Memristor comprising film with comb-like structure of nanocolumns of metal oxide embedded in a metal oxide matrix
View Patent ↗Films having a comb-like structure of nanocolumns of Sm 2 O 3 embedded in a SrTiO 3 formed spontaneously on a substrate surface by pulsed laser deposition. In an embodiment, the nanocolumns had a width of about 20 nm with spaces between nanocolumns of about 10 nm. The films exhibited memristive behavior, and were extremely uniform and tunable. Oxygen deficiencies were located at vertical interfaces between the nanocolumns and the matrix. The substrates may be single-layered or multilayered.
1. An article comprising:
a substrate having a surface;
a film on the surface of said substrate, the film comprising a plurality of aligned nanocolumns of Sm 2 O 3 embedded in a matrix of SrTiO 3 , the film further characterized as comprising a vertical interface separating the nanocolumns from the matrix, said interface further characterized as comprising an oxygen deficient channel suitable for providing said article with memristive properties.
2. The article of claim 1 , wherein the substrate comprises a doped SrTiO 3 .
3. The article of claim 1 , wherein the substrate is a multilayered substrate.
4. The article of claim 3 , wherein the multilayered substrate comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the SiO 2 layer, and the fourth layer of SrRuO 3 on the IBAD-MgO layer.
5. The article of claim 3 , wherein the multilayered substrate comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the silicon dioxide layer, and a fourth layer of niobium-doped SrTiO 3 on the IBAD-MgO layer.
6. The article of claim 3 , wherein the multilayered substrate comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the silicon dioxide layer, and a fourth layer of La 0.5 Sr 0.5 CoO 3 on the layer of IBAD-MgO.
7. An article prepared by a process comprising:
providing a target material comprising a mixture of Sm 2 O 3 and SrTiO 3 ; and
using the target material to deposit a film onto a surface of a substrate by pulsed laser deposition, the film comprising a plurality of aligned nanocolumns of Sm 2 O 3 embedded in a matrix of SrTiO 3 .
8. The article of claim 7 , wherein the substrate comprises a doped SrTiO 3 .
9. The article of claim 7 , wherein the substrate is a multilayered substrate.
10. The article of claim 9 , wherein the multilayered substrate comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the SiO 2 layer, and the fourth layer of SrRuO 3 on the IBAD-MgO layer.
11. The article of claim 9 , wherein the multilayered substrate comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the silicon dioxide layer, and a fourth layer of niobium-doped SrTiO 3 on the IBAD-MgO layer.
12. The article of claim 9 , wherein the multilayered substrate comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the silicon dioxide layer, and a fourth layer of La 0.5 Sr 0.5 CoO 3 on the layer of IBAD-MgO.
13. An article comprising:
a substrate having a surface; and
a film on the surface of the substrate, the film comprising a plurality of nanocolumns of a first metal oxide material embedded in a matrix of a second metal oxide material, the film further characterized as comprising a vertical interface separating the nanocolumn of the first metal oxide from the matrix of the second metal oxide, said interface further characterized as comprising an oxygen deficient channel suitable for providing said article with memristive properties.
14. The article of claim 13 , wherein the substrate comprises a doped SrTiO 3 .
15. The article of claim 14 , wherein the matrix comprises SrTiO 3 .
16. The article of claim 15 , wherein the first metal oxide comprises Sm 2 O 3 .
17. The article of claim 16 , wherein the second metal oxide is selected from Ba 0.6 Sr 0.4 TiO 3 and BaTiO 3 .
18. The article of claim 13 , wherein the substrate is multilayered and comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the SiO 2 layer, and the fourth layer of SrRuO 3 on the IBAD-MgO layer.
19. The article of claim 13 , wherein the substrate is multilayered and comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the silicon dioxide layer, and a fourth layer of niobium-doped SrTiO 3 on the IBAD-MgO layer.
20. The article of claim 13 , wherein the substrate is multilayered and comprises a first layer of silicon, a second layer of silicon dioxide on the silicon layer, a third layer of IBAD-MgO on the silicon dioxide layer, and a fourth layer of La 0.5 Sr 0.5 CoO 3 on the layer of IBAD-MgO.