Component and Method for Producing a Component
A component includes a substrate, a chip, and a frame. The frame, the substrate, and the chip enclose a volume. A metal sealing layer is provided which is designed to hermetically seal the volume. The metal sealing layer has a hardened liquid metal or a hardened liquid metal alloy.
1 - 15 . (canceled)
16 . A component comprising:
a substrate;
a chip;
a frame, the frame, the substrate and the chip enclosing a volume; and
a metal sealing layer which hermetically seals the volume, the metal sealing layer comprising a solidified liquid metal or a solidified liquid metal alloy.
17 . The component according to claim 16 ,
wherein the frame is connected to the substrate and the chip bears on the frame; and
wherein the metal sealing layer extends along a gap between the chip and the frame and connects the chip and the frame.
18 . The component according to claim 16 ,
wherein the frame is connected to the chip and the frame bears on the substrate; and
wherein the metal sealing layer extends along a gap between the substrate and the frame and connects the substrate and the frame.
19 . The component according to claim 16 , wherein the substrate, the chip, the frame and the metal sealing layer are at least partially enclosed by an electrolytically deposited layer.
20 . The component according to claim 16 , wherein the metal sealing layer constitutes a jet printing structure.
21 . The component according to claim 16 , wherein the metal sealing layer comprises a solder structure.
22 . The component according to claim 16 , wherein the chip is interconnected with the substrate on a surface inclined toward the enclosed volume by at least one bump connection.
23 . The component according to claim 16 , wherein the at least one bump connection comprises a stud bump or solder bump.
24 . The component according to claim 16 , wherein the frame comprises a metal or a multilayer structure of metals.
25 . The component according to claim 16 , wherein the liquid metal or the liquid metal alloy for forming the metal sealing layer by solidification comprises metals with melting points of less than 300° C. under standard conditions.
26 . The component according to claim 16 , wherein the liquid metal or the liquid metal alloy for forming the metal sealing layer comprises metals of a nonzero wettability with the surface of the chip and/or of the substrate.
27 . A method for producing a component having a substrate, a chip and a frame, the method comprising:
enclosing a volume between the frame, the substrate and the chip; and
hermetically sealing the volume with a metal sealing layer by applying a liquid metal or a liquid metal alloy onto the component and solidifying the liquid metal or the liquid metal alloy.
28 . The method according to claim 27 ,
wherein the frame is connected to the substrate and the chip bears on the frame; and
wherein the metal sealing layer is applied along a gap between the chip and the frame and connects the chip and the frame by solidification of the liquid metal or the liquid metal alloy.
29 . The method according to claim 27 , wherein
the frame is connected to the chip and the frame bears on the substrate; and
the metal sealing layer is applied along a gap between the substrate and the frame and connects the substrate and the frame by solidification of the liquid metal or the liquid metal alloy.
30 . The method according to claim 27 , wherein the liquid metal or the liquid metal alloy is applied by dosing with a jet printing technique.
31 . The method according to claim 27 , wherein the liquid metal or the liquid metal alloy is applied by applying a solder depot and heating the solder depot.
32 . The method according to claim 27 , wherein the liquid metal or the liquid metal alloy is applied by at least partially immersing the component in a liquid solder.
33 . The method according to claim 27 , wherein the liquid metal or liquid metal alloy has a melting point of less than 300° C.
34 . The method according to claim 27 , further comprising electrolytically deposits a layer over the metal sealing layer.
35 . The method according to claim 27 , wherein the liquid metal or liquid metal alloy comprises a solder.