Optical scanning apparatus and scanning microscope apparatus
View Patent ↗Provided is an optical scanning apparatus including: a deflector capable of deflecting an entering beam while switching an advancing direction thereof among a plurality of direction at a predetermined switching timing; a mirror array including a plurality of angle setting mirrors that are placed at angles different from one another on respective optical paths of the beams deflected by the deflector, each of the angle setting mirrors reflecting the beam while giving thereto a relative angle on the same plane for each optical path, and gathering the beam on the same point; and a first scanner that is provided so as to be swingable about an axial line perpendicular to the plane in synchronization with the switching timing, the first scanner reflecting each beam that is caused by the mirror array to enter the same point from a different direction and applying for scanning the beam along the same trajectory.
1. An optical scanning apparatus comprising:
a deflector capable of deflecting an entering laser beam while switching an advancing direction thereof among a plurality of direction at a predetermined switching timing;
an angle setting unit including a plurality of angle setting mirrors that are placed at angles different from one another on respective optical paths of the laser beams deflected by the deflector, each of the angle setting mirrors reflecting the laser beam while giving thereto a relative angle on the same plane for each optical path, and gathering the laser beam on the same point; and
a swingable mirror that is provided so as to be swingable about an axial line perpendicular to the plane in synchronization with the switching timing, the swingable mirror reflecting each laser beam that is caused by the angle setting unit to enter the same point from a different direction and applying for scanning the laser beam along the same trajectory.
2. The optical scanning apparatus according to claim 1 , wherein
the angle setting unit includes a plurality of pairs of: a plurality of angle setting mirror groups in which angle settings of the plurality of angle setting mirrors are different from one another; and a plurality of reflecting mirrors that reflect the laser beams deflected by the deflector and cause the laser beams to respectively enter the angle setting mirrors of each angle setting mirror group, and
the pairs of the angle setting mirror groups and the reflecting mirrors are respectively provided at positions different in distance from the swingable mirror so as to be selectively insertable/detachable such that the laser beams reflected on the angle setting mirrors are gathered on the same point of the swingable mirror.
3. The optical scanning apparatus according to claim 1 , wherein
the angle setting unit includes: a plurality of angle setting mirror groups in which angle settings of the plurality of angle setting mirrors are different from one another; and a reflecting mirror that reflects the laser beams deflected by the deflector and causes the laser beams to respectively enter the angle setting mirrors of each angle setting mirror group,
the angle setting mirror groups are respectively provided at positions different in distance from the swingable mirror so as to be selectively insertable/detachable such that the laser beams reflected on the angle setting mirrors are gathered on the same point of the swingable mirror, and
the reflecting mirror is provided on the optical paths of the laser beams from the deflector so as to be movable in a direction along the optical paths and/or swingable about another axial line parallel to the axial line.
4. The optical scanning apparatus according to claim 1 , wherein
the angle setting unit includes: an angle setting mirror group in which angles of the angle setting mirrors and distances among the angle setting mirrors are changeable; and a reflecting mirror that reflects the laser beams deflected by the deflector and causes the laser beams to respectively enter the angle setting mirrors of the angle setting mirror group,
the angle setting mirror group is movable in a direction in which the angle setting mirrors and the swingable mirror come closer to or more away from each other, and
the reflecting mirror is provided on the optical paths of the laser beams deflected by the deflector so as to be movable in a direction along the optical paths and/or swingable about another axial line parallel to the axial line.
5. The optical scanning apparatus according to claim 1 , further comprising another swingable mirror that applies for scanning the laser beam applied for scanning by the swingable mirror in a direction orthogonal to a scanning direction of the swingable mirror.
6. A scanning microscope apparatus comprising:
the optical scanning apparatus according to claim 1 ;
an observation optical system that irradiates a sample with the laser beam applied for scanning by the optical scanning apparatus; and
a detection unit that detects light from the sample that is irradiated with the laser beam by the observation optical system.
7. The scanning microscope apparatus according to claim 6 , further comprising:
a restoration unit that associates the light from the sample detected by the detection unit with a scanning position of the laser beam and restores two-dimensional information or three-dimensional information; and
a display unit that displays the two-dimensional information or the three-dimensional information restored by the restoration unit.