METHOD FOR FABRICATING A MAGNETIC SHIELD AT REDUCED COST AND WITH ENHANCED RELIABILITY
A method provides a magnetic transducer having an air-bearing surface. The method includes providing a main pole that has a plurality of sidewalls. The step of providing the main pole includes providing a trailing bevel. A side shield after the trailing bevel has been provided.
1 . A method for fabricating magnetic transducer having air-bearing surface (ABS) location comprising:
providing a main pole, the main pole having a plurality of sidewalls, the step of providing the main pole including providing a trailing bevel;
providing a side shield after the trailing bevel has been provided.
2 . The method of claim 1 wherein the magnetic transducer includes an intermediate layer, the method further comprising:
forming a trench in the intermediate layer using at least one etch, the trench having a location and profile corresponding to the main pole; and
wherein the step of providing the main pole further includes providing the main pole in the trench.
3 . The method of claim 2 wherein the step of providing the main pole in the trench further includes:
depositing at least one nonmagnetic layer, a portion of the at least one nonmagnetic layer residing in the trench;
providing at least one magnetic pole material; and
planarizing the at least one magnetic pole material.
4 . The method of claim 2 further comprising:
providing a conformal portion of a side gap such that at least a portion of the main pole is conformal with the trench.
5 . The method of claim 1 wherein the main pole has a bottom and a top wider than the bottom.
6 . The method of claim 1 wherein the step of providing the main pole further includes:
ion milling the main pole to form the trailing bevel
7 . The method of claim 2 wherein the step of providing the side shield further includes:
depositing at least one nonmagnetic gap layer on a portion of the pole; and
removing a portion of the intermediate layer adjacent to the main pole.
8 . The method of claim 7 wherein the side shield is part of a wraparound shield and wherein the step of providing the side shield further includes:
plating the wraparound shield.
9 . A method for fabricating magnetic transducer having air-bearing surface (ABS) location comprising:
providing an intermediate layer;
providing at least one mask on the intermediate layer and having an aperture therein;
performing at least one etch to remove a first portion of the intermediate layer exposed by the aperture and to form a trench therein, the trench having a location and a profile corresponding to a main pole;
depositing at least one nonmagnetic layer, a portion of the at least one nonmagnetic layer residing in the trench;
depositing at least one magnetic pole material;
planarizing the at least one magnetic pole material;
ion milling a portion of the at least one magnetic pole material to provide a trailing bevel and form the main pole;
providing a nonmagnetic write gap on the main pole;
removing a second portion of the intermediate layer adjacent to the main pole; and
providing a side shield after the ion milling step and after the step of removing the second portion of the intermediate layer, a portion of the at least one nonmagnetic layer forming at least a portion of the side gap, the side gap residing between the side shield and the main pole.
10 . The method of claim 9 wherein the side shield is part of a wraparound shield and wherein the step of providing the side shield further includes:
providing the wraparound shield.