Vertical power MOSFET and IGBT fabrication process with two fewer photomasks
View Patent ↗A process for fabrication of a power semiconductor device is disclosed in which a single photomask is used to define each of p-conductivity well regions and n-conductivity type source regions. In the process a single photomask is deposited on a layer of polysilicon on a wafer, the polysilicon layer is removed from first regions of the power semiconductor device where the p-conductivity well regions and the n-conductivity type source regions are to be formed, and both p-conductivity type and n-conductivity type dopants are introduced into the wafer through the first regions.
1. A process for making a power semiconductor device comprising:
on an n-conductivity type semiconductor substrate forming a layer of gate oxide;
introducing n-conductivity type dopant into the substrate through the gate oxide;
depositing a layer of polycrystalline silicon on the gate oxide;
masking the layer of polycrystalline silicon to define first locations for p-conductivity type impurity;
implanting p-conductivity type impurity to provide p-well regions;
introducing additional p-conductivity type impurity and n-conductivity type impurity through the layer of polycrystalline silicon;
providing a masking layer over an upper surface of the layer of polycrystalline silicon and over exposed sidewalls of the layer of polycrystalline silicon to thereby define second locations within the first locations; and
performing a shallow etch of the semiconductor substrate through the second locations.
2. The process of claim 1 , further comprising:
depositing a layer of insulating material over the layer of polysilicon; and
annealing the layer of insulating material to cause smoothing of that later and diffusion of the n-conductivity type and p-conductivity type impurities into the substrate.
3. The process of claim 2 , further comprising:
providing metal connections to the desired regions of the semiconductor substrate.
4. The process of claim 3 , wherein the power semiconductor device comprises a vertical power Metal Oxide Semiconductor Field Effect Transistor (MOSFET).
5. The process of claim 3 , wherein the power semiconductor device comprises an Insulated Gate Bipolar Transistor (IGBT).
6. The process of claim 5 , wherein the strongly doped p-conductivity type layer is disposed under the whole of the strongly doped n-conductivity type layer.
7. The process of claim 1 , wherein the process for making the power semiconductor device involves no more than four masking steps.
8. A method of manufacturing a power semiconductor device comprising:
(a) forming a layer of gate oxide on an n-conductivity type semiconductor substrate;
(b) implanting an n-conductivity type dopant into the substrate through the gate oxide;
(c) depositing a layer of polycrystalline silicon onto the gate oxide;
(d) depositing a first layer of photoresist onto the layer of polycrystalline silicon thereby defining a plurality of exposed regions;
(e) etching the layer of polycrystalline silicon at each of the plurality of exposed regions;
(f) forming a p-well region by implanting a p-conductivity type dopant into the plurality of exposed regions;
(g) implanting a p-conductivity type dopant through the plurality of exposed regions into the p-well region;
(h) implanting a n-conductivity type dopant through the plurality of exposed regions into the p-well region; and
(i) depositing a second layer of photoresist onto the layer of polycrystalline silicon and portions of the substrate, wherein the layer of polycrystalline silicon has an upper surface and a plurality of sidewalls, and wherein the second layer of photoresist overlies both the upper surface and the sidewalls, and wherein portions of the substrate are exposed between the sidewalls.
9. The method of manufacturing the power semiconductor device of claim 8 , further comprising:
(j) etching the portions of the substrate that are exposed between the sidewalls.
10. The method of manufacturing the power semiconductor device of claim 9 , further comprising:
(k) depositing a layer of insulating material onto the layer of polycrystalline silicon and portions of the substrate; and
(l) depositing a layer of metal over the layer of insulating material.
11. The method of manufacturing the power semiconductor device of claim 10 , further comprising:
(m) etching the layer of metal deposited in (l) to define electrical contacts to the power semiconductor device.
12. The method of manufacturing the power semiconductor device of claim 8 , wherein the implanting of the p-conductivity type dopant in (g) occurs after the forming of the p-well region in (f).
13. The method of manufacturing the power semiconductor device of claim 8 , wherein the implanting of the n-conductivity type dopant in (h) occurs after the implanting of the p-conductivity type dopant in (g).
14. The method of manufacturing the power semiconductor device of claim 8 , wherein no photoresist is involved between the forming of the p-well region in (f) and the implanting of the n-conductivity type dopant in (h).
15. The method of manufacturing the power semiconductor device of claim 8 , wherein the implanting of the p-conductivity type dopant in (g) results in a strongly doped p-conductivity type layer, and wherein the implanting of the n-conductivity type dopant in (h) results in a strongly doped n-conductivity type layer.
16. The method of manufacturing the power semiconductor device of claim 15 , wherein a bottom surface of the strongly doped n-conductivity type layer is entirely in contact with an upper surface of the strongly doped p-conductivity type layer.
17. The method of manufacturing the power semiconductor device of claim 8 , wherein the depositing of the first layer of photoresist in (d) forms a photomask, and wherein the power semiconductor device is manufactured using no more than four photomasks.
18. The method of manufacturing the power semiconductor device of claim 8 , wherein the power semiconductor device is an Insulated Gate Bipolar Transistor (IGBT).
19. The method of manufacturing the power semiconductor device of claim 8 , wherein the power semiconductor device is a vertical power Metal Oxide Semiconductor Field Effect Transistor (MOSFET).
20. A method of manufacturing a power semiconductor device comprising:
(a) forming a p-well region in an n-conductivity type semiconductor substrate;
(b) forming a strongly doped p-conductivity type layer within the p-well region, wherein the strongly doped p-conductivity type layer is formed after the forming of the p-well region in (a) without applying a mask between the forming of the p-well region in (a) and the forming of the strongly doped p-conductivity type layer in (b); and
(c) forming a strongly doped n-conductivity type layer within the p-well region, wherein the strongly doped n-conductivity type layer contacts the strongly doped p-conductivity type layer of (b) such that the n-conductivity type layer is disposed entirely above the strongly doped p-conductivity type layer of (b), wherein the strongly doped n-conductivity type layer is formed without applying a mask between the forming of the strongly doped p-conductivity type layer in (b) and the forming of the strongly doped n-conductivity type layer in (c), and wherein the power semiconductor device is manufactured using no more than four masks.