IP Library Granted Patent US 9,123,841
Granted Patent B2
US 9,123,841 · App. 14/281,108 · Granted Sep 1, 2015

Nanowire photo-detector grown on a back-side illuminated image sensor

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Quick Facts
Patent No.
US 9,123,841
App. No.
14/281,108
Granted
Sep 1, 2015
Kind
B2
Abstract

An embodiment relates to a device comprising a substrate having a front side and a back-side, a nanowire disposed on the back-side and an image sensing circuit disposed on the front side, wherein the nanowire is configured to be both a channel to transmit wavelengths up to a selective wavelength and an active element to detect the wavelengths up to the selective wavelength transmitted through the nanowire.

Claims (23)

1. A device comprising a substrate having a front side, a back-side exposed to incoming radiation, a waveguide comprising a nanowire disposed on or within the substrate, a vertical photogate, and an image sensing circuit disposed on the front side, wherein the nanowire is configured to be both a channel to transmit wavelengths of the incoming radiation up to a selective wavelength and an active element to detect the wavelengths of the incoming radiation up to the selective wavelength transmitted through the nanowire; wherein the device does not include a color filter.

2. The device of claim 1 , wherein the nanowire is disposed within a cavity in the substrate, the front side is not exposed to the incoming radiation, and the image sensing circuit is on or within a layer on the front-side of the substrate.

3. The device of claim 1 , wherein the device does not include a color filter nor infra-red filter.

4. The device of claim 1 , wherein the nanowire comprises a semiconductor.

5. The device of claim 1 , further comprising a lens structure or an optical coupler over the nanowire, wherein the lens structure or the optical coupler is operably coupled to the nanowire.

6. The device of claim 1 , further comprising an anti-reflective layer disposed on the substrate.

7. The device of claim 1 , wherein the active element is configured to be a photodiode, a charge storage capacitor, or combinations thereof.

8. The device of claim 1 , wherein the device is an image sensor.

9. The device of claim 1 , wherein the selective wavelength is a function of the diameter of the nanowire.

10. The device of claim 1 , further comprising a cladding, wherein the cladding comprises a passive waveguide.

11. The device of claim 1 , further comprising a peripheral photosensitive element, wherein the peripheral photosensitive element is operably coupled to a cladding.

12. The device of claim 11 , wherein the peripheral photosensitive element is located on or within a substrate.

13. A compound light detector comprising at least two devices of claim 1 , wherein the compound light detector is configured to reconstruct a spectrum of wavelengths of an electromagnetic radiation beam.

14. The compound light detector of claim 13 , wherein the nanowires in the two devices have different diameters.

15. The compound light detector of claim 13 , further comprising a cladding surrounding the nanowires and of one or more different materials, wherein the cladding permits electromagnetic radiation of wavelengths beyond the selective wavelength to remains within the cladding and be transmitted to a peripheral photosensitive element.

16. The compound light detector of claim 13 , wherein the spectrum of wavelengths comprises wavelengths of visible light, IR or combinations thereof.

17. The compound light detector of claim 13 , wherein a first device of the at least two devices comprises a core of a different diameter than that of a second device of at least two devices and the spectrum of wavelengths comprises wavelengths of visible light, IR or combinations thereof.

18. The compound light detector of claim 13 , wherein the compound light detector is configured to resolve black and white or luminescence information contained in the electromagnetic radiation beam.

19. The compound light detector of claim 13 , wherein the compound light detector is configured to detect energies of the electromagnetic radiation of four different ranges of wavelengths.

20. The compound light detector of claim 19 , wherein the energies of the electromagnetic radiation of the four different ranges of wavelengths are combined to construct red, green and blue colors.

21. A device comprising a substrate having a front side, a back-side exposed to incoming radiation, a wavelength comprising a nanowire disposed on or within the substrate, an insulator layer around the nanowire and a metal layer around the insulator layer to form a capacitor that is configured to collect excitons generated in the nanowire and store charge in the capacitor, and an image sensing circuit disposed on the front side, wherein the nanowire is configured to be both a channel to transmit wavelengths of the incoming radiation up to a selective wavelength and an active element to detect the wavelengths of the incoming radiation up to the selective wavelength transmitted through the nanowire; wherein the device does not include a color filter; wherein the nanowire is configured to convert energy of the electromagnetic radiation transmitted through the nanowire and to generate electron hole-pairs (excitons).

22. The device of claim 21 , wherein the nanowire comprises a pn or pin junction that is configured to detect the excitons generated in the nanowire.

23. The device of claim 21 , further comprising metal contacts that connect to the metal layer and nanowire to control and detect the charge stored in the capacitor.

Assignments (4)
SECURITY INTEREST Recorded Mar 28, 2017
From: ZENA TECHNOLOGIES, INC.
To: PILLSBURY WINTHROP SHAW PITTMAN LLP
Reel/Frame 042107/0543 →
SECURITY INTEREST Recorded Mar 10, 2017
From: ZENA TECHNOLOGIES, INC.
To: HABBAL, FAWWAZ
Reel/Frame 041941/0895 →
SECURITY INTEREST Recorded Mar 7, 2017
From: ZENA TECHNOLOGIES, INC.
To: WU, XIANHONG
Reel/Frame 041901/0038 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2014
From: YU, YOUNG-JUNE; WOBER, MUNIB
To: ZENA TECHNOLOGIES, INC.
Reel/Frame 032924/0068 →