Method for manufacturing light-shielding mask for curing cell sealant
View Patent ↗The present invention provides a method for manufacturing a light-shielding mask for curing a sealant, including the following steps: step 1 : providing a transparent substrate ( 20 ); step 2 : sequentially forming a metal layer ( 22 ) and a photoresist layer ( 24 ) on the transparent substrate ( 20 ); Step 3 : carrying out exposure on an edge of the photoresist layer ( 24 ) to form an inspection mark ( 242 ); step 4 : subjecting the photoresist layer ( 24 ) to exposure along a predetermined trace by adopting an edge exposure process, wherein the predetermined trace corresponds to a predetermined trace of a sealant to be formed in a liquid crystal display panel; step 5 : removing the exposed portion of the photoresist layer ( 24 ) to expose the metal layer ( 22 ); step 6 : subjecting the exposed portion of the metal layer ( 22 ) to etching and removing the unexposed portion of the photoresist layer ( 24 ); and step 7 : forming a transparent protection layer ( 26 ) on the metal layer ( 22 ) and the transparent substrate ( 20 ). The present invention uses an edge exposure process to achieve exposure of the photoresist layer so that no specific masking plate is needed and the number of masking plates prepared can be effectively reduced, thereby reducing the cost the material for manufacture.
1. A method for manufacturing a light-shielding mask for curing a sealant, comprising the following steps:
( 1 ) providing a transparent substrate;
( 2 ) sequentially forming a metal layer and a photoresist layer on the transparent substrate;
( 3 ) carrying out exposure on an edge of the photoresist layer to form an inspection mark;
( 4 ) subjecting the photoresist layer to exposure along a predetermined trace by adopting an edge exposure process, wherein the predetermined trace corresponds to a predetermined trace of a sealant to be formed in a liquid crystal display panel;
( 5 ) removing the exposed portion of the photoresist layer to expose the metal layer;
( 6 ) subjecting the exposed portion of the metal layer to etching and removing the unexposed portion of the photoresist layer; and
( 7 ) forming a transparent protection layer on the metal layer and the transparent substrate;
wherein step ( 3 ) comprises: providing a UV light source, a masking plate, and a shielding plate wherein the masking plate comprises a pattern zone and a marking zone located outside the pattern zone and the shielding plate is arranged under the pattern zone so that UV light emitting from the UV light source transmits through the pattern zone and irradiates the shielding plate and the UV light emitting from the UV light source transmits through the marking zone to irradiate the photoresist layer on the transparent substrate so as to subject the photoresist layer to exposure.
2. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 1 , wherein the transparent substrate is a glass substrate.
3. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 1 , wherein the metal layer is formed on the transparent substrate through physical vapor deposition.
4. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 1 , wherein the photoresist layer is formed on the metal layer through coating.
5. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 1 , wherein step ( 4 ) comprises: providing edge exposure facility and carrying out exposure of the photoresist layer along the predetermined trace.
6. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 5 , wherein the edge exposure facility comprises an edge exposure device.
7. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 1 , wherein the etching used comprises one of dry etching and wet etching or a combination thereof.
8. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 1 , wherein the transparent protection layer is made of a non-metallic material.
9. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 1 , wherein the transparent protection layer is formed through chemical vapor deposition.
10. A method for manufacturing a light-shielding mask for curing a sealant, comprising the following steps:
( 1 ) providing a transparent substrate;
( 2 ) sequentially forming a metal layer and a photoresist layer on the transparent substrate;
( 3 ) carrying out exposure on an edge of the photoresist layer to form an inspection mark;
( 4 ) subjecting the photoresist layer to exposure along a predetermined trace by adopting an edge exposure process, wherein the predetermined trace corresponds to a predetermined trace of a sealant to be formed in a liquid crystal display panel;
( 5 ) removing the exposed portion of the photoresist layer to expose the metal layer;
( 6 ) subjecting the exposed portion of the metal layer to etching and removing the unexposed portion of the photoresist layer; and
( 7 ) forming a transparent protection layer on the metal layer and the transparent substrate;
wherein the transparent substrate is a glass substrate;
wherein the metal layer is formed on the transparent substrate through physical vapor deposition;
wherein the photoresist layer is formed on the metal layer through coating;
wherein step ( 3 ) comprises: providing a UV light source, a masking plate, and a shielding plate, wherein the masking plate comprises a pattern zone and a marking zone located outside the pattern zone and the shielding plate is arranged under the pattern zone so that UV light emitting from the UV light source transmits through the pattern zone and irradiates the shielding plate and the UV light emitting from the UV light source transmits through the marking zone to irradiate the photoresist layer on the transparent substrate so as to subject the photoresist layer to exposure; and
wherein step ( 4 ) comprises: providing edge exposure facility and carrying out exposure of the photoresist layer along the predetermined trace.
11. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 10 , wherein the edge exposure facility comprises an edge exposure device.
12. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 10 , wherein the etching used comprises one of dry etching and wet etching or a combination thereof.
13. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 10 , wherein the transparent protection layer is made of a non-metallic material.
14. The method for manufacturing a light-shielding mask for curing a sealant as claimed in claim 10 , wherein the transparent protection layer is formed through chemical vapor deposition.