Method of manufacturing solar cell and method of forming doping region

1. A method of manufacturing a solar cell, the method comprising:

forming a doping region comprising first and second portions having different doping concentrations by ion-implanting a dopant into a semiconductor substrate; and

forming an electrode connected to the doping region,

wherein, in the forming of the doping region, the first and second portions are simultaneously formed by the same process using a mask that is spaced apart from the semiconductor substrate,

wherein, in the forming of the doping region, the first and second portions are simultaneously formed through a single ion implantation,

wherein, in the forming of the doping region, ions of the dopant are implanted in a state in which the mask comprising an opening to expose a region corresponding to the first portion and a cover part to cover a region corresponding to the second portion is positioned on the semiconductor substrate at a distance,

wherein the ions of the dopant are implanted into the semiconductor substrate by passing through the opening and spreading out from the opening,

wherein the ions of the dopant having passed through the opening are implanted into the first portion of the semiconductor substrate, the ions of the dopant having passed through the opening are partially implanted into the second portion of the semiconductor substrate by spreading outside of the opening, and

wherein the first portion has a relatively high doping concentration than the second portion.

2. The method according to claim 1 , wherein the opening comprises a plurality of openings, and

wherein, in the forming of the doping region, when a distance between the plurality of openings is denoted as a first distance, the ions of the dopant having passed through each opening spread out from the plurality of openings while moving from the plurality of openings toward the semiconductor substrate by half the first distance or a greater distance than the half the first distance.

3. The method according to claim 1 , wherein, in the forming of the doping region, the opening comprises first and second openings adjacent to each other, and

wherein the ions of the dopant spreading out of the first opening and the ions of the dopant spreading out of the second opening overlap with each other at the semiconductor substrate to form an overlapping area in the semiconductor substrate.

4. The method according to claim 1 , wherein, in the forming of the doping region, the first portion is formed at a portion of the semiconductor substrate corresponding to the opening so as to have a first doping concentration, and the second portion is formed at a portion of the semiconductor substrate corresponding to the cover part so as to have a second doping concentration that is lower than the first doping concentration.

5. The method according to claim 1 , wherein, in the forming of the doping region, when the ions of the dopant are implanted, ion implantation energy of the ions of the dopant is 3 KeV to 20 KeV.

6. The method according to claim 1 , wherein, in the forming of the doping region, the ions of the dopant are implanted by plasma ion implantation.

7. The method according to claim 1 , wherein, in the forming of the doping region, the distance between the semiconductor substrate and the mask is 4 mm to 8 mm.

8. The method according to claim 1 , wherein the opening has the same or smaller width than the cover part.

9. The method according to claim 8 , wherein a ratio of the width of the opening to the width of the cover part is 0.18 to 1.00.

10. The method according to claim 1 , wherein the opening has a width of 150 nm to 500 nm, and the cover part has a width of 500 nm to 850 nm.

11. The method according to claim 1 , wherein the first portion has a doping concentration of 2.0×10 19 /cm 3 to 5.0×10 19 /cm 3 and a width of 300 nm to 700 nm, and the second portion has a doping concentration of 1.0×10 18 /cm 3 to 2.0×10 19 /cm 3 and a width of 300 nm to 700 nm.

12. The method according to claim 11 , wherein a ratio of the width of the first portion to the width of the second portion is 0.43 to 2.33.

13. The method according to claim 1 , wherein the doping region is at least one of an emitter region and a back surface field region.

14. A method of forming a doping region of a solar cell, the method comprising:

simultaneously forming first and second portions having different doping concentrations by ion-implanting a dopant into a semiconductor substrate by the same process using a mask that is spaced apart from the semiconductor substrate,

wherein, in the forming of the doping region, the first and second portions are simultaneously formed through a single ion implantation,

wherein in the forming of the doping regions of the do s ant are implanted in a state in which the mask comprising an opening to expose a region corresponding to the first portion and a cover part to cover a region corresponding to the second portion is positioned on the semiconductor substrate at a distance,

wherein the ions of the dopant are implanted into the semiconductor substrate by passing through the opening and spreading out from the opening,

wherein the ions of the dopant having passed through the opening are implanted into the first portion of the semiconductor substrate, the ions of the dopant having passed through the opening are partially implanted into the second portion of the semiconductor substrate by spreading outside of the opening, and

wherein the first portion has a relatively high doping concentration than the second portion.

15. The method according to claim 14 , wherein, when the ions of the dopant are implanted, ion implantation energy of the ions of the dopant is 3 KeV to 20 KeV.

16. The method according to claim 14 , wherein the distance between the semiconductor substrate and the mask is 4 mm to 8 mm.