Light emitting diode chip
View Patent ↗A light emitting diode chip includes a semiconductor layer sequence having an active layer that generates electromagnetic radiation, wherein the light emitting diode chip has a radiation exit area at a front side, the light emitting diode chip has a mirror layer at least in regions at a rear side situated opposite the radiation exit area, said mirror layer containing silver, a protective layer is arranged on the mirror layer, and the protective layer comprises a transparent conductive oxide.
1. A light emitting diode chip comprising a semiconductor layer sequence having an active layer that generates electromagnetic radiation, wherein
the light emitting diode chip has a radiation exit area at a front side,
the light emitting diode chip has a mirror layer at least in regions at a rear side situated opposite the radiation exit area relative to the active layer, said mirror layer containing silver,
a protective layer is arranged on the mirror layer,
the protective layer comprises a transparent conductive oxide,
a first electrical connection layer is arranged at an opposite side of the protective layer relative to the mirror layer,
the first electrical connection layer is formed from a plurality of partial layers, and
the plurality of partial layers comprise, proceeding from the minor layer, a platinum layer, a gold layer and a titanium layer.
2. The light emitting diode chip according to claim 1 , wherein the mirror layer adjoins the semiconductor layer sequence at an interface of the mirror layer situated opposite to the protective layer relative to the mirror layer.
3. The light emitting diode chip according to claim 1 , wherein the protective layer comprises ZnO, ZnO:Ga, ZnO:Al, ITO, IZO or IGZO.
4. The light emitting diode chip according to claim 1 , wherein the protective layer has a thickness of 5 nm to 500 nm.
5. The light emitting diode chip according to claim 4 , wherein the protective layer has a thickness of 10 nm to 100 nm.
6. The light emitting diode chip according to claim 1 , wherein side flanks of the mirror layer and/or of the protective layer are covered by an electrically insulating layer at least in regions.
7. The light emitting diode chip according to claim 6 , wherein the electrically insulating layer is an oxide or nitride layer.
8. The light emitting diode chip according to claim 1 , wherein the light emitting diode chip connects to a carrier, and the carrier is opposite of the semiconductor layer sequence relative to the mirror.
9. The light emitting diode chip according to claim 1 , wherein the light emitting diode chip comprises no growth substrate.
10. The light emitting diode chip according to claim 1 , wherein
the light emitting diode chip comprises a first electrical connection layer and a second electrical connection layer,
the first electrical connection layer and the second electrical connection layer face the rear side of the semiconductor layer sequence and are electrically insulated from one another by an electrically insulating layer, and
a partial region of the second electrical connection layer extends from the rear side of the semiconductor layer sequence through at least one perforation of the active layer in a direction toward the front side.
11. The light emitting diode chip according to claim 1 , wherein a region of the semiconductor layer sequence adjoins the mirror layer, and is a p-type semiconductor region.