Integrated circuit on SOI comprising a transistor protecting from electrostatic discharges
View Patent ↗An integrated circuit includes first and second electronic components, a buried UTBOX insulating layer, first and second ground planes plumb with the first and second electronic components, first and second wells, first and second biasing electrodes making contact with the first and second wells and with the first and second ground planes, a third electrode making contact with the first well, a first trench isolation separating the first and third electrodes and extending through the buried insulating layer as far as into the first well, and a second trench isolation that isolates the first electrode from the first component, and that does not extend as far as the interface between the first ground plane and the first well.
1. A manufacture comprising an integrated circuit arranged on and in a p-doped substrate, said integrated circuit comprising a bipolar transistor for protecting from electrostatic discharges, an n-doped first semiconductor element, a p-doped well, a deep buried n-doped well, an n-doped first implanted zone, a p-doped second implanted zone, a p-doped third implanted zone, a fourth implanted zone, a first trench isolation, a second trench isolation, and a third trench isolation, wherein said n-doped first semiconductor element comprises a bottom, wherein said n-doped first implanted zone is arranged on said first semiconductor element, wherein said n-doped first implanted zone forms, with said n-doped first semiconductor element, a base of said bipolar transistor, wherein said p-doped second implanted zone forms an emitter of said bipolar transistor, wherein said p-doped second implanted zone is arranged on said n-doped first semiconductor element, wherein said p-doped well is arranged in said deep buried n-doped well, wherein said p-doped well is arranged under said n-doped first implanted zone and said p-doped second implanted zone, wherein said p-doped well makes contact with said bottom of said n-doped first semiconductor element, wherein said p-doped well has a top part, wherein said p-doped third implanted zone is arranged on said p-doped well, wherein said p-doped third implanted zone forms, with said p-doped well, a collector of said bipolar transistor, wherein said fourth implanted zone is arranged in said top part, wherein said first trench isolation separates said first and second implanted zones, wherein said first trench isolation extends into said n-doped first semiconductor element by an amount equal to a first depth, wherein said first trench isolation extends into said n-doped first semiconductor element without reaching said bottom of said n-doped first semiconductor element, wherein said second trench isolation extends as far as below said n-doped first semiconductor element, and wherein said third trench isolation separates said third and fourth implanted zones and extends to a depth equal to said first depth.
2. The manufacture of claim 1 , wherein said p-doped second implanted zone is separated from said p-doped well by a thickness of said n-doped first semiconductor element, wherein said thickness is between 20 and 150 nm.
3. The manufacture of claim 1 , wherein said p-doped well makes contact with an entirety of said bottom of said n-doped first semiconductor element.
4. The manufacture of claim 1 , wherein said first and second implanted zones extend into said first semiconductor element to a depth larger than the first depth of said first trench isolation.
5. The manufacture of claim 1 , wherein said first trench isolation extends to the first depth between 5 and 50 nm into said n-doped first semiconductor element.
6. The manufacture of claim 1 , further comprising a first electronic component, a second electronic component, an ultra-thin buried oxide (UTBOX) insulating layer, a first ground plane, and a second ground plane, wherein said buried UTBOX insulating layer is arranged under said first electronic component, wherein said buried UTBOX insulating layer is arranged under said second electronic component, wherein said buried UTBOX insulating layer is plumb with said first electronic component, wherein said buried UTBOX insulating layer is plumb with said second electronic component, wherein said n-doped first implanted zone passes through said buried insulating layer, wherein said second implanted zone passes through said buried insulating layer, wherein said third implanted zone passes through said buried insulating layer, wherein said first ground plane is arranged plumb with said first electronic component under said buried insulating layer, wherein said second ground plane is arranged plumb with said second electronic component under said buried insulating layer, wherein said first semiconductor element forms said first ground plane, wherein said top part of said p-doped well forms said second ground plane, wherein said p-doped second implanted zone is suitable for connection to a first biasing voltage, wherein said third implanted zone is suitable for connection to a second biasing voltage, and wherein said first biasing voltage is different from said second biasing voltage.
7. The manufacture of claim 6 , wherein said n-doped first implanted zone and said p-doped second implanted zone are arranged on either side of said transistor.
8. The manufacture of claim 1 , wherein said second implanted zone is arranged between said first and third implanted zones.