Sputter chamber pressure gauge with vibration absorber
View Patent ↗A pressure gauge for measuring pressure in a vacuum chamber includes a flange couplable with the vacuum chamber, a pressure sensor configured to measure pressure, an air valve between the flange and the pressure sensor, and a vibration dampening assembly configured to dampen vibration in the pressure gauge. A sputtering system for sputter deposition includes a sputter chamber and the pressure gauge. The flange of the pressure gauge is coupled with the sputter chamber. A method of measuring pressure in a vacuum chamber with the pressure gauge includes coupling the flange with the vacuum chamber, dampening vibration in the pressure gauge with the vibration dampening assembly, and obtaining a pressure measurement from the pressure sensor.
1. A pressure gauge for measuring pressure in a vacuum chamber, the pressure gauge comprising:
a flange couplable with the vacuum chamber;
a pressure sensor configured to measure pressure;
an air valve between the flange and the pressure sensor; and
a vibration dampening assembly disposed between the air valve and the pressure sensor configured to dampen vibration in the pressure gauge.
2. The pressure gauge of claim 1 , wherein the vibration dampening assembly further comprises an air conduit between the air valve and the pressure sensor, and wherein the air conduit is configured to dampen vibration from the vacuum chamber.
3. The pressure gauge of claim 2 , wherein a portion of the air conduit is flexible along a longitudinal axis of the air conduit.
4. The pressure gauge of claim 3 , wherein the flexible portion comprises a bellows.
5. The pressure gauge of claim 1 , wherein the vibration dampening assembly further comprises a ring member circumferentially coupled to the pressure sensor, and wherein the ring member is configured to dampen vibration at the pressure sensor.
6. The pressure gauge of claim 5 , wherein the vibration dampening assembly further comprises a clamp member configured to secure the ring member to the pressure sensor.
7. The pressure gauge of claim 6 , wherein the clamp member comprises a first portion and a second portion coupled with the first portion, wherein the vibration dampening assembly further comprises a base member, and wherein the base member comprises the first portion of the of the clamp member.
8. The pressure gauge of claim 1 , wherein the pressure sensor comprises a capacitance manometer.
9. The pressure gauge of claim 1 , wherein the vibration dampening assembly further comprises a base member having a valve seat, and wherein the air valve is coupled to the valve seat.
10. The pressure gauge of claim 1 , wherein the flange comprises a least one through hole, wherein the vibration dampening assembly further comprises a base member having at least one through hole, and wherein the at least one through hole of the flange is aligned with the at least one through hole of the base member.
11. A sputtering system for sputter deposition, comprising:
a sputter chamber; and
a pressure gauge comprising:
a flange coupled with the sputter chamber;
a pressure sensor configured to measure pressure;
an air valve between the flange and the pressure sensor; and
a vibration dampening assembly disposed between the air valve and the pressure sensor configured to dampen vibration in the pressure gauge.
12. The sputtering system of claim 11 , wherein the vibration dampening assembly further comprises an air conduit between the air valve and the pressure sensor, and wherein the air conduit is configured to dampen vibration from the sputter chamber.
13. The sputtering system of claim 12 , wherein a portion of the air conduit is flexible along a longitudinal axis of the air conduit.
14. The sputtering system of claim 13 , wherein the flexible portion comprises a bellows.
15. The sputtering system of claim 11 , wherein the vibration dampening assembly further comprises a ring member circumferentially coupled to the pressure sensor, and wherein the ring member is configured to dampen vibration from the pressure sensor.
16. The sputtering system of claim 15 , wherein the vibration dampening assembly further comprises a clamp member configured to secure the ring member to the pressure sensor.
17. The sputtering system of claim 16 , wherein the clamp member comprises a first portion and a second portion coupled with the first portion, wherein the vibration dampening assembly further comprises a base member, and wherein the base member comprises the first portion of the of the clamp member.
18. The sputtering system of claim 11 , wherein the pressure sensor comprises a capacitance manometer.
19. The sputtering system of claim 11 , wherein the vibration dampening assembly further comprises a base member having a valve seat, and wherein the air valve is coupled to the valve seat.
20. The sputtering system of claim 11 , wherein the flange comprises a least one through hole, wherein the vibration dampening assembly further comprises a base member having at least one through hole, and wherein the at least one through hole of the flange is aligned with the at least one through hole of the base member.
21. A method of measuring pressure in a vacuum chamber with a pressure gauge, the pressure gauge having a flange, a pressure sensor, an air valve between the flange and the pressure sensor, and a vibration dampening assembly, the method comprising:
coupling the flange with the vacuum chamber;
dampening vibration in the pressure gauge with the vibration dampening assembly disposed between the air valve and the pressure sensor; and
obtaining a pressure measurement from the pressure sensor.
22. The method of claim 21 , wherein the vibration dampening assembly further comprises an air conduit between the air valve and the pressure sensor, and wherein the dampening the vibration in the pressure gauge further comprises dampening vibration from the vacuum chamber with the air conduit.
23. The method of claim 22 , wherein a portion of the air conduit is flexible along a longitudinal axis of the air conduit.
24. The method of claim 23 , wherein the flexible portion comprises a bellows.
25. The method of claim 21 , wherein the vibration dampening assembly further comprises a ring member circumferentially coupled to the pressure sensor, and wherein the dampening the vibration in the pressure gauge further comprises dampening vibration from the pressure sensor with the ring member.
26. The method of claim 25 , wherein the vibration dampening assembly further comprises a clamp member, the method further comprising securing the ring member to the pressure sensor.
27. The method of claim 26 , wherein the clamp member comprises a first portion and a second portion coupled with the first portion, wherein the vibration dampening assembly further comprises a base member, and wherein the base member comprises the first portion of the of the clamp member.
28. The method of claim 21 , wherein the pressure sensor comprises a capacitance manometer.
29. The method of claim 21 , wherein the vibration dampening assembly further comprises a base member having a valve seat, and wherein the air valve is coupled to the valve seat.
30. The method of claim 21 , wherein the flange comprises a least one through hole, wherein the vibration dampening assembly further comprises a base member having at least one through hole, and wherein the at least one through hole of the flange is aligned with the at least one through hole of the base member.