;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes palladium, and the dopant source material includes cobalt;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes palladium, and the dopant source material includes copper;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes platinum and the dopant source material includes copper;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes copper, and the dopant source material includes nickel; or the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes molybdenum, and the dopant source material includes chromium.
7. A method for fabricating the memristor of claim 1 , the method including:
providing either the conductive alloy or the electrode as a first layer;
providing the switching layer on the first layer;
providing either the conductive alloy or the electrode on the switching layer;
dispersing the dopant into the dopant source material; and
dispersing the dopant source material into the conducting material.
8. The method of claim 7 , wherein the electrode and the conducting material include a material selected from the group consisting of aluminum, copper, gold, molybdenum, niobium, palladium, platinum, ruthenium, ruthenium oxide, silver, tantalum, tantalum nitride, titanium nitride, tungsten, and tungsten nitride.
9. The method of claim 7 , wherein:
the switching layer includes an oxide and the dopant is oxygen;
the switching layer includes a nitride and the dopant is nitrogen; or
the switching layer includes a sulfide and the dopant is sulfur.
10. The method of claim 7 , wherein the dopant source material is soluble in the conducting material, the dopant is soluble in the dopant source material, and the free energy of formation of a compound including the dopant and the material comprising the dopant source material is more negative than the free energy of formation of a compound including the dopant and the material comprising the conducting material and less negative that the free energy of formation of a compound including the dopant and the material comprising the electrode.
11. The method of claim 7 , further including forming a switching channel.
12. The method of claim 7 further including forming the dopant source material by chemical vapor deposition, atomic layer deposition, reactive-sputtering or thermal diffusion.
13. The method of claim 12 further including forming the dopant source material in an environment including the dopant.
14. A memristor, including:
an electrode;
a conductive alloy including a conducting material, a dopant source material dispersed in the conducting material, and a dopant dispersed in the dopant source material; and
a switching layer positioned between the electrode and the conductive alloy, wherein the switching layer includes an electronically semiconducting or nominally insulating and weak ionic switching material.
15. The memristor of claim 14 , wherein the switching layer is a single layer structure, a bi-layer structure or a multi-layer structure.
16. The memristor of claim 14 , wherein the switching layer or a part thereof is to form a switching channel.
17. The memristor of claim 14 , wherein the electrode and the conducting material include a material selected from the group consisting of aluminum, copper, gold, molybdenum, niobium, palladium, platinum, ruthenium, ruthenium oxide, silver, tantalum, tantalum nitride, titanium nitride, tungsten, and tungsten nitride.
18. The memristor of claim 14 , wherein:
the switching layer includes an oxide and the dopant is oxygen;
the switching layer includes a nitride and the dopant is nitrogen; or
the switching layer includes a sulfide and the dopant is sulfur.
19. The memristor of claim 14 , wherein the dopant source material is soluble in the conducting material, the dopant is soluble in the dopant source material, and the free energy of formation of a compound including the dopant and the material comprising the dopant source material is more negative than the free energy of formation of a compound including the dopant and the material comprising the conducting material and less negative that the free energy of formation of a compound including the dopant and the material comprising the electrode.
20. The memristor of claim 19 , wherein:
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes platinum, and the dopant source material includes cobalt;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes silver, and the dopant source material includes palladium;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes gold, and the dopant source material includes copper;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes palladium, and the dopant source material includes cobalt;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes palladium, and the dopant source material includes copper;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes platinum and the dopant source material includes copper;
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes copper, and the dopant source material includes nickel; or
the electrode includes tantalum, the switching material includes tantalum oxide, the conducting material includes molybdenum, and the dopant source material includes chromium.