IP Library Patent Application 14299914
Patent Application
App. No. 14/299,914

METHOD FOR FABRICATING A MAGNETIC SHIELD AT REDUCED COST AND WITH ENHANCED RELIABILITY

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Quick Facts
Patent No.
US None
App. No.
14/299,914
Abstract

A method provides a magnetic transducer having an air-bearing surface. The method includes providing a main pole that has a plurality of sidewalls. The step of providing the main pole includes providing a trailing bevel. A side shield after the trailing bevel has been provided.

Claims (33)

1 . A method for fabricating magnetic transducer having air-bearing surface (ABS) location comprising:

providing a main pole, the main pole having a plurality of sidewalls, the step of providing the main pole including providing a trailing bevel;

providing a side shield after the trailing bevel has been provided.

2 . The method of claim 1 wherein the magnetic transducer includes an intermediate layer, the method further comprising:

forming a trench in the intermediate layer using at least one etch, the trench having a location and profile corresponding to the main pole; and

wherein the step of providing the main pole further includes providing the main pole in the trench.

3 . The method of claim 2 wherein the step of providing the main pole in the trench further includes:

depositing at least one nonmagnetic layer, a portion of the at least one nonmagnetic layer residing in the trench;

providing at least one magnetic pole material; and

planarizing the at least one magnetic pole material.

4 . The method of claim 2 further comprising:

providing a conformal portion of a side gap such that at least a portion of the main pole is conformal with the trench.

5 . The method of claim 1 wherein the main pole has a bottom and a top wider than the bottom.

6 . The method of claim 1 wherein the step of providing the main pole further includes:

ion milling the main pole to form the trailing bevel

7 . The method of claim 2 wherein the step of providing the side shield further includes:

depositing at least one nonmagnetic gap layer on a portion of the pole; and

removing a portion of the intermediate layer adjacent to the main pole.

8 . The method of claim 7 wherein the side shield is part of a wraparound shield and wherein the step of providing the side shield further includes:

plating the wraparound shield.

9 . A method for fabricating magnetic transducer having air-bearing surface (ABS) location comprising:

providing an intermediate layer;

providing at least one mask on the intermediate layer and having an aperture therein;

performing at least one etch to remove a first portion of the intermediate layer exposed by the aperture and to form a trench therein, the trench having a location and a profile corresponding to a main pole;

depositing at least one nonmagnetic layer, a portion of the at least one nonmagnetic layer residing in the trench;

depositing at least one magnetic pole material;

planarizing the at least one magnetic pole material;

ion milling a portion of the at least one magnetic pole material to provide a trailing bevel and form the main pole;

providing a nonmagnetic write gap on the main pole;

removing a second portion of the intermediate layer adjacent to the main pole; and

providing a side shield after the ion milling step and after the step of removing the second portion of the intermediate layer, a portion of the at least one nonmagnetic layer forming at least a portion of the side gap, the side gap residing between the side shield and the main pole.

10 . The method of claim 9 wherein the side shield is part of a wraparound shield and wherein the step of providing the side shield further includes:

providing the wraparound shield.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2019
From: WESTERN DIGITAL (FREMONT), LLC
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 050450/0582 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 2, 2015
From: YU, MINGJUN; LI, DONGHONG; WANG, LIEN-CHANG; ZHONG, LIEPING; PAN, TAO
To: WESTERN DIGITAL (FREMONT), LLC
Reel/Frame 034866/0979 →