IP Library Granted Patent US 9,677,193
Granted Patent B2
US 9,677,193 · App. 14/242,566 · Granted Jun 13, 2017

Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheet

Inventors: Peter L. Kellerman (Essex, MA); Gregory D. Thronson (Groveland, MA); Dawei Sun (Nashua, NH)
Assignee: Varian Semiconductor Equipment Associates, Inc.
C30B35/00C30B9/00C30B11/00C30B15/06C30B15/22C30B28/10C30B29/06C30B29/52C30B29/64C30B15/00C30B15/002C30B15/24C30B15/34Y10T117/1048Y10T117/1092
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Quick Facts
Patent No.
US 9,677,193
App. No.
14/242,566
Granted
Jun 13, 2017
Kind
B2
Abstract

In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.

Claims (9)

1. A sheet production apparatus comprising:

a vessel configured to hold a melt of a material;

a cooling plate disposed proximate said melt, said cooling plate configured to form a sheet of said material that is horizontal on said melt proximate said cooling plate;

a first gas jet configured to direct a gas toward a meniscus at a juncture of a bottom surface of the sheet and an edge of said vessel; and

a pressure cell that is separate from and downstream of the cooling plate in a direction in which the melt flows, the pressure cell defined by a top section including a ceiling and adjoining sidewalls disposed above the sheet over the first gas jet and defining a gap of less than 0.5 millimeters between a lower extent of the sidewalls and the sheet, the pressure cell further defined by a bottom section including a floor disposed below the sheet and integral with the first gas jet, wherein the pressure cell encloses a gas at a higher pressure than a surrounding atmosphere and wherein the gas is allowed to escape the pressure cell through the gap.

2. The apparatus of claim 1 , further comprising a pump associated with the vessel and oriented to circulate said melt within said vessel.

3. The apparatus of claim 1 , further comprising a second gas jet configured to direct said gas toward said edge of said vessel, said second gas jet positioned opposite said first gas jet and integral with the top section.

4. The apparatus of claim 1 , further comprising a support table disposed adjacent said first gas jet, said support table configured to support said sheet.

5. The apparatus of claim 1 , wherein said material is silicon or silicon and germanium.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 20, 2025
From: BLUE ORIGIN, LLC
To: BLUE ORIGIN MANUFACTURING, LLC
Reel/Frame 070585/0314 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 16, 2024
From: KELLERMAN, PETER L.; THRONSON, GREGORY D.; SUN, DAWEI
To: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
Reel/Frame 068600/0135 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 16, 2024
From: LEADING EDGE EQUIPMENT TECHNOLOGIES, INC.
To: BLUE ORIGIN, LLC
Reel/Frame 068601/0041 →
CHANGE OF NAME Recorded Dec 1, 2021
From: LEADING EDGE CRYSTAL TECHNOLOGIES, INC.
To: LEADING EDGE EQUIPMENT TECHNOLOGIES, INC.
Reel/Frame 058292/0241 →
ACQUISITION Recorded Jan 15, 2020
From: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 051973/0106 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2019
From: APPLIED MATERIALS, INC.
To: LEADING EDGE CRYSTAL TECHNOLOGIES, INC.
Reel/Frame 051247/0716 →
Continuity (3)
Division 13037789 · Mar 1, 2011
Provisional Application 61332073 · May 6, 2010
Related Publication 20140209016A1 · Jul 31, 2014