Method of manufacturing an organic light-emitting element, organic light-emitting element, display panel, and display device
View Patent ↗A method of manufacturing an organic light-emitting element is provided. A first layer is formed above a substrate, and exhibits hole injection properties. A bank material layer is formed above the first layer using a bank material. Banks are formed by patterning the bank material layer, and forming a resin film on a surface of the first layer by attaching a portion of the bank material layer to the first layer. The banks define apertures corresponding to light-emitters. The resin material is the same as the bank material. A functional layer is formed by applying ink to the apertures that contacts the resin film. The ink contains an organic material. The functional layer includes an organic light-emitting layer. A second layer is formed above the functional layer and exhibits electron injection properties. The hole injection properties of the first layer are degraded by applying electrical power to an element structure.
1. A method of manufacturing an organic light-emitting element, comprising:
forming a first layer above a substrate, the first layer having hole injection properties;
forming a bank material layer above the first layer using a bank material;
forming banks by patterning the bank material layer, and forming a resin film on a surface of the first layer by attaching a portion of the bank material layer to the first layer, the banks defining apertures corresponding to light-emitters;
forming a functional layer by applying ink to the apertures, the ink contacting the resin film, the ink containing an organic material, the functional layer including an organic light-emitting layer;
forming a second layer above the functional layer, the second layer having electron injection properties; and
performing aging during a manufacturing process by degrading the hole injection properties of the first layer by applying electrical power to an element structure formed by forming the first layer, forming the bank material layer, forming the banks, forming the functional layer, and forming the second layer,
wherein the resin film is formed in the apertures corresponding to light-emitters and between the first layer and the second layer.
2. The method of claim 1 , wherein
in forming the banks, the resin film is formed to have a thickness not exceeding approximately 4 nm.
3. The method of claim 1 , wherein
in degrading, power application to the element structure is performed so as to reduce a mobility of holes in the element structure to be not higher than 1/10 of the mobility before the power application.
4. The method of claim 1 , wherein
in degrading, power application to the element structure is performed for a period not exceeding approximately 30 minutes.
5. The method of claim 1 , wherein
forming the first layer includes:
forming an anode above the substrate; and
forming a hole injection layer above the anode using a tungsten oxide, and the first layer is formed to include the anode and the hole injection layer.
6. The method of claim 1 , wherein
in forming the banks by patterning, a portion of the first layer is dissolved in a developer used for patterning the bank material layer, so that a dent is formed in an area on a surface of the first layer facing the functional layer,
the resin film being formed in the dent of the first layer.
7. The method of claim 5 , wherein
in forming the hole injection layer, a gas including argon gas and oxygen gas is used as a gas enclosed in a chamber of a sputtering device, and the hole injection layer using the tungsten oxide is formed under conditions where a total pressure of the gas in the chamber is from approximately 2.7 Pa to approximately 7.0 Pa, a partial pressure ratio of the oxygen gas is from approximately 50% to approximately 70% with respect to the total pressure of the gas in the chamber, and an input power density per unit surface area of a sputtering target is from approximately 1 W/cm 2 to approximately 2.8 W/cm 2 .
8. The method of claim 1 , wherein
the bank material includes a photosensitive resin component and a fluorine component, and
in forming the banks by patterning, the banks defining the apertures are formed by patterning the bank material layer by exposing a portion of the bank material layer and developing the portion using a developer.
9. The method of claim 1 , wherein
forming the second layer includes:
forming an electron transport layer above the functional layer;
forming a cathode above the electron transport layer; and
forming a sealing layer above the cathode, and
the second layer is formed to include the electron transport layer, the cathode, and the sealing layer.
10. The method of claim 1 , wherein
the resin film and the banks entirely coat an upper surface of the first layer, and
the functional layer is formed to be in contact with the resin film.
11. An organic light-emitting device having an organic light-emitting element manufactured by a method according to claim 1 .
12. An organic display panel having an organic light-emitting element manufactured by a method according to claim 1 .
13. An organic display device having an organic light-emitting element manufactured by a method according to claim 1 .
14. The method of claim 1 , wherein
the functional layer includes a hole transport layer below the organic light-emitting layer, and
the resin film is formed between the first layer and the hole transport layer.
15. The method of claim 1 , wherein
an upper surface of the first layer includes a plurality of dents, the resin film being formed in the dents and having a thickness of at most 4 nm.
16. A method of manufacturing an organic light-emitting element, comprising:
forming a first layer above a substrate, the first layer having hole injection properties;
forming a bank material layer above the first layer using a bank material;
forming banks by patterning the bank material layer, and forming a resin film on a surface of the first layer by attaching a portion of the bank material layer to the first layer, the banks defining apertures corresponding to light-emitters;
forming a functional layer by applying ink to the apertures, the ink contacting the resin film, the ink containing an organic material, the functional layer including an organic light-emitting layer;
forming a second layer above the functional layer, the second layer having electron injection properties; and
degrading the hole injection properties of the first layer by applying electrical power to an element structure formed by forming the first layer, forming the bank material layer, forming the banks, forming the functional layer, and forming the second layer,
wherein, in the degrading, power application to the element structure is performed so as to reduce a mobility of holes in the element structure to be not higher than 1/10 of the mobility before the power application.
17. The method of claim 16 , wherein
the functional layer includes a hole transport layer below the organic light-emitting layer, and
the resin film is formed between the first layer and the hole transport layer.
18. The method of claim 16 , wherein
an upper surface of the first layer includes a plurality of dents, the resin film being formed in the dents and having a thickness of at most 4 nm.
19. A method of manufacturing an organic light-emitting element, comprising:
forming a first layer above a substrate, the first layer having hole injection properties;
forming a bank material layer above the first layer using a bank material;
forming banks by patterning the bank material layer, and forming a resin film on a surface of the first layer by attaching a portion of the bank material layer to the first layer, the banks defining apertures corresponding to light-emitters;
forming a functional layer by applying ink to the apertures, the ink contacting the resin film, the ink containing an organic material, the functional layer including an organic light-emitting layer;
forming a second layer above the functional layer, the second layer having electron injection properties; and
degrading the hole injection properties of the first layer by applying electrical power to an element structure formed by forming the first layer, forming the bank material layer, forming the banks, forming the functional layer, and forming the second layer,
wherein forming the first layer includes:
forming an anode above the substrate; and
forming a hole injection layer above the anode using a tungsten oxide,
the first layer is formed to include the anode and the hole injection layer, and
in forming the hole injection layer, a gas including argon gas and oxygen gas is used as a gas enclosed in a chamber of a sputtering device, and the hole injection layer using the tungsten oxide is formed under conditions where a total pressure of the gas in the chamber is from approximately 2.7 Pa to approximately 7.0 Pa, a partial pressure ratio of the oxygen gas is from approximately 50% to approximately 70% with respect to the total pressure of the gas in the chamber, and an input power density per unit surface area of a sputtering target is from approximately 1 W/cm 2 to approximately 2.8 W/cm 2 .
20. The method of claim 19 , wherein
the functional layer includes a hole transport layer below the organic light-emitting layer, and
the resin film is formed between the first layer and the hole transport layer.