Nitride semiconductor light-emitting element and method for producing same
Disclosed is a nitride semiconductor light-emitting element comprising a p-type nitride semiconductor layer 1, a p-type nitride semiconductor layer 2, and a p-type nitride semiconductor layer 3 placed in order above a nitride semiconductor active layer, wherein the p-type nitride semiconductor layer 1 and p-type nitride semiconductor layer 2 each contain A1, the average A1 composition of the p-type nitride semiconductor layer 1 is equivalent to the average A1 composition of the p-type nitride semiconductor layer 2, the p-type nitride semiconductor layer 3 has a smaller band gap than the p-type nitride semiconductor layer 2, the p-type impurity concentration of the p-type nitride semiconductor layer 2 and the p-type impurity concentration of the p-type nitride semiconductor layer 3 are both lower than the p-type impurity concentration of the p-type nitride semiconductor layer 1, and a method for producing same.
1. A nitride semiconductor light-emitting element comprising:
an n-type nitride semiconductor layer;
a nitride semiconductor active layer provided on said n-type nitride semiconductor layer;
a p-type nitride semiconductor layer provided on said nitride semiconductor active layer, said p-type nitride semiconductor layer including a first p-type nitride semiconductor layer, a second p-type nitride semiconductor layer and a third p-type nitride semiconductor layer in this order from the side of said nitride semiconductor active layer, said first p-type nitride semiconductor layer and said second p-type nitride semiconductor layer containing Al respectively, said third p-type nitride semiconductor layer having a smaller band gap than said second p-type nitride semiconductor layer, said first p-type nitride semiconductor layer contacting said second p-type nitride semiconductor layer; and
an undoped Al x Ga (1-x) N layer between said nitride semiconductor active layer and said first p-type nitride semiconductor layer.
2. The nitride semiconductor light-emitting element according to claim 1 , wherein
said p-type nitride semiconductor layer further includes a fourth p-type nitride semiconductor layer on a side of said third p-type nitride semiconductor layer opposite to the side where said nitride semiconductor active layer is set,
said fourth p-type nitride semiconductor layer has a smaller band gap than said second p-type nitride semiconductor layer, and
the p-type impurity concentration in said fourth p-type nitride semiconductor layer is higher than the p-type impurity concentration in said third p-type nitride semiconductor layer.
3. The nitride semiconductor light-emitting element according to claim 1 , wherein a p-type impurity concentration in said first p-type nitride semiconductor layer is higher than a p-type impurity concentration in said third p-type nitride semiconductor layer.
4. The nitride semiconductor light-emitting element according to claim 1 , wherein said p-type nitride semiconductor layer further includes a fourth p-type nitride semiconductor layer on a side of said third p-type nitride semiconductor layer opposite to the side of said nitride semiconductor active layer, and
said fourth p-type nitride semiconductor layer has a smaller band gap than said second p-type nitride semiconductor layer.